A new type of semiconductor gas sensor fabricated on an alumina substrate for CO and CH_4 detection has been developed.The alumina substrate was obtained by an anodizing method companying with micromachining to form p...A new type of semiconductor gas sensor fabricated on an alumina substrate for CO and CH_4 detection has been developed.The alumina substrate was obtained by an anodizing method companying with micromachining to form patterned structure.Gas sensitive material was made of nano-sized SnO_2 powder prepared by a chemical precipitation method.Au (0.048wt.%) and Pd (0.3 wt%) were doped to SnO_2 powder to increase sensitivity to CO and CH_4,respectively.The heating power and sensing performance were measured with an automatic test system.The results show that the sensors have remarkable responses and certain selectivity to the target gases.Our study demonstrates that alumina substrate can be successfully applied in sensor micromachining technology.展开更多
The transparent and thermal developments of high-purity Al_2O_3 doped with different levels of Nd_2O_3 were investigated. Dopant levels ranged from 500–1500 ppm（Nd/Al atomic ratio）. The samples were characterized w...The transparent and thermal developments of high-purity Al_2O_3 doped with different levels of Nd_2O_3 were investigated. Dopant levels ranged from 500–1500 ppm（Nd/Al atomic ratio）. The samples were characterized with X-ray diffraction（XRD）, scanning electron microscopy（SEM）, Raman spectroscopy, transmittance spectroscopy and specific heat measurement. Results revealed that with proper Nd doped, Nd^（3＋） ions solid dissolved in Al_2O_3 lattice, resulting in small and uniform grain and high bonding vibration, which was beneficial to transparent and thermal properties. With 1000 ppm Nd doped, Al_2O_3 translucent ceramics showed a total transmittance of 89% and thermal conductivity of 41.7 W/m/K, indicating a potential application as substrate for effective heat dissipation and multi emitting surface in LEDs module.展开更多
文摘A new type of semiconductor gas sensor fabricated on an alumina substrate for CO and CH_4 detection has been developed.The alumina substrate was obtained by an anodizing method companying with micromachining to form patterned structure.Gas sensitive material was made of nano-sized SnO_2 powder prepared by a chemical precipitation method.Au (0.048wt.%) and Pd (0.3 wt%) were doped to SnO_2 powder to increase sensitivity to CO and CH_4,respectively.The heating power and sensing performance were measured with an automatic test system.The results show that the sensors have remarkable responses and certain selectivity to the target gases.Our study demonstrates that alumina substrate can be successfully applied in sensor micromachining technology.
基金supported by the project of Natural Science Foundation of Zhejiang Province(LY15F050005 and LZ14B010001)
文摘The transparent and thermal developments of high-purity Al_2O_3 doped with different levels of Nd_2O_3 were investigated. Dopant levels ranged from 500–1500 ppm（Nd/Al atomic ratio）. The samples were characterized with X-ray diffraction（XRD）, scanning electron microscopy（SEM）, Raman spectroscopy, transmittance spectroscopy and specific heat measurement. Results revealed that with proper Nd doped, Nd^（3＋） ions solid dissolved in Al_2O_3 lattice, resulting in small and uniform grain and high bonding vibration, which was beneficial to transparent and thermal properties. With 1000 ppm Nd doped, Al_2O_3 translucent ceramics showed a total transmittance of 89% and thermal conductivity of 41.7 W/m/K, indicating a potential application as substrate for effective heat dissipation and multi emitting surface in LEDs module.
