High Selective Etching of Aluminum Alloys In High Plasma Density Reactor

An inductively coupled plasma (ICP) discharge and its etching behaviors for aluminum alloys were investigated in this report. A radio frequency power supply was used for plasma generation. The unique hardware configuration enabled one to control ion energy separately from plasma density. Plasma properties were measured with a Langmuir probe. Electron temperature, plasma potential and plasma density were found to be comparable with those reported from Electron Cyclotron Resonance (ECR) and other types of reactors[1].A mixture of HBr and chlorine gases were used for this aluminum etch study. Experimental matrices were designed with Response Surface Methodology (RSM) to analyze the process trends versus etch parameters, such as source power, bias power and gas composition. An etch rate of 8500A to 9000A per minute was obtained at 5 to 15 mTorr pressure ranges. Anisotropic profiles with high photoresist selectivity (5 to 1) and silicon dioxide selectivity greater than 10 were achieved with HBr addition into chlorine plasma.Bromine-containing chemistry for an aluminum etch in a low pressure ICP discharge showed great potential for use in ULSI fabrication. In addition, the hardware used was very simple and the chamber size was much smaller than other high density plasma sources.

Electrochemical Treatment of Distillery Spent Wash Using Aluminum and Iron Electrodes

Electrochemical treatment of distillery .spentwash was carried out using different combinations of aluminum and iron electrodes in batch mode of operation. The spent wash was characterized for various parameters as per standard method of analysis and the treatment results were analyzed in terms of chemical oxygen demand （COD） removal efficiency o.f thespent.wash. The experiments were performed to s.tudy the effect of operating parameterssuch as current density, pH of the spent wash, agitation speed, electrolysis time and the distance between the elec- trodes on the COD removal efficiency of the spent wash. It was observed that aluminum electrodes were more suitable for treatment of distillery spent wash as compared to iron electrodes. The maximum COD removal effi- ciency of 81.3% was obtained with A1-A1 electrodes at the current density of 0.187 A.cm-2 and pH 3 for an elec-trolysis time of 2 h.

Dynamic Impact of High-Density Aluminum Foam

High-density aluminum foam can provide higher stiffness and absorb more energy during the impact Obtaining the constitutive law of such foam requires tri-axial tests with very high pressure,where difficulty may arise because the hydrostatic pressure can reach more than 30 MPa.In this paper,instead of using tri-axial tests,we proposed three easier tests-tension,compression and shear to obtain the parameters of constitutive model(the Deshpande-Fleck model).To verify the constitutive model both statically and dynamically,we carried out addi-tional triaxial tests and direct impact tests,respectively.Based on the derived model,we performed finite element simulation to study the impact response of the present foam.By dimensional analysis,we proposed an empirical equation for a non-dimensional impact time the impact time divided by the time required for plastic wave travelling from the impact surface to the bottom surface,to det ermine the deformation charac teristic of the aluminum foam after impact.For the case with t_(d)≤1,the deformation tends to exhibit a shock-type characteristic,while for the case with t_(d)>5,the deformation tends to exhibit an upsetting-type characteristic.