The AFM probe in tapping mode is a continuous process of energy dissipation,from moving away from to intermittent contact with the sample surfaces.At present,studies regarding the energy dissipation mechanism of this ...The AFM probe in tapping mode is a continuous process of energy dissipation,from moving away from to intermittent contact with the sample surfaces.At present,studies regarding the energy dissipation mechanism of this continuous process have only been reported sporadically,and there are no systematic explanations or experimental verifications of the energy dissipation mechanism in each stage of the continuous process.The quality factors can be used to characterize the energy dissipation in TM-AFM systems.In this study,the vibration model of the microcantilever beam was established,coupling the vibration and damping effects of the microcantilever beam.The quality factor of the vibrating microcantilever beam under damping was derived,and the air viscous damping when the probe is away from the sample and the air squeeze film damping when the probe is close to the sample were calculated.In addition,the mechanism of the damping effects of different shapes of probes at different tip–sample distances was analyzed.The accuracy of the theoretical simplified model was verified using both experimental and simulation methods.A clearer understanding of the kinetic characteristics and damping mechanism of the TM-AFM was achieved by examining the air damping dissipation mechanism of AFM probes in the tapping mode,which was very important for improving both the quality factor and the imaging quality of the TM-AFM system.This study’s research findings also provided theoretical references and experimental methods for the future study of the energy dissipation mechanism of micro-nano-electromechanical systems.展开更多
A differential equation that is generally effective for squeeze film air damping of perforated plate and non perforated plate as well as in MEMS devices is developed.For perforated plate,the thickness and the dimens...A differential equation that is generally effective for squeeze film air damping of perforated plate and non perforated plate as well as in MEMS devices is developed.For perforated plate,the thickness and the dimensions of the plate are not limited.With boundary conditions,pressure distribution and the damping force on the plate can be found by solving the differential equation.Analytical expressions for damping pressure and damping force of a long strip holeplate are presented with a finite thickness and a finite width.To the extreme conditions of very thin plate and very thin hole,the results are reduced to the corresponding results of the conventional Reynolds' equation.Thus, the effectiveness of the generalized differential equation is justified.Therefore,the generalized Reynolds' equation will be a useful tool of design for damping structures in MEMS.展开更多
A differential equation for calculating squeeze-film air damping in slotted plates is developed by modifying the Reynolds equation. A term is added to account for the effect of airflow through the slots on the air dam...A differential equation for calculating squeeze-film air damping in slotted plates is developed by modifying the Reynolds equation. A term is added to account for the effect of airflow through the slots on the air damping of the plate. The end effect of the airflow in the slots is also treated by substituting an effective channel length for the geometric channel length (i. e. the thickness of the plate)..The damping pressure distribution, damping force, and damping force coefficient of the slotted plates can be found by solving the equation under appropriate boundary conditions. With restrictions on the thickness and the lateral dimensions of the slotted plate removed,the equation provides a useful tool for analysing the squeeze-film air damping effect of slotted plates with finite thickness and finite lateral dimensions. For a typical slotted plate structure, the damping force coefficient obtained by this equation agrees well with that generated by ANSYS.展开更多
The nonlinear dynamics of the lateral micro-resonator including the air damping effect is researched. The air damping force is varied periodically during the resonator oscillating, and the air damp coefficient can not...The nonlinear dynamics of the lateral micro-resonator including the air damping effect is researched. The air damping force is varied periodically during the resonator oscillating, and the air damp coefficient can not be fixed as a constant. Therefore the linear dynamic analysis which used the constant air damping coefficient can not describe the actual dynamic characteristics of the mi-cro-resonator. The nonlinear dynamic model including the air damping force is established. On the base of Navier-Stokes equation and nonlinear dynamical equation, a coupled fluid-solid numerical simulation method is developed and demonstrates that damping force is a vital factor in micro-comb structures. Compared with existing experimental result, the nonlinear numerical value has quite good agreement with it. The differences of the amplitudes (peak) between the experimental data and the results by the linear model and the nonlinear model are 74.5% and 6% respectively. Nonlinear nu-merical value is more exact than linear value and the method can be applied in other mi-cro-electro-mechanical systeme (MEMS) structures to simulate the dynamic performance.展开更多
Based on the energy transfer model(ETM) proposed by Bao et al.and the Monte Carlo(MC) model proposed by Hutcherson and Ye, this paper proposes an efficient molecular model(MC-S) for squeeze-film damping(SQFD) in raref...Based on the energy transfer model(ETM) proposed by Bao et al.and the Monte Carlo(MC) model proposed by Hutcherson and Ye, this paper proposes an efficient molecular model(MC-S) for squeeze-film damping(SQFD) in rarefied air by releasing the assumption of constant molecular velocity in the gap.Compared with the experiment data, the MC-S model is more efficient than the MC model and more accurate than ETM.Besides, by using the MC-S model, the feasibility of the empirical model proposed by Sumali for SQFD of different plate sizes is discussed.It is proved that, for various plate sizes, the accuracy of the empirical model is relatively high.At last, the SQFD of various vibration frequencies is discussed, and it shows that, for low vibration frequency, the MC-S model is reduced to ETM.展开更多
