The nonlinear dynamics of the lateral micro-resonator including the air damping effect is researched. The air damping force is varied periodically during the resonator oscillating, and the air damp coefficient can not...The nonlinear dynamics of the lateral micro-resonator including the air damping effect is researched. The air damping force is varied periodically during the resonator oscillating, and the air damp coefficient can not be fixed as a constant. Therefore the linear dynamic analysis which used the constant air damping coefficient can not describe the actual dynamic characteristics of the mi-cro-resonator. The nonlinear dynamic model including the air damping force is established. On the base of Navier-Stokes equation and nonlinear dynamical equation, a coupled fluid-solid numerical simulation method is developed and demonstrates that damping force is a vital factor in micro-comb structures. Compared with existing experimental result, the nonlinear numerical value has quite good agreement with it. The differences of the amplitudes （peak） between the experimental data and the results by the linear model and the nonlinear model are 74.5% and 6% respectively. Nonlinear nu-merical value is more exact than linear value and the method can be applied in other mi-cro-electro-mechanical systeme （MEMS） structures to simulate the dynamic performance.展开更多
The squeeze-film air damping exists in a lot of micro-electronic-mechanical system (MEMS) devices unavoidably. The effects of air damping in traditional inertial switch with spring-mass system can be ignored for its l...The squeeze-film air damping exists in a lot of micro-electronic-mechanical system (MEMS) devices unavoidably. The effects of air damping in traditional inertial switch with spring-mass system can be ignored for its large volume and mass. But, many properties of MEMS switch, such as sensitivity, resolution and contact time, are affected by the air damping caused from the squeezed air film between two parallel plates moving relatively. Based on the conservation laws for mass and flux and the nonlinear Reynolds equation, the coefficient of squeeze-film damping was derived. The dynamic responses of the inertial switch with and without squeeze-film damping were simulated by using software ANSYS. The simulated results show that the sensitivity and contact time of the switch descend by about 5% and 15%, respectively, when the effects of squeeze-film damping are considered.展开更多
This paper studies the CoNbZr soft magnetic thin film by magnetic force microscopy （MFM）. By measuring in atmosphere circumstance, the magnetic force images display some clear dark dots which are corresponding to th...This paper studies the CoNbZr soft magnetic thin film by magnetic force microscopy （MFM）. By measuring in atmosphere circumstance, the magnetic force images display some clear dark dots which are corresponding to the clusters in the topography images welL Then the dark dots disappear in magnetic force images, scanning in high vacuum. This indicates that the dark dots are caused by air damping between the vibrating tip and the sample. An interpretation for the above observation is given.展开更多
基金This project is supported by Shanghai Municipal Science and Technique Committee Foundation, China (No. 03QF14019, No. 0452nm023, No. AM0420).
文摘The nonlinear dynamics of the lateral micro-resonator including the air damping effect is researched. The air damping force is varied periodically during the resonator oscillating, and the air damp coefficient can not be fixed as a constant. Therefore the linear dynamic analysis which used the constant air damping coefficient can not describe the actual dynamic characteristics of the mi-cro-resonator. The nonlinear dynamic model including the air damping force is established. On the base of Navier-Stokes equation and nonlinear dynamical equation, a coupled fluid-solid numerical simulation method is developed and demonstrates that damping force is a vital factor in micro-comb structures. Compared with existing experimental result, the nonlinear numerical value has quite good agreement with it. The differences of the amplitudes （peak） between the experimental data and the results by the linear model and the nonlinear model are 74.5% and 6% respectively. Nonlinear nu-merical value is more exact than linear value and the method can be applied in other mi-cro-electro-mechanical systeme （MEMS） structures to simulate the dynamic performance.
文摘The squeeze-film air damping exists in a lot of micro-electronic-mechanical system (MEMS) devices unavoidably. The effects of air damping in traditional inertial switch with spring-mass system can be ignored for its large volume and mass. But, many properties of MEMS switch, such as sensitivity, resolution and contact time, are affected by the air damping caused from the squeezed air film between two parallel plates moving relatively. Based on the conservation laws for mass and flux and the nonlinear Reynolds equation, the coefficient of squeeze-film damping was derived. The dynamic responses of the inertial switch with and without squeeze-film damping were simulated by using software ANSYS. The simulated results show that the sensitivity and contact time of the switch descend by about 5% and 15%, respectively, when the effects of squeeze-film damping are considered.
基金Supported by the National Key Fundamental Research Program of China (No. 51310Z07)
文摘This paper studies the CoNbZr soft magnetic thin film by magnetic force microscopy （MFM）. By measuring in atmosphere circumstance, the magnetic force images display some clear dark dots which are corresponding to the clusters in the topography images welL Then the dark dots disappear in magnetic force images, scanning in high vacuum. This indicates that the dark dots are caused by air damping between the vibrating tip and the sample. An interpretation for the above observation is given.
