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Fabrication of high-quality all-graphene devices with low contact resistances 被引量:2
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作者 Rong Yang Shuang Wu +7 位作者 Duoming Wang Guibai xie Meng Cheng Guole Wang Wei Yang Peng Chen Dongxia Shi Guangyu Zhang 《Nano Research》 SCIE EI CAS CSCD 2014年第10期1449-1456,共8页
All-graphene devices are new class of graphene devices with simple layouts and low contact resistances. Here we report a clean fabrication strategy for all-graphene devices via a defect-assisted anisotropic etching. T... All-graphene devices are new class of graphene devices with simple layouts and low contact resistances. Here we report a clean fabrication strategy for all-graphene devices via a defect-assisted anisotropic etching. The as-fabricated graphene is free of contamination and retains the quality of pristine graphene. The contact resistance at room temperature (RT) between a bilayer graphene channel and a multilayer graphene electrode can be as low as -5 Ω.·μm, the lowest ever achieved experimentally. Our results suggest the feasibility of employing such all-graphene devices in high performance carbon-based integrated circuits. 展开更多
关键词 GRAPHENE all-graphene devices THINNING contact resistance
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