Laser beam characteristic for laser resonators with diffraction optical elements

The matrix eigenvalue method is used to analyze a laser resonator composed of diffraction optical elements. The results show that this type of resonator can separate fundamental mode and high order modes effectively. The output beams can be designed for different requests.

Simple and universal method in designs of high-efficiency diffractive optical elements for spectrum separation and beam concentration

Diffractive optical elements（DOEs） with spectrum separation and beam concentration（SSBC） functions have important applications in solar cell systems. With the SSBC DOEs, the sunlight radiation is divided into several wave bands so as to be effectively absorbed by photovoltaic materials with different band gaps. A new method is proposed for designing high-efficiency SSBC DOEs, which is physically simple, numerically fast, and universally applicable. The SSBC DOEs are designed by the new design method, and their performances are analyzed by the Fresnel diffraction integral method.The new design method takes two advantages over the previous design method. Firstly, the optical focusing efficiency is heightened by up to 10%. Secondly, focal positions of all the designed wavelengths can be designated arbitrarily and independently. It is believed that the designed SSBC DOEs should have practical applications to solar cell systems.

Experimental investigation on partially coherent higher-order non-diffractive beams

We experimentally study the generation of a partially coherent non-diffractive beam by focusing a partially coherent vortex beam with an axieon. The investigation results show that when the partially coherent vortex beam is focused by the axicon, the beam is transferred into a partially coherent higher-order non-diffractive beam. In the non-diffractive zone, the transverse intensity distribution of the partially coherent higher-order non-diffractive beam is invariant during propagation. In addition, the range of the non-diffractive zone is related to the coherence of the partially coherent vortex beam. The poorer the coherence of the partially coherent vortex beam, the shorter the range of the non-diffractive zone.

Zone plate design for generating annular-focused beams

Annular-focused beams have attracted attention because of their novel properties and applications in optical trapping, high resolution microscopy, and laser-induced periodic surface structuring. Generation of this beam is very important and necessary. In this article, a novel design of zone plate for forming the annular-focused beams is proposed. The design principle is introduced, and the characteristics of zone plate are analyzed by numerical simulation. The result shows that the zone plate can form a monochromatic ring-shaped intensity distribution in the focal plane. And the design method is also generally suitable for designing the other optical elements to generate the annular-focused beams.

A single diffractive optical element implementing spectrum-splitting and beam-concentration functions simultaneously with high diffraction efficiency

In this paper,a novel method is proposed and employed to design a single diffractive optical element（DOE） for implementing spectrum-splitting and beam-concentration（SSBC） functions simultaneously.We develop an optimization algorithm,through which the SSBC DOE can be optimized within an arbitrary thickness range according to the limitations of modern photolithography technology.Theoretical simulation results reveal that the designed SSBC DOE has a high optical focusing efficiency.It is expected that the designed SSBC DOE should have practical applications in high-efficiency solar cell systems.

Design of Diffractive Optical Elements Used for Beam Shaping in the Fresnel Domain

In the Fresnel transform domain, an effective improvement to the conventional iterative algorithm for designing the diffractive optical elements (DOEs) used for spatial beam shaping has been proposed. The algorithm can successfully achieve to design DOEs for beam shaping. Compared with conventional algorithm, this algorithm can provide faster convergence, more powerful ability to overcome local minimum problem and better shaping quality. By computer simulation, the result has shown that the DOEs designed by this algorithm has snch advantages as high uniformity at the main lobe, low profile error and steep edge.

Tunable optical gradient trap by radial varying polarization Bessel-Gauss beam

Optical tweezers play an important role in many domains, especially in life science. And optical gradient force is necessary for constructing optical tweezers. In this paper, the optical gradient force in the focal region of radial varying polarization Bessel- Gauss beam is investigated numerically by means of vector diffraction theory. Results show that the beam parameter and vary rate parameter that indicates the change speed of polarization rotation angle affect the optical gradient force pattern very considerably, and some novel force distributions may come into being, such as multiple force minimums, force ring, and force crust. Therefore, the focusing of radial varying polarization Bessel-Gauss beam can be used to construct optical traps.

