Research on adaptive deformable mirror technology for voice coil actuators(VCAs)is an important trend in the development of large ground-based telescopes.A voice coil adaptive deformable mirror contains a large number...Research on adaptive deformable mirror technology for voice coil actuators(VCAs)is an important trend in the development of large ground-based telescopes.A voice coil adaptive deformable mirror contains a large number of actuators,and there are problems with structural coupling and large temperature increases in their internal coils.Additionally,parameters of the traditional proportional integral derivative(PID)control cannot be adjusted in real-time to adapt to system changes.These problems can be addressed by introducing fuzzy control methods.A table lookup method is adopted to replace real-time calculations of the regular fuzzy controller during the control process,and a prototype platform has been established to verify the effectiveness and robustness of this process.Experimental tests compare the control performance of traditional and fuzzy proportional integral derivative(Fuzzy-PID)controllers,showing that,in system step response tests,the fuzzy control system reduces rise time by 20.25%,decreases overshoot by 78.24%,and shortens settling time by 67.59%.In disturbance rejection experiments,fuzzy control achieves a 46.09%reduction in the maximum deviation,indicating stronger robustness.The Fuzzy-PID controller,based on table lookup,outperforms the standard controller significantly,showing excellent potential for enhancing the dynamic performance and disturbance rejection capability of the voice coil motor actuator system.展开更多
In order to compensate for the limitation of conventional XY table used in semiconductor integrated circuits(IC) packaging and improve its speed and accuracy, a voice coil actuator (VCA) direct-drive high-speed and pr...In order to compensate for the limitation of conventional XY table used in semiconductor integrated circuits(IC) packaging and improve its speed and accuracy, a voice coil actuator (VCA) direct-drive high-speed and precision positioning XY table used in wire bonder was proposed. Also, a novel flexible decoupling mechanism was used in the positioning table, and the small moving mass enabled the positioning table to move at high speed and precision. XY table deformation interference caused by assembly error and instant interference generated by dynamic load moving with high speed and acceleration can be eliminated through the flexible decoupling mechanism. Considering the positioning table as lumped mass spring system,the dynamic equations of the mechanical system and the VCA were built according to the Newton mechanics principle and electromagnetic theory. Then the electromechanical coupling control model of the system was created through Laplace transform. Based on displacement PID controller, the loop-locked controlling algorithm of the positioning system was investigated. The dynamic control algorithm effectively improved the system dynamic performance. The precision test of the prototype machine was carried out, and the results validated the correctness of the model and the theory. Compared with traditional XY table, the table has higher speed, acceleration and positioning accuracy.展开更多
A novel 4 by 4 array of electromagnetic micro-actuators operating on the principle of voice-coil actuators is presented. The intended application of the array is dynamic tactile stimulation, where multiple actuators g...A novel 4 by 4 array of electromagnetic micro-actuators operating on the principle of voice-coil actuators is presented. The intended application of the array is dynamic tactile stimulation, where multiple actuators generate an illusion of touching a moving pattern. In comparison to earlier designs [1-3], the device has smaller dimensions of 2.28 mm in diameter and 7 mm in length, which allowed its use in an array capable of hosting up to a 5 by 5 set of actuators with a rectangular shape covering an area of 18 mm by 21 mm. Using finite element analysis of several conceptual designs of actuators [1,4,5], it was established that the voice-coil type device (where the coil is the moving part) has most beneficial characteristics for the envisioned application. These include sufficient force over a relatively large distance, allowing tactile stimulation of surfaces with irregular shape, fast response, and small foot-print that matches the density of the tactile sensory neurons in the human finger. Eexperimental evaluation of the operation of neighboring actuators spaced at 3.3 mm apart, indicates that there is no crosstalk between the actuators. The resulting density exceeds that of previously reported alternative designs based on moveable permanent magnets [4,6]. Static force measurement indicate that each micro-actuator can produce at least 26 mN of repulsive force over a stroke of 2100 μm with a peak force of 34 mN. The driving circuit operates at 13.5V and generates a vibration frequency of up to 265 Hz without significant change of the force-displacement characteristics. In the higher frequency range (above 100 Hz) the actuator provides at least 15 mN of force over a slightly reduced stroke of 2300 μm, and a peak force of 21 mN. All of the above parameters meet the required threshold values of tactile human perception known from [2] and [3].展开更多
基金supported by the National Key R&D Program of China (2022YFA1603001,2021YFC2801402)the National Nature Science Foundation of China (12073053)the Science and Technology Plan of Inner Mongolia (2021GG0245).
