3D reconstruction and defect pattern recognition of bonding wire based on stereo vision

Non-destructive detection of wire bonding defects in integrated circuits(IC)is critical for ensuring product quality after packaging.Image-processing-based methods do not provide a detailed evaluation of the three-dimensional defects of the bonding wire.Therefore,a method of 3D reconstruction and pattern recognition of wire defects based on stereo vision,which can achieve non-destructive detection of bonding wire defects is proposed.The contour features of bonding wires and other electronic components in the depth image is analysed to complete the 3D reconstruction of the bonding wires.Especially to filter the noisy point cloud and obtain an accurate point cloud of the bonding wire surface,a point cloud segmentation method based on spatial surface feature detection(SFD)was proposed.SFD can extract more distinct features from the bonding wire surface during the point cloud segmentation process.Furthermore,in the defect detection process,a directional discretisation descriptor with multiple local normal vectors is designed for defect pattern recognition of bonding wires.The descriptor combines local and global features of wire and can describe the spatial variation trends and structural features of wires.The experimental results show that the method can complete the 3D reconstruction and defect pattern recognition of bonding wires,and the average accuracy of defect recognition is 96.47%,which meets the production requirements of bonding wire defect detection.

基于视觉技术的Wire Bonding中焊点质量的自动检测方法

用WireBonder(引线键合机)进行键合后的芯片,其焊点可能会出现位置偏移、断线和线尾(Pigtail)过长等缺陷。该文针对上述几种质量问题,利用WireBonder现有的硬件,运用图象处理及模式识别技术,提出了一套自动视觉检测的方法。实验表明,该方法所需硬件低廉,操作方便,能很好地检测WireBonding中焊点的质量。

Mechanism of microweld formation and breakage during Cu-Cu wire bonding investigated by molecular dynamics simulation

Currently,wire bonding is the most popular first-level interconnection technology used between the die and package terminals,but even with its long-term and excessive usage,the mechanism of wire bonding has not been completely evaluated.Therefore,fundamental research is still needed.In this study,the mechanism of microweld formation and breakage during Cu-Cu wire bonding was investigated by using molecular dynamics simulation.The contact model for the nanoindentation process between the wire and substrate was developed to simulate the contact process of the Cu wire and Cu substrate.Elastic contact and plastic instability were investigated through the loading and unloading processes.Moreover,the evolution of the indentation morphology and distributions of the atomic stress were also investigated.It was shown that the loading and unloading curves do not coincide,and the unloading curve exhibited hysteresis.For the substrate,in the loading process,the main force changed from attractive to repulsive.The maximum von Mises stress increased and shifted from the center toward the edge of the contact area.During the unloading process,the main force changed from repulsive to attractive.The Mises stress reduced first and then increased.Stress concentration occurs around dislocations in the middle area of the Cu wire.

Factors governing heat affected zone during wire bonding

In the wire bonding process of microelectronic packaging,heat affect zone(HAZ)is an important factor governing the loop profile of bonding.The height of loop is affected by the length of the HAZ.Factors governing the HAZ were studied.To investigate this relationship,experiments were done for various sizes of wire and free air ball(FAB).Electric flame-off(EFO)current, EFO time,EFO gap and recrystallization were also studied.The results show that as the size of FAB becomes larger,the length of HAZ increases.With the increase of EFO current and time,the length of HAZ becomes longer.When FAB forms at the same parameter the length of HAZ becomes shorter with the high temperature of recrystallization.

Temperature effect in thermosonic wire bonding

The temperature effect on bonding strength and ultrasonic transmission in a PZT transducer system was investigated. The results show that, the temperature change influences the material features of the bonding interface, such as elastic modulus, tensile strength of gold ball and Ag substrate, which results in different bonding strengths. Moreover, the temperature change also influences the impedance and dissipative ultrasonic energy in the PZT system. The current signal of PZT transducer was analyzed by join time-frequency analysis, which can reveal the current change in a bonding process more clearly and completely. The analysis shows that the bonding parameters influence mutually. These results can help build some criteria for parameter match and optimization in wire bonding processes.

