Improved electromigration reliability of surface acoustic wave devices using Ti/Al-Mo/Ti/Al-Mo electrodes

In order to obtain both high electromigration （EM） reliability and free-dimensional control in high-frequency surface acoustic wave （SAW） devices, 4-layered Ti/Al-Mo/Ti/Al-Mo electrode films were investigated on 128° Y-X LiNbO3 substrates by sputtering deposition. The resuits indicated that the 4-layered films had an improved EM reliability compared to conventional Al-0.5wt.%Cu films. Their lifetime is approximately three times longer than that of the Al-0.5wt.%Cu films tested at a current density of 5 x 107 A/cm^2 and a temperature of 200℃. Moreover, the 4-layered films were easily etched in reactive ion etching and fine-dimensional control was realized during the pattern replication for high-frequency SAW devices. For the 4-layered films, an optimum Mo quantity and sputtering parameters were very significant for high EM reliability.

Research on data diagnosis method of acoustic array sensor device based on spectrogram

Acoustic array sensor device for partial discharge detection is widely used in power equipment inspection with the advantages of non-contact and precise positioning compared with partial discharge detection methods such as ultrasonic method and pulse current method.However,due to the sensitivity of the acoustic array sensor and the influence of the equipment operation site interference,the acoustic array sensor device for partial discharge type diagnosis by phase resolved partial discharge(PRPD)map might occasionally presents incorrect results,thus affecting the power equipment operation and maintenance strategy.The acoustic array sensor detection device for power equipment developed in this paper applies the array design model of equal-area multi-arm spiral with machine learning fast fourier transform clean(FFT-CLEAN)sound source localization identification algorithm to avoid the interference factors in the noise acquisition system using a single microphone and conventional beam forming algorithm,improves the spatial resolution of the acoustic array sensor device,and proposes an acoustic array sensor device based on the acoustic spectrogram.The analysis and diagnosis method of discharge type of acoustic array sensor device can effectively reduce the system misjudgment caused by factors such as the resolution of the acoustic imaging device and the time domain pulse of the digital signal,and reduce the false alarm rate of the acoustic array sensor device.The proposed method is tested by selecting power cables as the object,and its effectiveness is proved by laboratory verification and field verification.

Characteristics and realization of the second generation surface acoustic wave’s wavelet device

To overcome the bulk acoustic wave （BAW）, the triple transit signals and the discontinuous frequency band in the first generation surface acoustic wave＇s （FGSAW＇ s） wavelet device, the full transfer multistrip coupler （MSC） is applied to implement wavelet device, and a novel structure of the second generation surface acoustic wave＇s （SGSAW＇s） wavelet device is proposed. In the SGSAW＇ s wavelet device, the BAW is separated and eliminated in different acoustic propagating tracks, and the triple transit signal is suppressed. For arbitrary wavelet scale device, the center frequency is three times the radius of frequency band, which ensures that the frequency band of the SGSAW＇s wavelet device is continuous, and avoids losing signals caused by the discontinuation of frequency band. Experimental result confirms that the BAW suppression, ripples in band, receiving loss and insertion loss of the SGSAW＇ s wavelet device are remarkably improved compared with those of the FGSAW＇ s wavelet device.

A Secure Device Management Scheme with Audio-Based Location Distinction in IoT

Identifying a device and detecting a change in its position is critical for secure devices management in the Internet of Things(IoT).In this paper,a device management system is proposed to track the devices by using audio-based location distinction techniques.In the proposed scheme,traditional cryptographic techniques,such as symmetric encryption algorithm,RSA-based signcryption scheme,and audio-based secure transmission,are utilized to provide authentication,non-repudiation,and confidentiality in the information interaction of the management system.Moreover,an audio-based location distinction method is designed to detect the position change of the devices.Specifically,the audio frequency response(AFR)of several frequency points is utilized as a device signature.The device signature has the features as follows.(1)Hardware Signature:different pairs of speaker and microphone have different signatures;(2)Distance Signature:in the same direction,the signatures are different at different distances;and(3)Direction Signature:at the same distance,the signatures are different in different directions.Based on the features above,amovement detection algorithmfor device identification and location distinction is designed.Moreover,a secure communication protocol is also proposed by using traditional cryptographic techniques to provide integrity,authentication,and non-repudiation in the process of information interaction between devices,Access Points(APs),and Severs.Extensive experiments are conducted to evaluate the performance of the proposed method.The experimental results show that the proposedmethod has a good performance in accuracy and energy consumption.