The squeeze-film air damping exists in a lot of micro-electronic-mechanical system (MEMS) devices unavoidably. The effects of air damping in traditional inertial switch with spring-mass system can be ignored for its l...The squeeze-film air damping exists in a lot of micro-electronic-mechanical system (MEMS) devices unavoidably. The effects of air damping in traditional inertial switch with spring-mass system can be ignored for its large volume and mass. But, many properties of MEMS switch, such as sensitivity, resolution and contact time, are affected by the air damping caused from the squeezed air film between two parallel plates moving relatively. Based on the conservation laws for mass and flux and the nonlinear Reynolds equation, the coefficient of squeeze-film damping was derived. The dynamic responses of the inertial switch with and without squeeze-film damping were simulated by using software ANSYS. The simulated results show that the sensitivity and contact time of the switch descend by about 5% and 15%, respectively, when the effects of squeeze-film damping are considered.展开更多
This paper studies the CoNbZr soft magnetic thin film by magnetic force microscopy (MFM). By measuring in atmosphere circumstance, the magnetic force images display some clear dark dots which are corresponding to th...This paper studies the CoNbZr soft magnetic thin film by magnetic force microscopy (MFM). By measuring in atmosphere circumstance, the magnetic force images display some clear dark dots which are corresponding to the clusters in the topography images welL Then the dark dots disappear in magnetic force images, scanning in high vacuum. This indicates that the dark dots are caused by air damping between the vibrating tip and the sample. An interpretation for the above observation is given.展开更多
An air damper possesses the advantages that there are no long term changes in the damping properties, there is no dependence on working temperature and additionally, it has less manufacturing and maintenance costs. As...An air damper possesses the advantages that there are no long term changes in the damping properties, there is no dependence on working temperature and additionally, it has less manufacturing and maintenance costs. As such, an air damper has been designed and developed based on the Maxwell type model concept in the approach of Nishihara and Asami [1]. The cylinder-piston and air-tank type damper characteristics such as air damping ratio and air spring rate have been studied by changing the length and diameter of the capillary pipe between the air cylinder and the air tank, operating air pressure and the air tank volume. A SDOF quarter-car vehicle suspension system using the developed air enclosed cylinder-piston and air-tank type damper has been analyzed for its motion transmissibility characteristics. Optimal values of the air damping ratio at various values of air spring rate have been determined for minimum motion transmissibility of the sprung mass. An experimental setup has been developed for SDOF quarter-car suspension system model using the developed air enclosed cylinder-piston and air-tank type damper to determine the motion transmissibility characteristics of the sprung mass. An attendant air pressure control system has been designed to vary air damping in the developed air damper. The results of the theoretical analysis have been compared with the experimental analysis.展开更多
A basic classical example of simple harmonic motion is the simple pendulum, consisting of a small bob and a massless string. In a vacuum with zero air resistance, such a pendulum will continue to oscillate indefinitel...A basic classical example of simple harmonic motion is the simple pendulum, consisting of a small bob and a massless string. In a vacuum with zero air resistance, such a pendulum will continue to oscillate indefinitely with a constant amplitude. However, the amplitude of a simple pendulum oscillating in air continuously decreases as its mechanical energy is gradually lost due to air resistance. To this end, it is generally perceived that the main role in the dissipation of mechanical energy is played by the bob of the pendulum, and that the string’s contribution is negligible. The purpose of this research is to experimentally investigate the merit of this assumption. Thus, we experimentally investigate the damping of a simple pendulum as a function of its string diameter and compare that to the contribution from its bob. We find out that although in some cases the effect of the string might be small or even negligible, in general the string can play a significant role, and in some cases even a greater role on the damping of the pendulum than its bob.展开更多
In this paper, it is shown that, a road vehicle 2DOF air damped quartercar suspension system can conveniently be transformed into a 2DOF air damped vibrating system representing an air damped dynamic vibration absorbe...In this paper, it is shown that, a road vehicle 2DOF air damped quartercar suspension system can conveniently be transformed into a 2DOF air damped vibrating system representing an air damped dynamic vibration absorber (DVA) with an appropriate change in the ratio μ of the main mass and the absorber mass i.e. when mass ratio μ >> 1. Also the effect of variation of the mass ratio, air damping ratio and air spring rate ratio, on the motion transmissibility at the resonant frequency of the main mass of the DVA has been dis- cussed. It is shown that, as the air damping ratio in the absorber system increases, there is a substantial decrease in the motion transmissibility of the main mass system where the air damper has been modeled as a Maxwell type. Optimal value of the air damping ratio for the minimum motion transmissibility of the main mass of the system has been determined. An experimental setup has been designed and developed with a control system to vary air pressure in the damper in the absorber system. The motion transmissibility characteristics of the main mass system have been obtained, and the optimal value of the air damping ratio has been determined for minimum motion transmissibility of the main mass of the展开更多
基金the National Natural Science Foun-dation of China(Grant No.11572031).