Bonding mechanism of ultrasonic wedge bonding of copper wire on Au/Ni/Cu substrate

The ultrasonic wedge bonding with d25 μm copper wire was achieved on Au/Ni plated Cu substrate at ambient temperature.Ultrasonic wedge bonding mechanism was investigated by using SEM/EDX,pull test,shear test and microhardness test.The results show that the thinning of the Au layer occurs directly below the center of the bonding tool with the bonding power increasing.The interdiffusion between copper wire and Au metallization during the wedge bonding is assumed negligible,and the wedge bonding is achieved by wear action induced by ultrasonic vibration.The ultrasonic power contributes to enhance the deformation of copper wire due to ultrasonic softening effect which is then followed by the strain hardening of the copper wedge bonding.

New Type Gold Bonding Wire

The influences of additive elements on properties of gold wire and the technology of homogeneously adding those elements to gold matrix were studied. A BJ-type gold bonding wire for automatic bonders was developed, which has high bond strength and stable uniform mechanical properties and is capable of forming good spherical shape of melting-ball observed by SEM. The bonding wire is fully suitable to the requirements of the automatic bonding technology and satisfies the performance requirement of IC products.

Effect of Conduction Pre-heating in Au-Al Thermosonic Wire Bonding

This paper presents the recent study by investigating the vital responses of wire bonding with the application of conduction pre-heating. It is observed through literature reviews that, the effect of pre-heating has not been completely explored to enable the successful application of pre-heating during wire bonding. The aim of wire bonding is to form quality and reliable solid-state bonds to interconnect metals such as gold wires to metalized pads deposited on silicon integrated circuits. Typically, there are 3 main wire bonding techniques applied in the industry;Thermo-compression, Ultrasonic and Thermosonic. This experiment utilizes the most common and widely used platform which is thermosonic bonding. This technique is explored with the application of conduction pre-heating along with heat on the bonding site, ultrasonic energy and force on an Au-Al system. Sixteen groups of bonding conditions which include eight hundred data points of shear strength at various temperature settings were compared to establish the relationship between bonding strength and the application of conduction pre-heating. The results of this study will clearly indicate the effects of applied conduction pre-heating towards bonding strength which may further produce a robust wire bonding system.

Wire Bonding Using Offline Programming Method

Manual process of creating bonding diagram is known to be time consuming and error prone. In comparison, offline programming (OLP) provides a much more viable option to reduce the wire bonding creation time and error. OLP is available in two versions, i.e., vendor specific OLP and direct integration offline pro- gramming (Di-OLP). Both versions utilize the bonding diagram and computer aided design data to speed up bonding program creation. However, the newly proposed Di-OLP is more flexible as it can be used to create bonding program for multiple machine platforms in microelectronics industry. Some special features of Di-OLP method are presented. The application of generic OLP however, is applicable to machines that recognize ASCII text file. The user needs to know the data format accepted by machine and convert the data accordingly to suit its application for different machine platforms. Di-OLP is also a practical method to replace the time consuming manual method in production line.

Effect of ultrasonic power and bonding force on the bonding strength of copper ball bonds

Copper wire, serving as a cost-saving alternative to gold wire, has been used in many high-end thermosonic ball bonding applications. In this paper, the bond shear force, bond shear strength, and the ball bond diameter are adopted to evaluate the bonding quality. It is concluded that the ef/~cient ultrasonic power is needed to soften the ball to form the copper bonds with high bonding strength. However, excessive ultrasonic power would serve as a fatigue loading to weaken the bonding. Excessive or less bonding force would cause cratering in the silicon.