Hybrid device for acoustic noise reduction and energy harvesting based on a silicon micro-perforated panel structure

A kind of hybrid device for acoustic noise reduction and vibration energy harvesting based on the silicon micro- perforated panel （MPP） resonant structure is investigated in the article. The critical parts of the device include MPP and energy harvesting membranes. They are all fabricated by means of silicon micro-electro-mechanical systems （MEMS） tech- nology. The silicon MPP has dense and accurate micro-holes. This noise reduction structure has the advantages of wide band and higher absorption coefficients. The vibration energy harvesting part is formed by square piezoelectric membranes arranged in rows. ZnO material is used as it has a good compatibility with the fabrication process. The MPP, piezo- electric membranes, and metal bracket are assembled into a hybrid device with multifunctions. The device exhibits good performances of acoustic noise absorption and acoustic-electric conversion. Its maximum open circuit voltage achieves 69.41 mV.

Semiconductor Fluorinated Carbon Nanotube as a Low Voltage Current Amplifier Acoustic Device

Acoustoelectric effect (AE) in a non-degenerate fluorinated single walled carbon nanotube (FSWCNT) semiconductor was carried out using a tractable analytical approach in the hypersound regime , where q is the acoustic wavenumber and is the electron mean-free path. In the presence of an external electric field, a strong nonlinear dependence of the normalized AE current density , on (?is the electron drift velocity and is the speed of sound in the medium) was observed and depends on the acoustic wave frequency, , wavenumber q, temperature T and the electron-phonon interactions parameter, . When , decreases to a resonance minimum and increases again, where the FSWCNT is said to be amplifying the current. Conversely, when , rises to a maximum and starts to decrease, similar to the observed behaviour in negative differential conductivity which is a consequence of Bragg’s reflection at the band edges at T=300K. However, FSWCNT will offer the potential for room temperature application as an acoustic switch or transistor and also as a material for ultrasound current source density imaging (UCSDI) and AE hydrophone devices in biomedical engineering. Moreover, our results prove the feasibility of implementing chip-scale non-reciprocal acoustic devices in an FSWCNT platform through acoustoelectric amplification.

Standing surface acoustic wave-assisted fabrication of patterned microstructures for enhancing cell migration

Microfluidic device with patterned microstructures on the substrate surface was used to regulate cell adhesion,morphology,and functions in tissue engineering.We developed a microfluidic device which employing microscale patterned microstructures to achieve enhanced cell adhesion and migration.Biocompatible hydrogel substrates with micro-wavy and lattice-patterned microstructures were fabricated using standing surface acoustic waves and ultraviolet solidification.After seeding the L929 mouse fibroblast cells onto the patterned substrate of the microfluidic device,we determined that the viability and proliferation rate of cell migration can be greatly enhanced.Furthermore,L929 cells showed two types of gathering modes after 48 h of culturing.Cell growth was guided by the patterned substrate used in the microfluidic device and showed differences in the location distribution.Therefore,the developed microfluidic device with patterned microstructures can extend the application of in vitro cell culturing for future drug development and disease diagnosis.

Measuring System for Interference Optical Fiber Acoustic Emission

A type of interference optical fiber acoustic emission sensor is described.With 10 -10 m level resolution,megahertz-level frequency and response time less than 1 μs,this sensor possesses prominent measuring stability and can be used in state supervision and trouble diagnosis.

TP-MobNet: A Two-pass Mobile Network for Low-complexity Classification of Acoustic Scene

Acoustic scene classification(ASC)is a method of recognizing and classifying environments that employ acoustic signals.Various ASC approaches based on deep learning have been developed,with convolutional neural networks(CNNs)proving to be the most reliable and commonly utilized in ASC systems due to their suitability for constructing lightweight models.When using ASC systems in the real world,model complexity and device robustness are essential considerations.In this paper,we propose a two-pass mobile network for low-complexity classification of the acoustic scene,named TP-MobNet.With inverse residuals and linear bottlenecks,TPMobNet is based on MobileNetV2,and following mobile blocks,coordinate attention and two-pass fusion approaches are utilized.The log-range dependencies and precise position information in feature maps can be trained via coordinate attention.By capturing more diverse feature resolutions at the network’s end sides,two-pass fusions can also train generalization.Also,the model size is reduced by applying weight quantization to the trained model.By adding weight quantization to the trained model,the model size is also lowered.The TAU Urban Acoustic Scenes 2020 Mobile development set was used for all of the experiments.It has been confirmed that the proposed model,with a model size of 219.6 kB,achieves an accuracy of 73.94%.