文摘The AFM probe in tapping mode is a continuous process of energy dissipation,from moving away from to intermittent contact with the sample surfaces.At present,studies regarding the energy dissipation mechanism of this continuous process have only been reported sporadically,and there are no systematic explanations or experimental verifications of the energy dissipation mechanism in each stage of the continuous process.The quality factors can be used to characterize the energy dissipation in TM-AFM systems.In this study,the vibration model of the microcantilever beam was established,coupling the vibration and damping effects of the microcantilever beam.The quality factor of the vibrating microcantilever beam under damping was derived,and the air viscous damping when the probe is away from the sample and the air squeeze film damping when the probe is close to the sample were calculated.In addition,the mechanism of the damping effects of different shapes of probes at different tip–sample distances was analyzed.The accuracy of the theoretical simplified model was verified using both experimental and simulation methods.A clearer understanding of the kinetic characteristics and damping mechanism of the TM-AFM was achieved by examining the air damping dissipation mechanism of AFM probes in the tapping mode,which was very important for improving both the quality factor and the imaging quality of the TM-AFM system.This study’s research findings also provided theoretical references and experimental methods for the future study of the energy dissipation mechanism of micro-nano-electromechanical systems.
文摘A differential equation that is generally effective for squeeze film air damping of perforated plate and non perforated plate as well as in MEMS devices is developed.For perforated plate,the thickness and the dimensions of the plate are not limited.With boundary conditions,pressure distribution and the damping force on the plate can be found by solving the differential equation.Analytical expressions for damping pressure and damping force of a long strip holeplate are presented with a finite thickness and a finite width.To the extreme conditions of very thin plate and very thin hole,the results are reduced to the corresponding results of the conventional Reynolds' equation.Thus, the effectiveness of the generalized differential equation is justified.Therefore,the generalized Reynolds' equation will be a useful tool of design for damping structures in MEMS.
文摘A differential equation for calculating squeeze-film air damping in slotted plates is developed by modifying the Reynolds equation. A term is added to account for the effect of airflow through the slots on the air damping of the plate. The end effect of the airflow in the slots is also treated by substituting an effective channel length for the geometric channel length (i. e. the thickness of the plate)..The damping pressure distribution, damping force, and damping force coefficient of the slotted plates can be found by solving the equation under appropriate boundary conditions. With restrictions on the thickness and the lateral dimensions of the slotted plate removed,the equation provides a useful tool for analysing the squeeze-film air damping effect of slotted plates with finite thickness and finite lateral dimensions. For a typical slotted plate structure, the damping force coefficient obtained by this equation agrees well with that generated by ANSYS.
基金This project is supported by Shanghai Municipal Science and Technique Committee Foundation, China (No. 03QF14019, No. 0452nm023, No. AM0420).
文摘The nonlinear dynamics of the lateral micro-resonator including the air damping effect is researched. The air damping force is varied periodically during the resonator oscillating, and the air damp coefficient can not be fixed as a constant. Therefore the linear dynamic analysis which used the constant air damping coefficient can not describe the actual dynamic characteristics of the mi-cro-resonator. The nonlinear dynamic model including the air damping force is established. On the base of Navier-Stokes equation and nonlinear dynamical equation, a coupled fluid-solid numerical simulation method is developed and demonstrates that damping force is a vital factor in micro-comb structures. Compared with existing experimental result, the nonlinear numerical value has quite good agreement with it. The differences of the amplitudes (peak) between the experimental data and the results by the linear model and the nonlinear model are 74.5% and 6% respectively. Nonlinear nu-merical value is more exact than linear value and the method can be applied in other mi-cro-electro-mechanical systeme (MEMS) structures to simulate the dynamic performance.