EFFECT OF ULTRASONIC POWER ON THE HEAVY ALUMINUM WEDGE BONDING STRENGTH

Eleven groups of wire bonding experiments are carried out on an experiment platform （restructured with a U3000 heavy aluminum wedge wire bonder）. Pure silicon aluminum wire （300 μm in diameter, 2.94-3.92 N in average pull force） and nickel coated aluminum substrates are used in the experiments. During the experiment process, only ultrasonic power rate parameter is changed and the other bonding parameters are kept as constant, The bonding force and time are 4.90 N and 100 ms respectively. After the bonding experiments, shear strength tests are carried out on the bonds as the bonding strength criterion. From those experiments and test results, some conclusions are obtained： In the small ultrasonic power rate conditions （about 20%-30%）, with the power increasing, the bonding strength enhances accordingly; However, in the large ultrasonic power rate conditions （about 45%-70%）, the bonding strength decreases accordingly and over bonding happens. Only when the ultrasonic power rate is in a moderate condition （about 35%-40%） can good and stabilized bonding strength be acquired.

New Generation Semi-Automatic Thermosonic Wire Bonder

The physical and technological aspects of wire ball-wedge bonding in the assembly of integrated circuits are considered.The video camera and the pattern recognition system(PRS)of new bonder helps to provide accurate positioning of the bonding tool on the chip pads of integrated circuits.The formation of the loop wire cycle is ensured by the synchronous movement of the bonding head along the Z axis and the working table along the XY axes based on the servo drive.A feature of the bonder is that it can bond all the wire loops of the electronic device according to the pre-recorded program without needing to align the bonding points.

对VFO封装与常规WB封装的频率特性仿真比对

现代电子产品尤其是高性能存储器和通信设备对高效信号传递和低能耗需求迫切,要求封装技术在高频高速条件下展现卓越性能。垂直引线扇出(VFO)封装技术采用垂直金线连接芯片与底板,构建紧密的垂直互联体系,显著缩短信号传输路径,减少信号插入损耗和反射损耗,提高信号传输速度与质量,适应高频应用。通过仿真对比,研究揭示了VFO封装在高频操作中的性能优势。研究为筛选合适封装技术提供了可靠数据支撑,并为提升传统线接合(WB)封装在高频场合下的表现奠定了理论基础。

Hybrid-integrated 200 Gb/s REC-DML array transmitter based on photonic wire bonding technology

An 8-channel hybrid-integrated chip for 200 Gb/s(8×25 Gb/s)signal transmission has been demonstrated.The channels are all within the O-band,and with a spacing of 800 GHz.The core of this chip is a monolithic integrated multi-wavelength laser array of 8 directly-modulated distributed feedback(DFB)lasers.By using the reconstruction equivalent chirp technique,multi-wavelength integration and asymmetric phase shift structures are achieved in the laser array.The output laser beams of the array are combined by a planar light-wave circuit,which is hybrid-integrated with the laser array by photonic wire bonding.Experiment results of this transmitter chip show good single-mode working of each unit laser,with a sidemode suppression ratio above 50 dB,and the modulation bandwidth is above 20 GHz.Clear eye diagrams are obtained in the lasers for 25 Gb/s non-return-to-zero modulation,which implies a total 200 Gb/s transmission rate for the whole chip.

In vivo biofilm formation on stainless steel bonded retainers during different oral health-care regimens

Retention wires permanently bonded to the anterior teeth are used after orthodontic treatment to prevent the teeth from relapsing to pre-treatment positions. A disadvantage of bonded retainers is biofilm accumulation on the wires, which produces a higher incidence of gingival recession, increased pocket depth and bleeding on probing. This study compares in vivo biofilm formation on single-strand and multi-strand retention wires with different oral health-care regimens. Two-centimetre wires were placed in brackets that were bonded to the buccal side of the first molars and second premolars in the upper arches of 22 volunteers. Volunteers used a selected toothpaste with or without the additional use of a mouthrinse containing essential oils. Brushing was performed manually. Regimens were maintained for 1 week, after which the wires were removed and the oral biofilm was collected to quantify the number of organisms and their viability, determine the microbial composition and visualize the bacteria by electron microscopy. A 6-week washout period was employed between regimens. Biofilm formation was reduced on single-strand wires compared with multi-strand wires; bacteria were observed to adhere between the strands. The use of antibacterial toothpastes marginally reduced the amount of biofilm on both wire types, but significantly reduced the viability of the biofilm organisms. Additional use of the mouthrinse did not result in significant changes in biofilm amount or viability. However, major shifts in biofilm composition were induced by combining a stannous fluoride- or triclosan-containing toothpaste with the mouthrinse. These shifts can be tentatively attributed to small changes in bacterial cell surface hydrophobicity after the adsorption of the toothpaste components, which stimulate bacterial adhesion to the hydrophobic oil, as illustrated for a Streptococcus mutans strain.