文摘Research on adaptive deformable mirror technology for voice coil actuators(VCAs)is an important trend in the development of large ground-based telescopes.A voice coil adaptive deformable mirror contains a large number of actuators,and there are problems with structural coupling and large temperature increases in their internal coils.Additionally,parameters of the traditional proportional integral derivative(PID)control cannot be adjusted in real-time to adapt to system changes.These problems can be addressed by introducing fuzzy control methods.A table lookup method is adopted to replace real-time calculations of the regular fuzzy controller during the control process,and a prototype platform has been established to verify the effectiveness and robustness of this process.Experimental tests compare the control performance of traditional and fuzzy proportional integral derivative(Fuzzy-PID)controllers,showing that,in system step response tests,the fuzzy control system reduces rise time by 20.25%,decreases overshoot by 78.24%,and shortens settling time by 67.59%.In disturbance rejection experiments,fuzzy control achieves a 46.09%reduction in the maximum deviation,indicating stronger robustness.The Fuzzy-PID controller,based on table lookup,outperforms the standard controller significantly,showing excellent potential for enhancing the dynamic performance and disturbance rejection capability of the voice coil motor actuator system.
基金Supported by National Natural Science Foundation of China (No50505032)
文摘In order to compensate for the limitation of conventional XY table used in semiconductor integrated circuits(IC) packaging and improve its speed and accuracy, a voice coil actuator (VCA) direct-drive high-speed and precision positioning XY table used in wire bonder was proposed. Also, a novel flexible decoupling mechanism was used in the positioning table, and the small moving mass enabled the positioning table to move at high speed and precision. XY table deformation interference caused by assembly error and instant interference generated by dynamic load moving with high speed and acceleration can be eliminated through the flexible decoupling mechanism. Considering the positioning table as lumped mass spring system,the dynamic equations of the mechanical system and the VCA were built according to the Newton mechanics principle and electromagnetic theory. Then the electromechanical coupling control model of the system was created through Laplace transform. Based on displacement PID controller, the loop-locked controlling algorithm of the positioning system was investigated. The dynamic control algorithm effectively improved the system dynamic performance. The precision test of the prototype machine was carried out, and the results validated the correctness of the model and the theory. Compared with traditional XY table, the table has higher speed, acceleration and positioning accuracy.
文摘A novel 4 by 4 array of electromagnetic micro-actuators operating on the principle of voice-coil actuators is presented. The intended application of the array is dynamic tactile stimulation, where multiple actuators generate an illusion of touching a moving pattern. In comparison to earlier designs [1-3], the device has smaller dimensions of 2.28 mm in diameter and 7 mm in length, which allowed its use in an array capable of hosting up to a 5 by 5 set of actuators with a rectangular shape covering an area of 18 mm by 21 mm. Using finite element analysis of several conceptual designs of actuators [1,4,5], it was established that the voice-coil type device (where the coil is the moving part) has most beneficial characteristics for the envisioned application. These include sufficient force over a relatively large distance, allowing tactile stimulation of surfaces with irregular shape, fast response, and small foot-print that matches the density of the tactile sensory neurons in the human finger. Eexperimental evaluation of the operation of neighboring actuators spaced at 3.3 mm apart, indicates that there is no crosstalk between the actuators. The resulting density exceeds that of previously reported alternative designs based on moveable permanent magnets [4,6]. Static force measurement indicate that each micro-actuator can produce at least 26 mN of repulsive force over a stroke of 2100 μm with a peak force of 34 mN. The driving circuit operates at 13.5V and generates a vibration frequency of up to 265 Hz without significant change of the force-displacement characteristics. In the higher frequency range (above 100 Hz) the actuator provides at least 15 mN of force over a slightly reduced stroke of 2300 μm, and a peak force of 21 mN. All of the above parameters meet the required threshold values of tactile human perception known from [2] and [3].
