Effect of H_2 dilution on the structure and properties of nc-CrC/a-C:H coatings deposited by a hybrid beams system

Nanocomposite Cr C/hydrogenated amorphous carbon(nc-CrC/a-C:H) coatings were deposited by a hybrid beams system comprised of a hollow cathode ion source and a cathodic arc ion-plating unit with varying H_2 flow rates. The influences of H_2 flow rates on the morphologies, microstructures, and properties of the coatings were systematically studied. The morphologies and microstructures of the coatings were characterized by SEM, AFM, XPS, Raman spectroscopy, GIXRD, and HRTEM. The mechanical and tribological properties were measured by a nano-indenter, scratch tester, and ball-ondisk tribometer. The wear tracks were evaluated using 3D profilometer, optical microscope, and EDS analysis. It has been found that a moderate H_2 flow rate can effectively smooth the surface, enlarge the fraction of a sp^3 bond, and improve the properties. The coating exhibits the highest hardness and elastic modulus at the H_2 flow rate of 40 sccm. A superior combination of adhesion strength,friction coefficient, and wear resistance can be achieved at the H_2 flow rate of 80 sccm.

Microstructure and wear resistance of Fe-based and Co-based coating of AISI H13

Fe-based and Co-based cladding layers were prepared on the surface of AISI H13 hot die steel by laser cladding technology.The microstructure,hardness and abrasion resistance of the two cladding layers were studied by means of optical microscope,scanning electron microscope,rockwell hardness tester,and high temperature friction and wear tester.Also,the red hardness of the cladding layers was measured,after holding the layers at 600℃ for 1 hour by muffle furnace and repeated 4 times.The rockwell hardness values of the substrate,the Fe-based and the Co-based alloy coating measured were HRC 47,HRC 52 and HRC 48,respectively.The red hardness values of the substrate and the Fe-based cladding layer were decreased,while that of the Co-based cladding layer was increased.The Co-based cladding layer has the minimal wear loss weight and friction coefficient among them.The wear mechanisms of the substrate,the Fe-based layer and the Cobased layer attribute mainly to abrasive wear,adhesion wear,and both of them,respectively.

Mierostrueture and Properties of Coating from Cemented Carbide on Surface of Hl3 Steel

The microstructures and properties of coating from cemented carbide on the substrate of H 13 by vacuum powder sintering were studied. The effect of sintering temperature on the microstructures of coating was discussed. The interface characteristics between coating and H 13 steel substrate, microhardness distribution and wear resistance in the coating were analyzed. The coating from cemented carbide with thickness of 1-3 mm by vacuum powder sintering at temperature ranging from 1280℃to 1300 ℃ was obtained. The experimental results indicated that the coating with microhardness of HV 1600 favorable to wear resistance is strongly bonded with the H 13 steel substrate by mutual diffusion and penetration of Fe,Cr, Mo,V in substrate towards the coating and W, Co,Ni in coating towards the substrate.

Improved Hemolytic Performance of Blood Pump with Fluorine-Doped Hydrogenated Amorphous Carbon Coating

Fluorine-doped hydrogenated amorphous carbon (a-C:H:F) film was deposited on a flow-straightener, impeller and diffuser surface (SUS 304) of an enclosed-impeller type flow blood pump using the ionization deposition method with a source gas of C6F5H. The surface characteristics of the a-C:H:F film were examined using atomic force microscopy, X-ray photoelectron spectroscopy, and measurements of surface roughness, friction and surface potential. The a-C:H:F film tends to increase surface roughness and the negative surface charge. In addition, the surface energy and friction decrease with fluorine dopant in the a-C:H film. To estimate the hemolytic performance of a blood pump with the a-C:H:F film coating, the amount of hemolysis was measured using a mock circulatory system (in vitro test) with 500 mL of pig blood containing sodium citrate. In vitro test was conducted for 180 min with the blood flow and pump head maintained at 5 L/min and 100 mmHg, respectively. The a-C:H:F film coating reduced the amount of hemolysis and improved the hemolytic performance. Decreasing the surface energy and negative surface charge of the a-C:H:F film contributes to the improvement of the hemolytic performance. The a-C:H:F film coating is thus expected to be utilized in medical technology as a surface coating technology for artificial heart blood pumps.

The Stress Distribution and Thermal Behavior of TiBN and TiBN TiN Coatings in Milling AISI H13 Work Tool Steel

The FEM model of TiBN and TiBN/TiN coated cutting tool in milling of H13 steel w as developed. Process variables such as temperature and stress in the coating l ayer as well as in the substrate were analyzed. The efficacy of the present FEM analysis was verified by conducting controlled milling experiments on AISI H13 t o collect the relevant tool life and force data.The results show that the stress in a coated tool can significantly be reduced compared to an uncoated cutting t ool,possibly due to surface coatings improving the tribological properties of cu tting tools.Coatings with good thermal properties also help to improve the therm al behavior of cutting tool.

