The swelling of SU-8 mold is one of the most important factors influencing the dimensional accuracy of a metal mieropart produced by ultra-violet lithography galvanik abformung（UV-LIGA）. The isolation belt struc- tu...The swelling of SU-8 mold is one of the most important factors influencing the dimensional accuracy of a metal mieropart produced by ultra-violet lithography galvanik abformung（UV-LIGA）. The isolation belt struc- ture is usually employed to enhance the dimensional accuracy of electroformed metal mieropart. However, noble metal is wasted because the isolation belt is filled with metal when noble metal mieroparts are fabricated. There- fore, a semi-isolation belt structure is presented to save noble metal. Furthermore, a high current density is also introduced to shorten the eleetroforming time, and thus the dimensional accuracy of electroformed gold micropart is improved by using the electrolyte jet. The experimental results indicate that both the semi-isolation belt and the high current density can help to enhance the dimensional accuracy of electroformed gold micropart. Its dimen- sional error is only 5 μm at the current density of 0. 6 A/dm2 while the semi-isolation belt structure is used.展开更多
基金Supported by the National Natural Science Foundation of China(91023018)~~
文摘The swelling of SU-8 mold is one of the most important factors influencing the dimensional accuracy of a metal mieropart produced by ultra-violet lithography galvanik abformung（UV-LIGA）. The isolation belt struc- ture is usually employed to enhance the dimensional accuracy of electroformed metal mieropart. However, noble metal is wasted because the isolation belt is filled with metal when noble metal mieroparts are fabricated. There- fore, a semi-isolation belt structure is presented to save noble metal. Furthermore, a high current density is also introduced to shorten the eleetroforming time, and thus the dimensional accuracy of electroformed gold micropart is improved by using the electrolyte jet. The experimental results indicate that both the semi-isolation belt and the high current density can help to enhance the dimensional accuracy of electroformed gold micropart. Its dimen- sional error is only 5 μm at the current density of 0. 6 A/dm2 while the semi-isolation belt structure is used.
