In the semiconductor manufacturing industry,the dynamic model of a controlled object is usually obtained from a frequency sweeping method before motion control.However,the existing isolators cannot properly isolate th...In the semiconductor manufacturing industry,the dynamic model of a controlled object is usually obtained from a frequency sweeping method before motion control.However,the existing isolators cannot properly isolate the disturbance of the inertial force on the platform base during frequency sweeping(the frequency is between 0 Hz and the natural frequency).In this paper,an adjustable anti-resonance frequency controller for a dual-stage actuation semi-active vibration isolation system(DSASAVIS)is proposed.This system has a significant anti-resonance characteristic;that is,the vibration amplitude can drop to nearly zero at a particular frequency,which is called the anti-resonance frequency.The proposed controller is designed to add an adjustable anti-resonance frequency to fully use this unique anti-resonance characteristic.Experimental results show that the closed-loop transmissibility is less than−15 dB from 0 Hz to the initial anti-resonance frequency.Furthermore,it is less than−30 dB around an added anti-resonance frequency which can be adjusted from 0 Hz to the initial anti-resonance frequency by changing the parameters of the proposed controller.With the proposed controller,the disturbance amplitude of the payload decays from 4 to 0.5 mm/s with a reduction of 87.5%for the impulse disturbance applied to the platform base.Simultaneously,the system can adjust the anti-resonance frequency point in real time by tracking the frequency sweeping disturbances,and a good vibration isolation performance is achieved.This indicates that the DSA-SAVIS and the proposed controller can be applied in the guarantee of an ultra-low vibration environment,especially at frequency sweeping in the semiconductor manufacturing industry.展开更多
光伏电网频率调整过程中,依靠常规Smith预估控制器实现电网调频控制,对模型精度具有较强的依赖性,控制策略实施后最大频率变化率(rate of change of frequency,RoCoF)较大。因此,提出基于改进型Smith预估计器与大数据的光伏电网调频逐...光伏电网频率调整过程中,依靠常规Smith预估控制器实现电网调频控制,对模型精度具有较强的依赖性,控制策略实施后最大频率变化率(rate of change of frequency,RoCoF)较大。因此,提出基于改进型Smith预估计器与大数据的光伏电网调频逐步惯性控制方法。首先,采集历史气象数据和光伏电网运行数据,应用大数据分析领域的密度峰值聚类算法进行划分处理,再筛选相似日数据输入长短期记忆网络中,预测出未来光伏发电的功率变化;然后,依托逐步惯性控制思想,设计包含短时超发、转速恢复等多个阶段的电网调频控制策略,将模糊自适应比例-积分-微分(proportion-integration-differentiation,PID)控制器融入常规Smith预估计器,从而升级得到优化版的Smith预估计器;最后,在不受被控模型变化影响的情况下,依据预估补偿原理完成逐步惯性调频控制,并应用麻雀搜索算法求解出最优控制参数。实验结果表明:该控制方法实施后,光伏电网运行过程中最大RoCoF仅为0.086 Hz/s,有效降低了对模型精度的依赖性,保证了电力系统的稳定运行。展开更多
基金Project supported by the National Natural Science Foundation of China(No.51975160)。
文摘In the semiconductor manufacturing industry,the dynamic model of a controlled object is usually obtained from a frequency sweeping method before motion control.However,the existing isolators cannot properly isolate the disturbance of the inertial force on the platform base during frequency sweeping(the frequency is between 0 Hz and the natural frequency).In this paper,an adjustable anti-resonance frequency controller for a dual-stage actuation semi-active vibration isolation system(DSASAVIS)is proposed.This system has a significant anti-resonance characteristic;that is,the vibration amplitude can drop to nearly zero at a particular frequency,which is called the anti-resonance frequency.The proposed controller is designed to add an adjustable anti-resonance frequency to fully use this unique anti-resonance characteristic.Experimental results show that the closed-loop transmissibility is less than−15 dB from 0 Hz to the initial anti-resonance frequency.Furthermore,it is less than−30 dB around an added anti-resonance frequency which can be adjusted from 0 Hz to the initial anti-resonance frequency by changing the parameters of the proposed controller.With the proposed controller,the disturbance amplitude of the payload decays from 4 to 0.5 mm/s with a reduction of 87.5%for the impulse disturbance applied to the platform base.Simultaneously,the system can adjust the anti-resonance frequency point in real time by tracking the frequency sweeping disturbances,and a good vibration isolation performance is achieved.This indicates that the DSA-SAVIS and the proposed controller can be applied in the guarantee of an ultra-low vibration environment,especially at frequency sweeping in the semiconductor manufacturing industry.
文摘光伏电网频率调整过程中,依靠常规Smith预估控制器实现电网调频控制,对模型精度具有较强的依赖性,控制策略实施后最大频率变化率(rate of change of frequency,RoCoF)较大。因此,提出基于改进型Smith预估计器与大数据的光伏电网调频逐步惯性控制方法。首先,采集历史气象数据和光伏电网运行数据,应用大数据分析领域的密度峰值聚类算法进行划分处理,再筛选相似日数据输入长短期记忆网络中,预测出未来光伏发电的功率变化;然后,依托逐步惯性控制思想,设计包含短时超发、转速恢复等多个阶段的电网调频控制策略,将模糊自适应比例-积分-微分(proportion-integration-differentiation,PID)控制器融入常规Smith预估计器,从而升级得到优化版的Smith预估计器;最后,在不受被控模型变化影响的情况下,依据预估补偿原理完成逐步惯性调频控制,并应用麻雀搜索算法求解出最优控制参数。实验结果表明:该控制方法实施后,光伏电网运行过程中最大RoCoF仅为0.086 Hz/s,有效降低了对模型精度的依赖性,保证了电力系统的稳定运行。