接地共面波导与芯片级联结构设计与优化

针对传输线与芯片级联时产生阻抗突变,导致传输效率下降的问题,基于接地共面波导与芯片级联结构,提出了一种适用于X~Ka波段的匹配带线解决方法。通过S参数提取芯片的输入阻抗,并对射频电路中的阻抗不连续点进行分析,设计阻抗匹配电路并建立三维仿真模型。通过有限元仿真分析,讨论了匹配电路和键合引线中心间距对射频传输性能的影响,对比分析了不同结构及不同匹配电路的传输性能差异。仿真结果显示:在X~Ka波段范围内,匹配电路可令接地共面波导与芯片级联结构的S11<-21 dB,S21>-0.19 dB。优化后的接地共面波导与芯片级联结构可在降低传输损耗的同时显著提高射频信号的隔离度,减少信道串扰,为厘米波频段下射频电路的设计提供理论参考。

基于EMR与V_(eE_peak)组合电参数的IGBT模块封装老化监测

该文提出一种基于电磁辐射干扰(EMR)与V_(eE_peak)组合电参数监测IGBT模块封装老化的方法,旨在监测多种老化同时发生时IGBT模块的健康状态。首先,分析V_(eE_peak)和EMR的产生机理以及模块内部寄生参数对VeE和EMR的影响;其次,分析不同老化对IGBT模块内部寄生参数的影响;最后,结合实验结果证明所提方法的正确性。这是一种不需要复杂监测电路的非侵入式监测方法,可有效降低多种老化耦合对IGBT模块健康状态监测结果产生的误差。

自动光学检测技术在引线键合中的应用

微电子产品内部结构复杂,引线数量多且分布无规律,给人工检验带来了巨大挑战。自动光学检测具有效率高且漏检率低的特点,可实现产品引线键合正确性的自动化检验。对引线键合的自动光学检测原理进行深入分析,结合实际生产,着重介绍键合点编号技术。实现了引线键合的自动化检验,确保引线键合的正确性,并且极大降低了误报率。

红外探测器芯片高可靠性键合工艺研究

金丝键合工艺广泛应用于红外探测器的封装环节。实验选用25μm金丝,基于正交试验法,根据键合拉力值确定键合的最佳工艺参数。通过优化超声压力、超声功率、超声时间及接触力等工艺参数组合,改善了键合引线的电气连接性能和连接强度,从而提高芯片系统的信号传输质量。提出的引线键合工艺参数组合适用于红外探测芯片的键合。

电磁寄生参数对SAW滤波器性能的影响

设计了B41频段的声表面波(SAW)滤波器,利用三维电磁场仿真工具HFSS建立表面贴装器件(SMD)封装和芯片级(CSP)封装模型,对比两种封装的声-电磁联合仿真结果得出,在滤波器电路拓扑结构中,当2条不同并联支路连接在一起时,由于SMD封装键合引线的电磁寄生参数影响,滤波器在高频处的带外抑制会出现“上翘”。建立不同键合线数量、直径及长度的SMD封装模型,并仿真计算S参数。对比仿真结果可知,随着键合线直径的增大和长度的减小,其等效电感逐渐变小,即键合线的电磁寄生参数逐渐减小,对SAW滤波器性能的影响逐渐减弱,高频处的带外抑制性能得到优化。结果表明,CSP封装植球倒扣的电磁寄生参数更小,声-电磁联合仿真的结果更优,与实测结果吻合较好。