In this paper, a depth-graded C/W multilayer mirror with broad grazing incident angular range, consisting of three multilayer stacks, each of which has different period thickness d and the layer pair number, was desig...In this paper, a depth-graded C/W multilayer mirror with broad grazing incident angular range, consisting of three multilayer stacks, each of which has different period thickness d and the layer pair number, was designed and fabricated by direct current (DC) magnetron sputtering. For calculating the definite performance of such a mirror, the saturation effects of the interfacial imperfection, such as interface roughness and diffusion, were emerged. The reflectivity of the mirror was measured by the X-ray diffraction (XRD) instrument at Cu Kα radiation (λ = 0.154 nm), the measured reflectivity was about 30% in a broad grazing incident angular range (0.55°-0.85°). By the fitting data, the thickness of each layer is almost same as the one designed and the roughness in the multilayer is about 0.85 nm, which is larger than the prospective value of 0.5 nm.展开更多
Ultra-short-period W/C multilayers having periodic thickness range of 1.15-3.01 nm have been fabricated for soft X-ray optics using the high vacuum direct current (DC) magnetron sputtering system. These multilayers we...Ultra-short-period W/C multilayers having periodic thickness range of 1.15-3.01 nm have been fabricated for soft X-ray optics using the high vacuum direct current (DC) magnetron sputtering system. These multilayers were characterized by low-angle X-ray diffraction (LAXRD) and transmission electron microscope (TEM). The results show that the multilayer thin films with periodic thickness more than 1.5 nm have clear W-C interface and low roughness. But the structure of the periodic thickness below 1.5 nm is not clear. Finally, three ways to improve the performance of the multilayers are suggested.展开更多
A tomography device based on a conventional laboratory x ray source, polycapillary parallel x ray lens （PPXRL）, and polycapillary collimating x ray lens （PCXRL） is designed. The PPXRL can collect the divergent x r...A tomography device based on a conventional laboratory x ray source, polycapillary parallel x ray lens （PPXRL）, and polycapillary collimating x ray lens （PCXRL） is designed. The PPXRL can collect the divergent x ray beam from the source and focus it into a quasi-parallel x ray beam with a divergence of 4.7 rarad. In the center of quasi-parallel x ray beam, there is a plateau region with an average gain in power density of 13.8 and a diameter of 630μm. The contrast of the image can be improved from 28.9% to 56.0% after adding the PCXRL between the sample and the detector.展开更多
基金This work was supported by the National Nat- ural Science Foundation of China under Grant No. 60178021.
文摘In this paper, a depth-graded C/W multilayer mirror with broad grazing incident angular range, consisting of three multilayer stacks, each of which has different period thickness d and the layer pair number, was designed and fabricated by direct current (DC) magnetron sputtering. For calculating the definite performance of such a mirror, the saturation effects of the interfacial imperfection, such as interface roughness and diffusion, were emerged. The reflectivity of the mirror was measured by the X-ray diffraction (XRD) instrument at Cu Kα radiation (λ = 0.154 nm), the measured reflectivity was about 30% in a broad grazing incident angular range (0.55°-0.85°). By the fitting data, the thickness of each layer is almost same as the one designed and the roughness in the multilayer is about 0.85 nm, which is larger than the prospective value of 0.5 nm.
基金This work was supported by the National Natural Sci- ence Foundation of China (No. 10435050, 60378021)by the Nanometer Technology Special Founda- tion of Shanghai Science and Technology Commit- tee (No. 0352nm090).
文摘Ultra-short-period W/C multilayers having periodic thickness range of 1.15-3.01 nm have been fabricated for soft X-ray optics using the high vacuum direct current (DC) magnetron sputtering system. These multilayers were characterized by low-angle X-ray diffraction (LAXRD) and transmission electron microscope (TEM). The results show that the multilayer thin films with periodic thickness more than 1.5 nm have clear W-C interface and low roughness. But the structure of the periodic thickness below 1.5 nm is not clear. Finally, three ways to improve the performance of the multilayers are suggested.
基金supported by the National Natural Science Foundation of China(No.11375027)the Fundamental Research Funds for the Central Universities(No.2014k JJCA03)
文摘A tomography device based on a conventional laboratory x ray source, polycapillary parallel x ray lens （PPXRL）, and polycapillary collimating x ray lens （PCXRL） is designed. The PPXRL can collect the divergent x ray beam from the source and focus it into a quasi-parallel x ray beam with a divergence of 4.7 rarad. In the center of quasi-parallel x ray beam, there is a plateau region with an average gain in power density of 13.8 and a diameter of 630μm. The contrast of the image can be improved from 28.9% to 56.0% after adding the PCXRL between the sample and the detector.
