Interest in energy harvesters has grown rapidly over the last decade. The cantilever shaped piezoelectric energy harvesting beam is one of the most employed designs, due to its simplicity and flexibility for further p...Interest in energy harvesters has grown rapidly over the last decade. The cantilever shaped piezoelectric energy harvesting beam is one of the most employed designs, due to its simplicity and flexibility for further performance enhancement. The research effort in the MEMS Piezoelectric vibration energy harvester designed using three types of cantilever materials, Lithium Niobate (LiNbO3), Aluminum Nitride (AlN) and Zinc Oxide (ZnO) with different substrate materials: aluminum, steel and silicon using COMSOL Multiphysics package were designed and analyzed. Voltage, mechanical power and electrical power versus frequency for different cantilever materials and substrates were modeled and simulated using Finite element method (FEM). The resonant frequencies of the LiNbO3/Al, AlN/Al and ZnO/Al systems were found to be 187.5 Hz, 279.5 Hz and 173.5 Hz, respectively. We found that ZnO/Al system yields optimum voltage and electrical power values of 8.2 V and 2.8 mW, respectively. For ZnO cantilever on aluminum, steel and silicon substrates, we found the resonant frequencies to be 173.5 Hz, 170 Hz and 175 Hz, respectively. Interestingly, ZnO/steel yields optimal voltage and electrical power values of 9.83 V and 4.02 mW, respectively. Furthermore, all systems were studied at different differentiate frequencies. We found that voltage and electrical power have increased as the acceleration has increased.展开更多
The thermal degradation behaviors of AlN green specimens were studied by thermogravimetry analysis during the ceramic powder injection molding debinding process. The optimum binder composition and the debinding cycle ...The thermal degradation behaviors of AlN green specimens were studied by thermogravimetry analysis during the ceramic powder injection molding debinding process. The optimum binder composition and the debinding cycle were demonstrated by observing the TGA and DTA plots of AlN green specimens and analyzing the microstructure at different temperatures. By adding HDPE into the PW EVA binder used in powder injection molding AlN can effectively reduce the mass lose rate in debinding process and improve the shape retention ability. At last, aluminum nitride ceramic with high room temperature thermal conductivity of 162.5?W·m -1 ·K -1 was produced. [展开更多
文摘Interest in energy harvesters has grown rapidly over the last decade. The cantilever shaped piezoelectric energy harvesting beam is one of the most employed designs, due to its simplicity and flexibility for further performance enhancement. The research effort in the MEMS Piezoelectric vibration energy harvester designed using three types of cantilever materials, Lithium Niobate (LiNbO3), Aluminum Nitride (AlN) and Zinc Oxide (ZnO) with different substrate materials: aluminum, steel and silicon using COMSOL Multiphysics package were designed and analyzed. Voltage, mechanical power and electrical power versus frequency for different cantilever materials and substrates were modeled and simulated using Finite element method (FEM). The resonant frequencies of the LiNbO3/Al, AlN/Al and ZnO/Al systems were found to be 187.5 Hz, 279.5 Hz and 173.5 Hz, respectively. We found that ZnO/Al system yields optimum voltage and electrical power values of 8.2 V and 2.8 mW, respectively. For ZnO cantilever on aluminum, steel and silicon substrates, we found the resonant frequencies to be 173.5 Hz, 170 Hz and 175 Hz, respectively. Interestingly, ZnO/steel yields optimal voltage and electrical power values of 9.83 V and 4.02 mW, respectively. Furthermore, all systems were studied at different differentiate frequencies. We found that voltage and electrical power have increased as the acceleration has increased.
文摘The thermal degradation behaviors of AlN green specimens were studied by thermogravimetry analysis during the ceramic powder injection molding debinding process. The optimum binder composition and the debinding cycle were demonstrated by observing the TGA and DTA plots of AlN green specimens and analyzing the microstructure at different temperatures. By adding HDPE into the PW EVA binder used in powder injection molding AlN can effectively reduce the mass lose rate in debinding process and improve the shape retention ability. At last, aluminum nitride ceramic with high room temperature thermal conductivity of 162.5?W·m -1 ·K -1 was produced. [
