Fuzzy Proportional Integral Derivative control of a voice coil actuator system for adaptive deformable mirrors

Research on adaptive deformable mirror technology for voice coil actuators(VCAs)is an important trend in the development of large ground-based telescopes.A voice coil adaptive deformable mirror contains a large number of actuators,and there are problems with structural coupling and large temperature increases in their internal coils.Additionally,parameters of the traditional proportional integral derivative(PID)control cannot be adjusted in real-time to adapt to system changes.These problems can be addressed by introducing fuzzy control methods.A table lookup method is adopted to replace real-time calculations of the regular fuzzy controller during the control process,and a prototype platform has been established to verify the effectiveness and robustness of this process.Experimental tests compare the control performance of traditional and fuzzy proportional integral derivative(Fuzzy-PID)controllers,showing that,in system step response tests,the fuzzy control system reduces rise time by 20.25%,decreases overshoot by 78.24%,and shortens settling time by 67.59%.In disturbance rejection experiments,fuzzy control achieves a 46.09%reduction in the maximum deviation,indicating stronger robustness.The Fuzzy-PID controller,based on table lookup,outperforms the standard controller significantly,showing excellent potential for enhancing the dynamic performance and disturbance rejection capability of the voice coil motor actuator system.

VCA Direct-Drive High Speed and Precision XY Table

In order to compensate for the limitation of conventional XY table used in semiconductor integrated circuits(IC) packaging and improve its speed and accuracy, a voice coil actuator (VCA) direct-drive high-speed and precision positioning XY table used in wire bonder was proposed. Also, a novel flexible decoupling mechanism was used in the positioning table, and the small moving mass enabled the positioning table to move at high speed and precision. XY table deformation interference caused by assembly error and instant interference generated by dynamic load moving with high speed and acceleration can be eliminated through the flexible decoupling mechanism. Considering the positioning table as lumped mass spring system,the dynamic equations of the mechanical system and the VCA were built according to the Newton mechanics principle and electromagnetic theory. Then the electromechanical coupling control model of the system was created through Laplace transform. Based on displacement PID controller, the loop-locked controlling algorithm of the positioning system was investigated. The dynamic control algorithm effectively improved the system dynamic performance. The precision test of the prototype machine was carried out, and the results validated the correctness of the model and the theory. Compared with traditional XY table, the table has higher speed, acceleration and positioning accuracy.