Deposition of TiO2 film from atmospheric pressure non- equilibrium Ar/O2/TiCl4 plasma was done to study the effect of discharge power during the film deposition process in this paper. TiO2 films with kinds of morpholo...Deposition of TiO2 film from atmospheric pressure non- equilibrium Ar/O2/TiCl4 plasma was done to study the effect of discharge power during the film deposition process in this paper. TiO2 films with kinds of morphologies and controlled crystallization were deposited from mixtures of TiCl4 and O2 on quartz substrate by one step process. Scanning electron microscope （SEM） and transmission electron microscope （TEM） were used to analyze the morphology and crystallization of the deposited TiO2 films. It was found that the discharge power played a key role in the morphology and crystallization of the deposited TiO2 film whether the flow of TiCl4was large or small. When the flow of TiCl4 was large, the deposited TiO2 film was amorphous particles at low discharge power and was multi-crystalline at high discharge power. When the flow of TiCl4 was small, the deposited TiO2 film became more compact and the crystallization was enhanced as the discharge power increased. The dependence of the discharge current and the applied voltage with the discharge power indicated that it was a glow discharge. The gas temperature which increases with the discharge power is one of the main causes that affect the morphology and crystallization of the deposited film.展开更多
A gliding arc discharge plasma and its characteristics are described. Analysis of the production principle of the plasma is presented. Some experimental results about two novel types of the gliding arc plasma generato...A gliding arc discharge plasma and its characteristics are described. Analysis of the production principle of the plasma is presented. Some experimental results about two novel types of the gliding arc plasma generator have been obtained. These types of gliding arc plasma axe potentially usable in the chemical industry and environmental engineering.展开更多
Among the different types of microwave plasma torches, the axial injection torch (TIA) has been used for several years to create chemically active species, in applications such as gas analysis, surface processing and ...Among the different types of microwave plasma torches, the axial injection torch (TIA) has been used for several years to create chemically active species, in applications such as gas analysis, surface processing and gaseous waste treatments. The TIA allows the coupling of microwave energy (2.45 GHz) to a gas injected axially at the nozzle’s exit. The TIA produces non-local thermodynamic equilibrium plasmas with a high luminosity and a maximum density of charged particles at the nozzle’s exit. The present work is dedicated to study the plasma created by a TIA, running at atmospheric pressure. The study involves both experiment and modeling of this torch, in order to maximize the coupling between the microwave power and the plasma and to define the optimum plasma and flow operating conditions for plasma-to-gas heat transfer.展开更多
基金National Natural Science Foundations of China (No.10835004,No.10775031)Science and Technology Commission of Shanghai Municipality,China (No.10XD1400100)
文摘Deposition of TiO2 film from atmospheric pressure non- equilibrium Ar/O2/TiCl4 plasma was done to study the effect of discharge power during the film deposition process in this paper. TiO2 films with kinds of morphologies and controlled crystallization were deposited from mixtures of TiCl4 and O2 on quartz substrate by one step process. Scanning electron microscope （SEM） and transmission electron microscope （TEM） were used to analyze the morphology and crystallization of the deposited TiO2 films. It was found that the discharge power played a key role in the morphology and crystallization of the deposited TiO2 film whether the flow of TiCl4was large or small. When the flow of TiCl4 was large, the deposited TiO2 film was amorphous particles at low discharge power and was multi-crystalline at high discharge power. When the flow of TiCl4 was small, the deposited TiO2 film became more compact and the crystallization was enhanced as the discharge power increased. The dependence of the discharge current and the applied voltage with the discharge power indicated that it was a glow discharge. The gas temperature which increases with the discharge power is one of the main causes that affect the morphology and crystallization of the deposited film.
基金supported by the National Natural Science Foundation of China(Nos.90205026,10375082)
文摘A gliding arc discharge plasma and its characteristics are described. Analysis of the production principle of the plasma is presented. Some experimental results about two novel types of the gliding arc plasma generator have been obtained. These types of gliding arc plasma axe potentially usable in the chemical industry and environmental engineering.
文摘Among the different types of microwave plasma torches, the axial injection torch (TIA) has been used for several years to create chemically active species, in applications such as gas analysis, surface processing and gaseous waste treatments. The TIA allows the coupling of microwave energy (2.45 GHz) to a gas injected axially at the nozzle’s exit. The TIA produces non-local thermodynamic equilibrium plasmas with a high luminosity and a maximum density of charged particles at the nozzle’s exit. The present work is dedicated to study the plasma created by a TIA, running at atmospheric pressure. The study involves both experiment and modeling of this torch, in order to maximize the coupling between the microwave power and the plasma and to define the optimum plasma and flow operating conditions for plasma-to-gas heat transfer.
