Conductive n type a Si∶H∶Y alloy films with the conductivity as high as 60 S/cm have been deposited on Si substrate by radio frequency sputtering. In the temperature range 20～300 K, for samples with large Y conte...Conductive n type a Si∶H∶Y alloy films with the conductivity as high as 60 S/cm have been deposited on Si substrate by radio frequency sputtering. In the temperature range 20～300 K, for samples with large Y contents, the thermally activated conduction is also observed and the plots of lg σ vs. 1/ T can be fitted by two linear functions with different slopes. The corresponding temperatures of the kinks between the two straight lines depend on the Y contents in the samples. For small Y content films, the conductivities can be fitted to the funciton σ∝ exp (-1/ T 1/4 ). The present results are interpreted using different conduction mechanisms in different temperature ranges for samples with different Y contents.展开更多
文摘Conductive n type a Si∶H∶Y alloy films with the conductivity as high as 60 S/cm have been deposited on Si substrate by radio frequency sputtering. In the temperature range 20～300 K, for samples with large Y contents, the thermally activated conduction is also observed and the plots of lg σ vs. 1/ T can be fitted by two linear functions with different slopes. The corresponding temperatures of the kinks between the two straight lines depend on the Y contents in the samples. For small Y content films, the conductivities can be fitted to the funciton σ∝ exp (-1/ T 1/4 ). The present results are interpreted using different conduction mechanisms in different temperature ranges for samples with different Y contents.