Preparation of free-standing diamond films for high frequency SAW devices

Free-standing diamond films were prepared by hot filament chemical vapor deposition (HFCVD) method under different conditions. Inter-digital transducers (IDTs) were formed on the nucleation sides of free-standing diamond films by photolithography technique. Then piezoelectric ZnO films were deposited by radio-frequency(RF) reactive magnetron sputtering to obtain the ZnO/diamond film structures. Surface morphologies of the nucleation sides and the IDTs were characterized by means of scanning electron microscopy (SEM), atomic force microscope (AFM) and optical microscopy. The results indicate that the surfaces of nucleation sides are very smooth and the IDTs are of high quality without discontinuity and short circuit phenomenon. Raman spectra show the sharp diamond feature peak at about 1 334 cm?1 and the small amount of non-diamond carbon in the nucleation side. X-ray diffraction (XRD) patterns of the structure of ZnO/diamond films show a strong diffraction peak of ZnO (002), which indicates that as-sputtered ZnO films are highly c-axis oriented.

动水条件下煤岩单轴蠕变试验监测装置研制

开展动水作用条件下的煤岩单轴蠕变试验,对于研究蠕变特征和裂隙煤岩损伤劣化机制具有重要意义。该文研制了一套动水条件下煤岩单轴蠕变试验监测装置,装置由伺服加载系统、动水控制系统、数据采集系统组成。该装置配备了水流速度控制系统,实现了在载荷恒定条件下使用不同速度的水流对煤岩进行冲刷,且满足蠕变试验的长时加载需求,具有性能稳定、操作便捷、造价低廉等优点,能够为动水条件下煤岩蠕变试验提供参考。

声表面波-自旋波耦合及磁声非互易性器件

声表面波是激发和控制自旋波的一种新兴手段,不仅激励效率高,而且传输长度可以达到毫米量级,通过引入磁声耦合还可以打破时空反演对称性,实现声表面波的非互易传播.本文对不同类型的磁声耦合的物理机制进行了梳理,对比了磁弹性耦合、自旋-涡度耦合(包括非磁性层注入交变自旋流和磁性材料自身的Barnett效应),以及磁-旋转耦合在不同模式的声表面波激发下的等效驱动磁场,讨论了这些等效驱动场的角度依赖性,以及相应功率吸收的频率依赖性.这为在实际应用中区分和利用各种磁声耦合机制提供了理论支持.此外,本文还介绍了利用磁声耦合实现声表面波非互易性传输的两种主流手段,包括利用手性失配效应和引入具有非互易性自旋波色散关系的磁结构,对比并讨论了它们各自的物理机制和优劣势,希望为设计和发展基于磁声耦合的固态声学隔离器、环形器提供参考.

Acoustic Purcell effect induced by quasibound state in the continuum

We study theoretically and experimentally the acoustic Purcell effect induced by quasi-bound states in the continuum(quasiBICs).A theoretical framework describing the acoustic Purcell effect of a resonant system is developed based on the system’s radiative and dissipative factors,which reveals the critical emission condition for achieving optimum Purcell factors.We show that the quasiBICs contribute to highly confined acoustic field and bring about greatly enhanced acoustic emission,leading to strong Purcell effect.Our concept is demonstrated via two coupled resonators supporting a Friedrich-Wintgen quasiBIC,and the theoretical results are validated by the experiments observing emission enhancement of the sound source by nearly two orders of magnitude.Our work bridges the gap between the acoustic Purcell effect and acoustic BICs essential for enhanced wave-matter interaction and acoustic emission,which may contribute to the research of high-intensity sound sources,high-quality-factor acoustic devices and nonlinear acoustics.

