Experiments and Simulation of Thermal Behaviors of the Dual-drive Servo Feed System

The machine tool equipped with the dual-drive servo feed system could realize high feed speed as well as sharp precision. Currently, there is no report about the thermal behaviors of the dual-drive machine, and the current research of the thermal characteristics of machines mainly focuses on steady simulation. To explore the influence of thermal characterizations on the precision of a jib boring machine assembled dual-drive feed system, the thermal equilibrium tests and the research on thermal-mechanical transient behaviors are carried out. A laser interferometer, infrared thermography and a temperature-displacement acquisition system are applied to measure the temperature distribution and thermal deformation at different feed speeds. Subsequently, the finite element method （FEM） is used to analyze the transient thermal behaviors of the boring machine. The complex boundary conditions, such as heat sources and convective heat transfer coefficient, are calculated. Finally, transient variances in temperatures and deformations are compared with the measured values, and the errors between the measurement and the simulation of the temperature and the thermal error are 2 ~C and 2.5 pm, respectively. The researching results demonstrate that the FEM model can predict the thermal error and temperature distribution very well under specified operating condition. Moreover, the uneven temperature gradient is due to the asynchronous dual-drive structure that results in thermal deformation. Additionally, the positioning accuracy decreases as the measured point became further away from the motor, and the thermal error and equilibrium period both increase with feed speeds. The research proposes a systematical method to measure and simulate the boring machine transient thermal behaviors.

Design of a control system for a macro-micro dual-drive high acceleration high precision positioning stage for IC packaging

A macro-micro dual-drive positioning system showing good potential for high acceleration and high precision positioning required in IC packaging applications is devised in this paper. The dual-drive positioning stage uses a VCM (voice coil motor) driven macro positioning stage and a PZT piezo-electric driven micro positioning stage. The coupling characteristics of the system are analyzed to produce a control structure with a micro positioning stage that can dynamically compensate for the positioning error produced by the macro positioning stage. Models of the two positioning stages are described. The models cover both the mechanism and the actuator. For the macro positioning stage, friction characteristics are taken into account, and a controller with an LQG (linear-quadratic-Gaussian) control algorithm combining a feed-forward compensation algorithm is derived. A PID controller is used to control the micro positioning stage. Detailed designs are derived for the proposed approach, and the performance is validated by simulation.

Adaptive Kalman filter and dynamic recurrent neural networks-based control design of macro-micro manipulator

In this paper, a composite control scheme for macro-micro dual-drive positioning stage with high accel- eration and high precision is proposed. The objective of control is to improve the precision by reducing the influence of system vibration and external noise. The positioning stage is composed of voice coil motor （VCM） as macro driver and piezoelectric actuator （PEA） as micro driver. The precision of the macro drive positioning stage is improved by the com- bined PID control with adaptive Kalman filter （AKF）. AKF is used to compensate VCM vibration （as the virtual noise） and the external noise. The control scheme of the micro drive positioning stage is presented as the integrated one with PID and intelligent adaptive inverse control approach to compensate the positioning error caused by macro drive positioning stage. A dynamic recurrent neural networks （DRNN） based inverse control approach is proposed to offset the hysteresis nonlinearity of PEA. Simulations show the positioning precision of macro-micro dual-drive stage is clearly improved via the proposed control scheme.