固溶体半导体ZnS_(1-x)Te_x(0≤x≤1)多晶薄膜的制备及特性研究

ZnS1-xTex是制作短波长光波段光电子器件和紫外探测器的理想材料。本文介绍了ZnS1-xTex多晶薄膜的真空蒸镀制备情况,并用原子力显微镜、X射线衍射仪、能量色散谱仪、紫外 可见分光光度计、荧光光谱分析仪等对制备的多晶薄膜的性质进行了测试和分析,发现该多晶薄膜保持了单晶薄膜的紫外吸收、光致发光等良好特性。

Polycrystalline ZnSx Se1—x thin films deposited on ITO glass by MBE

MBE growth of ZnS_xSe_1-x thin films on ITO coated glass substrate s were carried o ut using ZnS and Se sources with the substrate temperature ranging from 270℃ to 330℃. The XRD θ/2θ spectra resulted from these films indicated that the as-gro wn polycrystalline ZnS_xSe_1-x thin films had a preferred orientat ion along the (1 11) planes. The evaluated crystal sizes as deduced from the FWHM of the XRD laye r peaks showed strong growth temperature dependence, with the optimized temperat ure being about 290℃. Both AFM and TEM measurements of these thin films also in dicated a similar growth temperature dependence. High quality ZnS_xSe_1- x thin fil m grown at the optimized temperature had the smoothest surface with lowest RMS v alue of 1.2 nm and TEM cross-sectional micrograph showing a well defined column ar structure.

固溶体半导体碲硫锌多晶薄膜的制备及发光特性研究

ZnS1 xTex薄膜具有高效的发光特性。样品可观测到强烈的光致发光,随着Te含量x的不同,发射光的颜色从深蓝到黄变化,使其成为制作短波长光波段光电子器件和紫外探测器的理想材料。本文介绍了ZnS1 xTex多晶薄膜真空蒸发制备的情况,并用X射线衍射仪对淀积在玻璃、石英玻璃和单晶硅衬底上的多晶薄膜进行结构分析,用紫外可见分光光度计、荧光光谱分析仪对样品的光吸收和发光性质进行研究。分析表明,该薄膜的结构符合闪锌矿的特征。紫外可见吸收光谱显示该样品在紫外光区有一个强烈的吸收峰,可见光区的吸收很微弱。光致发光光谱表明,样品在可见光区有一个以470nm为中心的发射峰,发射光肉眼可见。该多晶薄膜基本保持了单晶薄膜的紫外吸收、光致发光等良好特性。