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A 4 MHz Lamé mode microresonator-based oscil lator
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作者 吴国强 徐德辉 +1 位作者 熊斌 王跃林 《Journal of Measurement Science and Instrumentation》 CAS 2013年第2期132-135,共4页
A 4.13 MHz reference oscillator incorporating a capacitive single-crystal-silicon (SCS) micromechanical resonator is presented. The microresonator is fabricated using a cavity silicon-on-insulator (cavity-SOl) pro... A 4.13 MHz reference oscillator incorporating a capacitive single-crystal-silicon (SCS) micromechanical resonator is presented. The microresonator is fabricated using a cavity silicon-on-insulator (cavity-SOl) process and is excited in the Lain6 mode with electrostatic driving and capacitive sensing. The Lam6 mode may be described as a square plate that is cont- racting along one axis in the fabrication plane, while simultaneously extending along an orthogonal axis in the same plane. The microresonator exhibits a quality factor as high as 1.4 × 10^6 and a resonant frequency of 4.13 MHz at a pressure of 0.08 mbar. The output spectrum of the oscillator shows that the silicon micromechanical resonator is adapted as a timing element for a precision oscillator. 展开更多
关键词 single-crystal-silicon (SCS) MICRORESONATOR OSCILLATOR microelectromechanical systems (MEMS) bulk acousticresonators
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