Plasma Enhanced-Chemical Vapour Deposition of Scuff-Resistant Hydrogenated Amorphous Carbon Coatings on C100 Steel

Hydrogenated amorphous carbon coatings, deposited by low pressure plasma to minimize the wear of C100 steel components, were optimized and characterized. In order to ensure good adhesion of the films to the steel surface, a thin Ti interlayer was deposited, by magnetron sputtering, before the plasma deposition. The chemical characterization of the deposits was performed by means of RAMAN, XPS, RBS and ERDA analysis, while nanoindentation, nanoscratch and nanowear tests allowed to estimating the tribomechanical properties of the deposits, with the aim of evaluating their scuff-resistance. It was found that the optimized plasma deposited hydrogenated amorphous carbon coatings were well adherent to C100 steel and increased more than 70% its surface hardness.

Effects of CeO_2 Coating on Oxidation Behavior of TP304H Steel in High-Temperature Water Vapor

Oxidation behaviors of TP304H steel with electrophoresis deposited CeO2 coating in water vapor were studied at 610℃～770℃ for 65 h. The results showed that CeO2 coating reduced effectively the oxidation rate of TP304H. Analysis with SEM and EDS showed the structure of oxide scale turned from multi-layer to mono-layer and oxide scale with high Cr content formed on the surface of CeO2 coating while inner oxidation disappeared. Based on test results and CeO2characters that Ce ion can vary between Ce4+ and Ce3+ under oxygen-rich and oxygen-poor environment, it is concluded that CeO2 coating acts as a barrier to prevent oxygen inner diffusion and the partial oxygen pressure of CeO2 coating-substrate interface is limited. Cr first diffuses outward across CeO2 coating and forms oxide scale on the surface, which delays formation of Fe oxide.

退火温度对a-C:H膜结构及摩擦学性能的影响

为研究环境温度对含氢无定形碳(a-C:H)膜结构和性能的影响,将a-C:H膜在大气环境中进行高温退火处理,并借助红外光谱、拉曼光谱、X射线光电子能谱、3D表面分析仪和球盘摩擦试验机等手段对退火前后a-C:H膜的结构、组成和性能进行了系统地考察.研究发现,在较低的退火温度下(300℃),a-C:H膜结构无明显变化,而其内应力降低,摩擦学性能显著提高;在400℃和500℃下退火,膜结构发生明显变化并伴随严重氧化,同时摩擦学性能降低甚至完全失效.结果表明,退火温度的选择对a-C:H膜的结构、组成及性能具有重要影响.

a-C∶H/a-Se复合膜晶化分形凝聚的计算机模拟研究

本文基于红外透射及喇曼谱分析的结果提出了一个 a-C:H/a-Se 复合膜的 a-C∶H 层非平衡晶化凝聚模型,并做了计算机模拟研究。模拟得到的图形是具有良好的无标度性的链环状分形。其分维值为1.37±0.02,此结果得到了实验的肯定。这对非晶膜的结构及晶化机理的研究均富有价值。

γ辐照对a-C:H薄膜微观组织、力学性能及摩擦学性能的影响

近年来随着核能及其核装备的发展,辐照环境下高能粒子对润滑材料服役行为的影响受到越来越多的关注.本研究利用自行设计研制的磁控溅射系统制备a-C:H润滑薄膜,并对其进行伽马(γ)辐照处理.考察γ辐照康普顿效应对a-C:H薄膜微观组织、力学性能和摩擦学性能的影响.结果表明:经γ辐照后a-C:H薄膜存在由sp^(2)杂化C原子结构向sp^(3)杂化C原子结构转变的趋势,且辐照使得C-H键发生断裂,薄膜内H原子的键合能降低.伽马辐照使得aC:H薄膜的纳米机械性能显著提高,辐照样品的残余应力也随辐照剂量呈增加趋势.此外,γ辐照也使得a-C:H薄膜的摩擦系数和磨损率轻微增加.综合分析可知,γ辐照在测试剂量范围内对a-C:H薄膜的摩擦性能影响有限,但辐照诱发应力的增加是限制其在核环境中应用的主要因素.

