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Spray Pyrolysis Deposition of ZnO Thin Films from Zinc Chloride Precursor Solution at Different Substrate Temperatures
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作者 Fahimeh Zahedi Reza Sabet Dariani Seyed Mohammad Rozati 《Acta Metallurgica Sinica(English Letters)》 SCIE EI CAS CSCD 2015年第1期110-114,共5页
ZnO films were prepared at different substrate temperatures through spraying pyrolysis deposition of zinc chloride precursor onto glass substrate. Substrate temperature affects surface morphology of films and therefor... ZnO films were prepared at different substrate temperatures through spraying pyrolysis deposition of zinc chloride precursor onto glass substrate. Substrate temperature affects surface morphology of films and therefore their optical and electrical properties. All films are polycrystalline with Wurtzite crystal structure and preferentially grow along c-axis direction. Formation of ZnO rods start at about 500 °C. The diameter and length of rods deposited at 500 °C are350–500 and 550–700 nm, respectively. By increasing substrate temperature, film becomes more coverage and diameter of the rods reduces to 250–300 nm but their length increases to 1,000–1,200 nm, respectively. Optical transmission in visible region decreases with increasing substrate temperature. An ultraviolet emission and two visible emissions at 2.82 and2.37 eV are observed for photoluminescence spectra at room temperature. The resistivity of ZnO films increases with increasing substrate temperature due to surface morphology. 展开更多
关键词 zno Rods spray pyrolysis substrate temperature Surface morphology
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Structural, optical and electrical properties of zinc oxide thin films deposited by a spray pyrolysis technique 被引量:2
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作者 Yacine Aoun Boubaker Benhaoua +1 位作者 Brahim Gasmi Said Benramache 《Journal of Semiconductors》 EI CAS CSCD 2015年第1期23-27,共5页
Zinc oxide(ZnO) thin films were deposited on glass substrates by spray pyrolysis technique decomposition of zinc acetate dihydrate in an ethanol solution with 30 m L of deposition rate, the ZnO thin films were depos... Zinc oxide(ZnO) thin films were deposited on glass substrates by spray pyrolysis technique decomposition of zinc acetate dihydrate in an ethanol solution with 30 m L of deposition rate, the ZnO thin films were deposited at two different temperatures: 300 and 350℃. The substrates were heated using the solar cells method.The substrate was R217102 glass, whose size was 30×17.5×1 mm^3. The films exhibit a hexagonal wurtzite structure with a strong(002) preferred orientation. The higher value of crystallite size is attained for sprayed films at 350℃, which is probably due to an improvement of the crystallinity of the films at this point. The average transmittance of obtain films is about 90%–95%, as measured by a UV–vis analyzer. The band gap energy varies from 3.265 to 3.294 e V for the deposited Zn O thin film at 300 and 350℃, respectively. The electrical resistivity measured of our films are in the order 0.36 Ω·cm. 展开更多
关键词 zno thin films substrate temperature spray pyrolysis technique
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Effect of substrate temperature on the stability of transparent conducting cobalt doped ZnO thin films 被引量:8
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作者 Said Benramache Boubaker Benhaoua Foued Chabane 《Journal of Semiconductors》 EI CAS CSCD 2012年第9期18-21,共4页
Transparent conducting Co doped ZnO thin films have been fabricated by Ultrasonic spray. The thin films were deposited at three different substrate temperatures of 300, 350 and 400 ℃. The obtained films had a hexagon... Transparent conducting Co doped ZnO thin films have been fabricated by Ultrasonic spray. The thin films were deposited at three different substrate temperatures of 300, 350 and 400 ℃. The obtained films had a hexagonal wurtzite structure with a strong (002) preferred orientation. The maximum crystallite size value of the film deposited at 350 ℃ is 55.46 nm. Spectrophotometer (UV-vis) of a Co doped ZnO film deposited at 350 ℃ shows an average transmittance of about 90%. The band gap energy increased from 3.351 to 3.362 eV when the substrate temperature increased from 300 to 350 ℃. The electrical conductivity of the films deposited at 300, 350 and 400 ℃ were 7.424, 7.547 and 6.743 (Ω·cm)^-1 respectively. The maximum activation energy value of the films at 350 ℃ was 1.28 eV, indicating that the films exhibit a n-type semiconducting nature. 展开更多
关键词 zno:Co films transparent conducting films ultrasonic spray deposition substrate temperature band gap energy
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超声喷雾热分解法制备ZnO薄膜及衬底温度对其性能的影响 被引量:2
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作者 黎波 龚恒翔 +2 位作者 孟祥杰 任维义 陈太红 《人工晶体学报》 EI CAS CSCD 北大核心 2014年第3期523-527,共5页
以醋酸锌水溶液为前驱体溶液,采用超声喷雾热分解法在玻璃衬底上制备得到了温度在350℃到450℃范围内的ZnO薄膜。用X射线衍射(XRD)、扫描电镜(SEM)及紫外-可见分光光度计分析了ZnO薄膜的晶体结构、微观形貌及其光学性质,重点探究了衬底... 以醋酸锌水溶液为前驱体溶液,采用超声喷雾热分解法在玻璃衬底上制备得到了温度在350℃到450℃范围内的ZnO薄膜。用X射线衍射(XRD)、扫描电镜(SEM)及紫外-可见分光光度计分析了ZnO薄膜的晶体结构、微观形貌及其光学性质,重点探究了衬底温度对ZnO薄膜生长过程及微观结构的影响。分析表明:制备的ZnO薄膜为六角铅锌矿结构,衬底温度对薄膜的质量有着重要的影响;所得薄膜在400℃时结晶性能好,沿c轴择优取向生长,具有优良的均匀性和致密性;所制备的薄膜在可见光区透过率高达86%以上,在紫外光区吸收强烈。 展开更多
关键词 zno薄膜 超声雾化热解法 衬底温度 微观形貌 透过率
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低温喷雾热解制备ZnO薄膜的研究现状及进展 被引量:2
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作者 王祺 程江 +5 位作者 王睿璇 崔丽莎 谢州 龙章文 谭显银 张洪涛 《材料导报(纳米与新材料专辑)》 EI CAS 2015年第1期57-61,共5页
低温喷雾热解(Low temperature spray pyrolysis,LTSP)制备ZnO薄膜具有低成本、可大面积制膜的优点,符合卷对卷生产技术要求,在柔性触摸显示、有机电致发光(OLED)、有机光伏(OPV)等领域中具有重要的应用前景。通过对前驱液配方的改进及... 低温喷雾热解(Low temperature spray pyrolysis,LTSP)制备ZnO薄膜具有低成本、可大面积制膜的优点,符合卷对卷生产技术要求,在柔性触摸显示、有机电致发光(OLED)、有机光伏(OPV)等领域中具有重要的应用前景。通过对前驱液配方的改进及设备的优化,LTSP实现了在柔性衬底上制备ZnO薄膜。因此,从不同溶液体系讨论国内外近年来LTSP制备ZnO薄膜技术的研究现状、进展及其应用价值,同时介绍本课题组近期在该领域的研究进展,供有机光电器件领域同行参考。 展开更多
关键词 zno薄膜 喷雾热解 衬底温度 柔性光电器件
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