By using a spherical wave as the reference wave, we recorded the in-line phase-shifting digital hologram of the 25th element of Chinese standard No. 3 resolution test pattern, and gave the corresponding numerical reco...By using a spherical wave as the reference wave, we recorded the in-line phase-shifting digital hologram of the 25th element of Chinese standard No. 3 resolution test pattern, and gave the corresponding numerical reconstructed results. Some problems concerning with the digital hologram recording and reconstruction of the diffractive object at a short distance are discussed. The experimental result shows that the resolution of the reconstructed image is better than 10μm, which is the limit by using this experimental arrangement.展开更多
This research proposes a simple and practical method to make low-stray-light gratings, where the substrate shifts about a 1 mm distance in the direction parallel or perpendicular to the exposure interference fringes. ...This research proposes a simple and practical method to make low-stray-light gratings, where the substrate shifts about a 1 mm distance in the direction parallel or perpendicular to the exposure interference fringes. When the substrate shifts, a reference grating next to the substrate is used to adjust in real time the phase of the exposure interference fringes relative to the substrate. Shifting eliminates the exposure defects and therefore decreases the stray light of gratings. Several gratings are successfully made by using this method, which have straighter grooves,smoother surfaces, and lower stray light than gratings made in conventional interference lithography.展开更多
文摘By using a spherical wave as the reference wave, we recorded the in-line phase-shifting digital hologram of the 25th element of Chinese standard No. 3 resolution test pattern, and gave the corresponding numerical reconstructed results. Some problems concerning with the digital hologram recording and reconstruction of the diffractive object at a short distance are discussed. The experimental result shows that the resolution of the reconstructed image is better than 10μm, which is the limit by using this experimental arrangement.
基金supported by the National Natural Science Foundation of China under Grant No.51427805
文摘This research proposes a simple and practical method to make low-stray-light gratings, where the substrate shifts about a 1 mm distance in the direction parallel or perpendicular to the exposure interference fringes. When the substrate shifts, a reference grating next to the substrate is used to adjust in real time the phase of the exposure interference fringes relative to the substrate. Shifting eliminates the exposure defects and therefore decreases the stray light of gratings. Several gratings are successfully made by using this method, which have straighter grooves,smoother surfaces, and lower stray light than gratings made in conventional interference lithography.