a-C∶H膜在不同真空度下的摩擦学行为研究

采用非平衡磁控溅射技术在不锈钢及Sip(111)基体上制备了含氢无定形碳(a-C∶H)薄膜,沉积的薄膜表面光滑,硬度高,内应力小,膜/基结合力好。利用球-盘摩擦实验机对薄膜在不同真空度(1.0×105、5.0×10-2、1.0×10-2、5.0×10-3 Pa)下的摩擦学行为进行了研究,结果表明,随着真空度的升高,薄膜的摩擦系数逐渐减小,磨损率逐渐增大。在5.0×10-3 Pa时,a-C∶H膜的摩擦学行为发生突变,此时薄膜的摩擦系数为0.005,而耐磨寿命很短。高真空中,薄膜寿命的突变可能与薄膜脱氢而结构发生变化有关。

a-C:N:H纳米尖端荧光产生的机理

用CH4,H2和NH3为反应气体,利用等离子体增强热丝化学气相沉积在沉积有碳膜的Si衬底上制备了a-C:N:H纳米尖端,并用扫描电子显微镜和微区Raman光谱仪对碳膜和纳米尖端进行了表征。结果表明:Raman谱中含有与碳和氮相关的峰,且纳米尖端的Raman谱比碳膜的Raman谱有很强的荧光背景。Raman谱中的峰说明沉积的碳膜和纳米尖端是a-C:N:H薄膜和a-C:N:H尖端。a-C:N:H纳米尖端的Raman谱中强荧光背景的产生表明其在激发光源照射的过程中发射了强荧光,对a-C:N:H纳米尖端产生强荧光的机理进行了探讨。

基于动力学标度法的a-C:H薄膜表面微观形貌的演变机理研究

采用等离子体增强化学气相沉积(PECVD)方法在Si(111)基底上制备a-C:H薄膜,利用原子力显微镜(AFM)和扫描电子显微镜(SEM)对a-C:H薄膜的表面形貌与表面粗糙度进行表征,并从动力学标度法角度出发讨论a-C:H薄膜表面粗糙度的演变机理。研究结果表明:a-C:H薄膜表面微观形貌为自仿射分形表面,可用分形维数来评价薄膜的表面粗糙度;随着H_2流量的增加,薄膜表面粗糙度先减小后增大,在T_2B与H_2流量比为0.2/6时,a-C:H薄膜的表面粗糙度R_q为2.2nm,相对于其他条件下生长的薄膜的表面粗糙度低,薄膜表面较光滑,致密性良好。

直流反应磁控溅射沉积a-C:H薄膜的微结构和摩擦磨损行为

采用直流的反应磁控溅射技术,以高纯石墨为溅射靶材和CH_4为反应气体,调节CH_4流量,在p(100)单晶硅和不锈钢基底上成功制备出系列的含氢a-C:H薄膜.利用场发射扫描电子显微镜(FESEM)、原子力显微镜(AFM)、Raman光谱、纳米压痕仪、CSM划痕测试仪、摩擦磨损试验机等测试手段对所制备含氢a-C:H薄膜的微结构、力学性能和摩擦磨损行为进行系统表征.结果表明:随着CH_4流量的增加,含氢a-C:H薄膜的致密度呈现出微弱的先增加后减小的趋势;薄膜的沉积速率随着CH_4流量的增加逐渐增加,但增幅呈现出逐渐减小趋势;随着CH_4流量的增加,薄膜中sp^3杂化键含量及其纳米硬度和杨氏模量也呈现出先增加后减小的规律;摩擦实验结果表明当CH_4流量为8 sccm,所制备的含氢a-C:H薄膜的摩擦学性能最佳,摩擦系数为0.20,磨损率为6.48×10^(-7)mm^3/(N·m).

中频磁控溅射制备a-C∶H(Al,W)薄膜及其性能研究

采用中频磁控溅射技术，以w、Al复合靶（面积比为1：1）为靶材，在氩气和甲烷混合气体中于iq（100）型单晶硅表面沉积了一系列Al、w共掺杂含氢非晶碳[a-c：H（Al，w）]薄膜．分析了不同甲烷流量对薄膜成分、结构和表面形貌的影响，并表征了薄膜的力学性能和摩擦磨损行为．结果表明：随着甲烷流量的增加，薄膜中C含量呈上升趋势，而w和Al含量均呈现递减趋势，过高流量的CH。会导致金属靶材中毒．薄膜中的sp^2C和sp^3c含量受w、Al以及H注入效应的共同影响．所制备的薄膜表面均较为平滑，表面粗糙度（RMS）在0．39～0．48nm范围内．薄膜的纳米硬度（日）在9．98-11．37GPa之间，弹性模量（E）介于71～93．36GPa之间，弹性恢复系数均在70％以上．当薄膜中w和Al的原子百分含量分别为3．74％和2．37％时，H／E值和H^3／E^3值分别为0．141和0．198，且此时薄膜在大气环境下表现出较好的减摩抗磨性能．薄膜具有适度的sp^3C／sp^2c比值、优异的弹性形变性能、摩擦过程中对偶球表面形成连续而致密的转移层等因素是薄膜具有良好摩擦学性能的重要原因．

