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Model-based adaptive non-null interferometry for freeform surface metrology 被引量:4
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作者 张磊 周胜 +2 位作者 李东 李劲松 俞本立 《Chinese Optics Letters》 SCIE EI CAS CSCD 2018年第8期40-44,共5页
A model-based adaptive non-null interferometry (MANI) is proposed for steep optical freeform surfaces in situ testing. The deformable mirror (DM) affording the flexible compensation is monitored with the beam in t... A model-based adaptive non-null interferometry (MANI) is proposed for steep optical freeform surfaces in situ testing. The deformable mirror (DM) affording the flexible compensation is monitored with the beam in the interferometer by a wavefront sensor. The residual wavefront aberration in the non-null interferogram is eliminated by the multi-configuration ray tracing algorithm based on the system model, especially the DM surface model. The final figure error can be extracted together with the surface misalignment aberration correction. Experiments proving the feasibility of the MANI are shown. 展开更多
关键词 DM Model-based adaptive non-null interferometry for freeform surface metrology
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