基金Project supported by the National Natural Science Foundation of China(Grant No.51375091)
文摘Based on the energy transfer model(ETM) proposed by Bao et al.and the Monte Carlo(MC) model proposed by Hutcherson and Ye, this paper proposes an efficient molecular model(MC-S) for squeeze-film damping(SQFD) in rarefied air by releasing the assumption of constant molecular velocity in the gap.Compared with the experiment data, the MC-S model is more efficient than the MC model and more accurate than ETM.Besides, by using the MC-S model, the feasibility of the empirical model proposed by Sumali for SQFD of different plate sizes is discussed.It is proved that, for various plate sizes, the accuracy of the empirical model is relatively high.At last, the SQFD of various vibration frequencies is discussed, and it shows that, for low vibration frequency, the MC-S model is reduced to ETM.
文摘The squeeze-film air damping exists in a lot of micro-electronic-mechanical system (MEMS) devices unavoidably. The effects of air damping in traditional inertial switch with spring-mass system can be ignored for its large volume and mass. But, many properties of MEMS switch, such as sensitivity, resolution and contact time, are affected by the air damping caused from the squeezed air film between two parallel plates moving relatively. Based on the conservation laws for mass and flux and the nonlinear Reynolds equation, the coefficient of squeeze-film damping was derived. The dynamic responses of the inertial switch with and without squeeze-film damping were simulated by using software ANSYS. The simulated results show that the sensitivity and contact time of the switch descend by about 5% and 15%, respectively, when the effects of squeeze-film damping are considered.
基金Supported by the National Key Fundamental Research Program of China (No. 51310Z07)
文摘This paper studies the CoNbZr soft magnetic thin film by magnetic force microscopy (MFM). By measuring in atmosphere circumstance, the magnetic force images display some clear dark dots which are corresponding to the clusters in the topography images welL Then the dark dots disappear in magnetic force images, scanning in high vacuum. This indicates that the dark dots are caused by air damping between the vibrating tip and the sample. An interpretation for the above observation is given.
文摘An air damper possesses the advantages that there are no long term changes in the damping properties, there is no dependence on working temperature and additionally, it has less manufacturing and maintenance costs. As such, an air damper has been designed and developed based on the Maxwell type model concept in the approach of Nishihara and Asami [1]. The cylinder-piston and air-tank type damper characteristics such as air damping ratio and air spring rate have been studied by changing the length and diameter of the capillary pipe between the air cylinder and the air tank, operating air pressure and the air tank volume. A SDOF quarter-car vehicle suspension system using the developed air enclosed cylinder-piston and air-tank type damper has been analyzed for its motion transmissibility characteristics. Optimal values of the air damping ratio at various values of air spring rate have been determined for minimum motion transmissibility of the sprung mass. An experimental setup has been developed for SDOF quarter-car suspension system model using the developed air enclosed cylinder-piston and air-tank type damper to determine the motion transmissibility characteristics of the sprung mass. An attendant air pressure control system has been designed to vary air damping in the developed air damper. The results of the theoretical analysis have been compared with the experimental analysis.
文摘A basic classical example of simple harmonic motion is the simple pendulum, consisting of a small bob and a massless string. In a vacuum with zero air resistance, such a pendulum will continue to oscillate indefinitely with a constant amplitude. However, the amplitude of a simple pendulum oscillating in air continuously decreases as its mechanical energy is gradually lost due to air resistance. To this end, it is generally perceived that the main role in the dissipation of mechanical energy is played by the bob of the pendulum, and that the string’s contribution is negligible. The purpose of this research is to experimentally investigate the merit of this assumption. Thus, we experimentally investigate the damping of a simple pendulum as a function of its string diameter and compare that to the contribution from its bob. We find out that although in some cases the effect of the string might be small or even negligible, in general the string can play a significant role, and in some cases even a greater role on the damping of the pendulum than its bob.
文摘In this paper, it is shown that, a road vehicle 2DOF air damped quartercar suspension system can conveniently be transformed into a 2DOF air damped vibrating system representing an air damped dynamic vibration absorber (DVA) with an appropriate change in the ratio μ of the main mass and the absorber mass i.e. when mass ratio μ >> 1. Also the effect of variation of the mass ratio, air damping ratio and air spring rate ratio, on the motion transmissibility at the resonant frequency of the main mass of the DVA has been dis- cussed. It is shown that, as the air damping ratio in the absorber system increases, there is a substantial decrease in the motion transmissibility of the main mass system where the air damper has been modeled as a Maxwell type. Optimal value of the air damping ratio for the minimum motion transmissibility of the main mass of the system has been determined. An experimental setup has been designed and developed with a control system to vary air pressure in the damper in the absorber system. The motion transmissibility characteristics of the main mass system have been obtained, and the optimal value of the air damping ratio has been determined for minimum motion transmissibility of the main mass of the