磁声耦合:物理、材料与器件

固体中的声波有两种传播方式:一种是声体波,以纵波或横波的形式在固体内部传播;另一种是声表面波,在固体表面产生并沿着表面传播.声波射频技术利用这些声波来截取和处理信号,尤其体现在快速发展的射频滤波器技术中.声学滤波器因其体积小、成本低和性能稳定等多方面的优势,在移动通信等领域得到了广泛应用.受益于成熟的制造工艺和确定的共振频率,声波已逐渐成为操控磁性和自旋的有力手段,这一领域正朝着小型化、超快和节能的自旋电子学器件应用迈进.将磁性材料集成到声学射频器件,也开辟了对声学器件调控方法和性能提升的新思路.本综述首先梳理了各种磁声耦合的物理机制,并在此基础上系统介绍了声控磁化动力学、磁化翻转、磁畴和磁性斯格明子产生及运动、自旋流产生等一系列磁性和自旋现象.同时也讨论了声控磁的逆过程——磁控声波的研究进展,包括声波参数的磁调控和声波的非互易传播,以及基于此开发的新型磁声器件,如磁传感器、磁电天线、可调谐滤波器等.最后展望了磁声耦合未来可能的研究方向和潜在的应用前景.

叉指电极结构传感器的研究及应用进展

叉指电极传感器以其结构简单、灵敏度高、稳定性好等独特优点成为众多领域的研究热点。本文详细论述了叉指电极的工作原理、指标参数、检测原理、制备工艺和分布结构等,探讨了近几年叉指电极结构传感器在医学、环境、生物等行业的应用现状,重点分析在监测环境因素、人体运动状态和声表面波(SAW)技术等方面的最新研究技术,最后对其发展前景、趋势和挑战进行了分析和展望。

一种新型锚杆监测装置的研究

针对多数矿井锚杆力监测装置存在结构复杂、成本较高且很难做到实时有效判断等问题,设计了一种可以通过不同频率的声音判断锚杆力大小的新型锚杆力监测装置。利用Pro-E软件建立监测装置的实体模型,使用ANSYS软件对监测装置进行静力学和模态计算,利用LMS Virtual.lab软件对该装置进行声学仿真分析。研究表明,该装置可行有效,适合实际推广使用。

基于人工智能的电声设备设计与优化策略

文章全面分析了人工智能电声设备的现状,详细阐述人工智能在电声设备设计方面的应用,包括智能设计系统架构、数据驱动决策、用户体验交互智能化以及设计自动化与算法优化。同时,提出电声设备优化策略,包括性能优化算法、故障预测和自我修复、资源智能调度管理以及持续学习和适应性调整等,以提升电声设备的性能和用户满意度。

声学释放器控制系统在深海潜标中的应用

随着我国海洋资源的开发利用,浮标、潜标的布放数量随之增加,与之配套的声学释放器也急剧增加。海底环境比较复杂,如果声学释放器出现设备位移或电量不足等问题,会导致设备脱钩失败,严重威胁水下设备安全。基于此,分析声学释放器控制系统在深海潜标中的应用。

电声器件在有源噪声控制系统中的故障检测与管理技术应用

介绍有源噪声控制系统的基本原理及其在现代工业和生活中的应用重要性,分析电声器件故障诊断的关键技术,包括声学特性分析、电参数测试、信号处理技术、机器学习算法以及环境因素监测,强调了这些技术在提高故障检测准确性、预测潜在故障以及降低维护成本方面的重要性。

C波段横向激励薄膜体声波谐振器设计与制备

针对未来移动通信对射频前端器件提出的多频率、高集成新要求,开展了兼具声表面波(SAW)谐振器和薄膜体声波谐振器(FBAR)技术特点的新型横向激励兰姆波谐振器研究。该文介绍了基于c轴择优取向氮化铝(AlN)压电薄膜的C波段横向激励薄膜体声波谐振器(XBAR)的结构设计、参数优化和制备方法,并进行了工艺验证。通过剥离和刻蚀等步骤制备了谐振频率4.464 GHz、品质因数3039、品质因数与频率之积(f×Q)达到1.56×10^(13)GHz、面积小于0.12 mm^(2)的低杂波XBAR谐振器,并仿真分析了其用于射频滤波器的可行性。该研究为进一步研制多频率、高集成的小型化XBAR滤波器组件提供了有效的设计技术和工艺技术支撑。