rf-dc PECVD制备的a-C∶H(N)薄膜的结构分析

采用射频－直流等离子增强化学气相沉积技术用Ｃ２Ｈ２和Ｎ２气的混合气体制备出ａ－Ｃ∶Ｈ（Ｎ）薄膜，用ＴＥＭ、红外谱、ＸＰＳ等多种分析测试手段研究了薄膜的结构。结果表明ａ－Ｃ∶Ｈ（Ｎ）薄膜中Ｎ与Ｃ原子可形成ＮＣ、ＣＮ和ＮＣ键，而碳氢原子主要以ＣＨ２基的形式存在。且薄膜中存在具有理想化学配比的Ｃ３Ｎ４相。

不锈钢表面防护TiC/a-C∶H纳米复合薄膜的耐腐蚀性能

采用直流反应磁控溅射技术在304不锈钢表面沉积TiC/a-C∶H纳米复合薄膜,并研究了TiC/a-C∶H纳米复合薄膜对不锈钢耐腐蚀性能的影响。通过扫描电子显微镜(SEM)和原子力显微镜(AFM)观察,结果表明薄膜表面光滑且薄膜结构均匀致密。Raman光谱和XRD测试结果表明,薄膜具有纳米晶TiC镶嵌非晶碳基质的典型纳米复合微结构。通过测量薄膜的静态接触角分析薄膜的润湿性,不锈钢表面沉积TiC/a-C∶H纳米复合薄膜后疏水性能明显提高,水接触角高达98°。电化学腐蚀测试结果表明,不锈钢表面沉积TiC/a-C∶H纳米复合薄膜体系在质量分数为3.5%的NaCl溶液中自腐蚀电位约为-0.09V,腐蚀电流密度为2.43×10-8 A·cm-2,与无薄膜防护的裸露不锈钢相比,其耐腐蚀性能得到明显改善。

a-C∶H/a-Se复合膜非平衡晶化分形特征的SEM观测

a-C∶H/a-Se/Al 感光体的 a-C:H 层在能流密度的6.4×10^(14)eV/mm^2·s 的离子流轰击下发生了非平衡晶化凝聚。晶体凝聚物为“链环状分形”。用盒子计数法测得其分数维 D_0=1.35±0.04;用相关函数法测得其关联维为 D_2=1.39±0.03。这与我们用计算机模拟的结果很好地符合。本文同时讨论了这一系列文章([2][3]及本文)对发展一种新的非平衡晶化分析方法的意义。

a-C:H薄膜组成及结构

含氢非晶碳(a-C∶H)薄膜主要由SP3C、SP2C 和H 3种“元素”组成，在它们的三 元相图中，a-C∶H 薄膜具有特定的组成区域。由于IR 分析法对SP3C/SP2C 分析存在着系 统误差，因而导致所得结构偏离该组成域。通过对IR 法的结果分析发现，SP3C 含量偏高， SP2C含量偏低；a-C∶H 薄膜中SP2C 主要以非质子化形式存在，其含量可高达67 ％；质子 化的SP2C仅占SP2C 总量的10 ％左右。a-C∶H 薄膜是受到较高约束的空间立体网络结构。

微波ECR-CVD法制备a-C:F:H膜的红外吸收及其光学带隙

改变CHF3 CH4 流量比R =[CHF3] ([CHF3]+[CH4 ]) ,采用微波电子回旋共振等离子体化学气相沉积 (MWECR CVD)方法沉积a C :F :H薄膜。a C :F :H薄膜的结构和光学带隙使用傅立叶变换红外光谱和紫外 可见光谱来表征。红外结果表明 ,在低流量比R(R <6 4 % )下 ,薄膜的红外特征结构主要以 CF(10 6 0cm- 1 ) , CF2(112 0cm- 1 )以及 CHx(2 80 0～ 30 0 0cm- 1 )的伸缩振动为主 ;在高流量比R(R >6 4 % )下 ,薄膜表现为类聚四氟乙烯(PTFE)的结构特征 ,典型的红外特征峰是位于 12 2 0cm- 1 处的 -CF2 反对称伸缩振动。薄膜的光学带隙Eg 随流量比R的变化表现为先降后升。进一步研究表明 ,薄膜中的H和F浓度调制着薄膜的CC共轭双键结构 ,使光学带隙Eg 从 2 37到 3