光源相干度对Bessel光最大无衍射距离的影响

理论分析和实验研究了光源相干度对其产生的Bessel光最大无衍射距离的影响.以He-Ne激光器为光源,用旋转毛玻璃法产生部分相干光,经过扩束后再用轴棱锥法产生Bessel光束.通过移动旋转毛玻璃改变部分相干光的相干度,测量其产生的Bessel光束的最大无衍射距离,得到光源相干度与产生Bessel光束最大无衍射距离的关系.结果表明,随着光源相干度的降低,Bessel光束最大无衍射距离明显变短,当相干度g≈1下降为g=0.8时,最大无衍射距离缩短了一半.用高斯-谢尔模型进行分析和模拟,理论模拟结果与实验观察结果基本吻合.

柱透镜聚焦高阶Bessel光束产生焦散光束

研究了高阶Bessel光束经过柱透镜后的光场分布特性.在广义惠更斯-菲涅尔衍射积分理论基础上,推导出高阶Bessel光束透过柱透镜后的衍射光场分布表达式;并利用MATLAB和MATHCAD模拟了不同传播距离处的光强分布.实验上,利用轴棱锥和螺旋相位板产生不同阶数的高阶Bessel光束,并使产生的高阶Bessel光束经过柱透镜,最后用CCD记录下不同距离处的衍射光场.研究结果表明,高阶Bessel光束经过柱透镜形成唇状的焦散光束.

High throughput direct writing of a mesoscale binary optical element by femtosecond long focal depth beams

Bessel beams have multiple applications owing to their propagation-invariant properties,including particle trapping,optical coherence tomography,and material processing.However,traditional Bessel-beam shaping techniques require bulky components,which limits the development of miniaturized optical systems for integration with other devices.Here,we report a novel femtosecond laser direct writing strategy for fabricating mesoscale(from submicrometer to subcentimeter)binary optical elements with microscale resolution.This strategy utilizes femtosecond beams with a long focal depth to increase throughput while reducing the constraints on critical sample positioning.As a demonstration,we manufactured and characterized a 2.2 mm diameter binary axicon.The experimentally measured quasi-Bessel beam intensity distribution and the numerical results were remarkably consistent,demonstrating a suitable tradeoff between the overall size,efficiency,and structural fidelity.Furthermore,a compact Bessel lens containing binary axicons was constructed and successfully used for femtosecond laser mask-less ablation of periodic grating-type surface plasmon polariton excitation units.The demonstrated approach shows significant potential for fabricating customizable integrated optical components.

用于光束整形的衍射光学元件设计的混合算法

提出了一种用于衍射光学元件优化设计的混合遗传迭代爬山算法,该算法将迭代量化傅里叶变换算法融入到遗传算法中,然后在整体遗传算法结束后,对找到的当前最优解再用爬山法进行局部寻优,从而得到最优的衍射光学元件表面相位分布.用该混合方法设计了衍射光学元件,可以将入射的高斯光束整形成方形的均匀光斑.模拟结果表明:该混合算法具有收敛速度快、设计准确度高等优点.相比于其它设计方法,本文提出的方法能较好地改善整形效果,特别适用于光束整形的衍射元件设计.

贝塞尔-高斯光束通过圆孔与圆环光阑的衍射

为了研究贝塞尔-高斯光束通过圆孔硬边光阑和圆环光阑的衍射特性,从Collins公式出发,采用数值模拟的方法模拟出光强分布。模拟结果表明,贝塞尔-高斯光束经圆孔光阑衍射后轴上光强随菲涅耳数F呈周期振荡;贝塞尔-高斯光束经圆环光阑后轴上光强随F呈振动衰减。在F相同时,贝塞尔-高斯光束经圆孔光阑衍射后横向光强分布比经圆环光阑衍射后横向光强分布平滑,孔径越小,光强调制越明显;当孔径与束腰相等时候,横向光强分布与菲涅耳数没有关系。

高线密度X射线透射光栅的制作工艺

采用电子束光刻、X射线光刻和微电镀技术,成功制作了面积为10mm×0.5mm,周期为500nm,占空比为1∶1,金吸收体厚度为430nm的可用于X射线衍射的大面积透射光栅.首先利用电子束光刻和微电镀技术制备基于镂空薄膜结构的X射线光刻掩模,然后利用X射线光刻经济、高效地复制X射线透射光栅.整个工艺流程分别利用了电子束光刻分辨率高和X射线光刻效率高的优点,并且可以得到剖面陡直的纳米级光栅线条.最后,测量了制作出的X射线透射光栅对波长为11nm同步辐射光的衍射峰,实验结果表明该光栅具有良好的衍射特性.

