The key factor to the miniaturization of piezoelectric devices is power density,which is limited by the heat generation or loss mechanisms.There are three loss components in general in piezoelectric vibrators/resonato...The key factor to the miniaturization of piezoelectric devices is power density,which is limited by the heat generation or loss mechanisms.There are three loss components in general in piezoelectric vibrators/resonators,i.e.,dielectric,elastic and piezoelectric losses.The mechanical quality factor,determined by these three factors,is the Figure Of Merit(FOM)in the sense of loss or heat generation.In this paper,we introduce a new loss phenomenology and innovative measuring methods based on the theory.First,quality factors at resonance and antiresonance for the k31,k33,kt and k15 vibration modes are derived theoretically,and the methodology for determining loss factors in various orientations(i.e.,loss anisotropy)is provided.For simplicity,we focus on materials with 1mm(equivalent to 6 mm)crystal symmetry for deriving the loss factors of a polycrystalline ceramic,and 14 different loss factors among 20 in total can be obtained from the measurements.Second,we propose the experimental methods for measuring both mechanical quality factors QA and QB at the resonance and antiresonance modes:a continuous admittance/impedance spectrum measuring method(traditional with temperature rise)and a burst mode(to circumvent the temperature effect).展开更多
基金This study was supported by Office of Naval Research under the Grant Number:N00014-08-1-0912.
文摘The key factor to the miniaturization of piezoelectric devices is power density,which is limited by the heat generation or loss mechanisms.There are three loss components in general in piezoelectric vibrators/resonators,i.e.,dielectric,elastic and piezoelectric losses.The mechanical quality factor,determined by these three factors,is the Figure Of Merit(FOM)in the sense of loss or heat generation.In this paper,we introduce a new loss phenomenology and innovative measuring methods based on the theory.First,quality factors at resonance and antiresonance for the k31,k33,kt and k15 vibration modes are derived theoretically,and the methodology for determining loss factors in various orientations(i.e.,loss anisotropy)is provided.For simplicity,we focus on materials with 1mm(equivalent to 6 mm)crystal symmetry for deriving the loss factors of a polycrystalline ceramic,and 14 different loss factors among 20 in total can be obtained from the measurements.Second,we propose the experimental methods for measuring both mechanical quality factors QA and QB at the resonance and antiresonance modes:a continuous admittance/impedance spectrum measuring method(traditional with temperature rise)and a burst mode(to circumvent the temperature effect).
