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Acid etching process for fabrication of Bi_2Sr_2CaCu_2O_(8+x) stack 被引量:2
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作者 ZHANG Jie CHEN Jian WU JingBo KANG Lin XU WeiWei WU PeiHeng 《Chinese Science Bulletin》 SCIE EI CAS 2007年第3期303-306,共4页
We adopted a new method, acid etching process, to fabricate the intrinsic Josephson junctions based on the Bi2Sr2CaCu2O8+x single crystals. By soaking the crystals into the dilute hydrochloric acid, we fabricated a ju... We adopted a new method, acid etching process, to fabricate the intrinsic Josephson junctions based on the Bi2Sr2CaCu2O8+x single crystals. By soaking the crystals into the dilute hydrochloric acid, we fabricated a junction stack successfully, and meantime made the surrounding area insulated. A certain concentration of hydrochloric acid was used to maintain the roughness of the modified layer. The cur-rent-voltage characteristic was achieved through the four terminal measurement. We could control the junctions' number by changing the concentration and the soaking time. We also found that the thick-ness of the stack was equal to the average height of the insulation layer. Such a simple, convenient and controllable fabrication method with a high yield might widen the applications of the intrinsic Joseph-son junctions. 展开更多
关键词 本征约瑟夫森结 Bi2Sr2CaCu2O8+x叠片 制造 酸蚀刻工艺
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