超细激光束准直器的原理与设计

提出一种用衍射光学器件产生超细准直激光束的方法。该方法具有设计、制造和装配简便等特点。介绍了器件设计的原理 ,给出了一种实用的设计方案和模拟结果。

采用分步迭代算法设计制作衍射光学元件

结合均匀照明相位器件的设计实例,介绍最新提出的基于迭代框架的优化方法,并应用该方法设计制作了16台阶的衍射光学元件并对其进行了测试,验证了设计原理及方法的正确性,且对加工中可能出现的误差进行了分析和讨论。测试结果验证了采用多台阶相位结构的设计方案能有效提高工艺宽容度。

大尺寸衍射光学元件的扫描离子束刻蚀

总结了大尺寸衍射光学元件离子束刻蚀技术的研究进展。针对自行研制的KZ-400离子束刻蚀装置,提出了组合石墨束阑结构和多位置分步刻蚀策略来提高离子束刻蚀深度的均匀性,目前在450mm尺寸内的刻蚀深度均匀性最高可达±1%。建立了针对多层介质膜光栅的衍射强度一维空间分布在线检测系统以及用于透射衍射光学元件离子束刻蚀深度的等厚干涉在线检测系统,实现了对大尺寸衍射光学元件离子束刻蚀终点的定量、科学控制,提高了元件离子束刻蚀工艺的成功率。利用上述技术,成功研制出一系列尺寸的多层介质膜光栅、光束采样光栅、色分离光栅以及同步辐射光栅等多种衍射光学元件。

用于共孔径相干合成的衍射光学元件设计

分析了衍射光学元件实现共孔径相干合成的物理过程,建立了基于衍射光学元件的共孔径相干合成数学模型,推导了合成光束复振幅与入射光束和衍射光学元件相位分布之间的关系。提出用合成光束强度分布的均匀性作为评价函数的优化方法,获得了一维衍射合束器的相位分布。与文献报道的衍射光学元件分束器相比,可获得更高的合成效率。采用模拟退火算法结合随机并行梯度下降算法优化合束器设计,提高了计算效率,获得了多束衍射合束器的相位分布和合成效率。分析了单子束失效及合束器像差对合成效率的影响,结果表明:随着合束数量的增加,单子束失效对合成效率的影响逐渐减小;若使合成效率退化小于5%,衍射光学元件的波像差均方根值应控制在λ/28以内。

衍射光学元件的反应离子束蚀刻研究

本文提出了一种制作衍射光学元件的新方法———反应离子束蚀刻法对此技术研究的结果表明：反应离子束蚀刻法具有高蚀刻速率、蚀刻过程各向异性好、蚀刻参数控制灵活等特点，对于衍射光学元件和微光学元件的精细结构制作十分有利本文详细总结了反应离子束蚀刻过程中各工艺参数对蚀刻速率的影响。

YG算法设计分数傅里叶变换衍射光学光束整形器件

针对分数傅里叶变换衍射光学光束整形器件,比较了按离散点与按菲涅耳积分计算得到的变换矩阵间的差距,从中分析得出按离散点计算的变换矩阵引入的离散化误差与分数傅里叶变换系统参数的关系.模拟计算结果表明,该离散化误差不能忽略.为了在输出面上得到真实的光强分布,应采用菲涅耳积分计算其变换矩阵.鉴于该变换矩阵非幺正,本文利用YG算法进行了光束整形器件的设计.

用于超宽焦斑光束整形的大口径衍射光学元件设计和制作

采用改进混合优化算法首次设计并制作了口径168.7 mm的连续衍射光学元件实现类环形光束入射,输出直径650μm超宽焦斑光束均匀照明。用Nd:YAG脉冲激光器1.064μm波长激光进行实验,获得了与设计尺寸相符、边缘陡峭、无中心尖锐脉冲、具有极好的离焦宽容性的宽焦斑,但焦斑顶部不均匀性较大。对此进行了深入的模拟分析,结果表明:焦斑顶部较大的光强调制主要来源于现有的工艺及实验条件误差。