TREATMENT OF METALS, POLYMER FILMS, AND FABRICS WITHA ONE ATMOSPHERE UNIFORM GLOW DISCHARGE PLASMA(OAUGDP) FOR INCREASED SURFACE ENERGY AND DIRECTIONAL ETCHING

Direct exposure of samples to the active species of air generated by a One Atmosphere Uniform Glow Discharge Plasma (OAUGDP) has been used to etch and to increase the surface energy of metallic surfaces, photoresist, polymer films, and nonwoven fab- rics. The OAUGDP is a non-thermal plasma with the classical characteristics of a DC normal glow discharge that operates in air (and other gases) at atmospheric pres- sure. Neither a vacuum system nor batch processing is necessary. A wide range of applications to metals, photoresist, films, fabrics, and polymeric webs can be accom- modated by direct exposure of the workpiece to the plasma in parallel-plate reactors. This technolopy is simple, it produces effects that can be obtained in no other way at one atmosphere; it generates minimal pollutants or unwanted by-products; and it is suitable for individual sample or online treatment of metallic surfaces, wafers, films, and fabrics. Early exposures of solid materials to the OAUGDP required minutes to produce rela- tively small increases of surface energy. These durations appeared too long for com- mercial application to fast-moving webs. Recent improvements in OAUGDP gas com- position, power density, plasma quality, recireulating gas flow, and impedance match- ing of the power supply to the parallel plate plasma reactor have made it possible to raise the surface energy of a variety of polymeric webs (PP, PET PE etc.) to levels of 60 to 70 dynes/cm with one second of exposure. In air plasmas, the high surface ener- gies are not durable, and fall to 50 dynes/cm after periods of weeks to months. Here, we report the exposure of metallic surfaces, photoresist, polymeric films, and nonwo- ven fabrics made of PP and PET to an impedance matched parallel plate OAUGDP for durations ranging from one second to several tens of seconds. Data will be re- ported on the surface energy, wettability, wickability, and aging effect of polymeric films and fabrics as functions of time of exposure, and time after exposure; the rate and uniformity of photoresist etching; and the production of sub-micron structures by OAUGDP etching at one atmosphere.

Characterizing uniform discharge in atmospheric helium by numerical modelling

One-dimensional fluid model of dielectric barrier discharge （DBD） in helium at atmospheric pressure was established and the discharge was numerically simulated. It was found that not only the spatial distributions of the internal parameters such as the electric field, the electron density and ion density are similar to those in a low-pressure glow discharge, but also the visually apparent attribute （light emission） is exactly the same as the observable feature of a low-pressure glow discharge. This confirms that the uniform DBD in atmospheric helium is a glow type discharge. The fact that the thickness of the cathode fall layer is about 0.5 mm, much longer than that of a normal glow discharge in helium at atmospheric pressure, indicates the discharge being a sub-normal glow discharge close to normal one. The multipulse phenomenon was reproduced in the simulation and a much less complicated explanation for this phenomenon was given.

Surface Treatment of Polyethylene Terephthalate Film Using Atmospheric Pressure Glow Discharge in Air

Non-thermal plasmas under atmospheric pressure are of great interest in polymer surface processing because of their convenience, effectiveness and low cost. In this paper, the treatment of Polyethylene terephthalate (PET) film surface for improving hydrophilicity using the non-thermal plasma generated by atmospheric pressure glow discharge (APGD) in air is conducted. The discharge characteristics of APGD are shown by measurement of their electrical discharge parameters and observation of light-emission phenomena, and the surface properties of PET before and after the APGD treatment are studied using contact angle measurement, x-ray photoelectron spectroscopy (XPS) and scanning electron microscopy (SEM). It is found that the APGD is homogeneous and stable in the whole gas gap, which differs from the commonly filamentary dielectric barrier discharge (DBD). A short time (several seconds) APGD treatment can modify the surface characteristics of PET film markedly and uniformly. After 10 s APGD treatment, the

Ni/MgO catalyst prepared using atmospheric high-frequency discharge plasma for CO_2 reforming of methane

A new type of Ni/MgO catalyst was prepared using atmospheric high-frequency discharge cold plasma. The influences of conventional method, plasma method, and plasma plus calcination method on the catalytic activity were studied and the CO2 reforming of methane was chosen as the probe reaction. The catalysts were characterized by X-ray diffraction （XRD）, transmission electron microscope （TEM）, X-ray photoelectron spectroscopy, and CO2 temperature-programmed surface reaction techniques. The results suggested that the nickel-based catalyst prepared by plasma plus calcination method possessed a smaller particle size and a higher dispersion of active component, better low-temperature activity and enhanced anti-coking ability. The conversion of CO2 and CH4 was 90.70% and 89.37%, respectively, and the reaction lasted for 36 h without obvious deactivation under 101.325 kPa and 750°C with CO2/CH4 = 1/1.

Kinetics Characteristics and Bremsstrahlung of Argon DC Discharge Under Atmospheric Pressure

An improved self-consistent, multi-component, and one-dimensional plasma model for simulating atmospheric pressure argon glow discharge is presented. In the model, both the plasma hydrodynamics model and chemical model are considered. The numerical simulation is carried out for parallel-plate geometry with a separation of 0.06 cm. The results show that Ar＊ plays a major role in the discharge, which is mainly produced by ground state excitation reaction. The electron temperature reaches its maximum in the cathode sheath but maintains a low value （0.23 eV） in bulk plasma. Elastic collision is the dominant volumetric electron energy loss in atmosphere argon glow discharge, which is negligible in low pressure argon glow discharge. The metastable step-wise ionization is the main mechanism for electron production to sustain the discharge. However, the highest contribution to electron production rate is ground state ionization reaction. The bremsstrahlung power density is related to electric voltage. With the increase of the electric voltage, the bremsstrahlung power density increases, namely, the strength of ultraviolet radiation spectrum enhances in the cathode sheath.

Experimental Study on Surface Dielectric Barrier Discharge Plasma Actuator with Different Encapsulated Electrode Widths for Airflow Control at Atmospheric Pressure

The surface dielectric barrier discharge （SDBD） plasma actuator has shown great promise as an aerodynamic flow control device. In this paper, the encapsulated electrode width of a SDBD actuator is changed to study the airflow acceleration behavior. The effects of encapsulated electrode width on the actuator performance are experimentally investigated by measuring the dielectric layer surface potential, time-averaged ionic wind velocity and thrust force. Experimental results show that the airflow velocity and thrust force increase with the encapsulated electrode width. The results can be attributed to the distinct plasma distribution at different encapsulated electrode widths.

Numerical studies of atmospheric pressure glow discharge controlled by a dielectric barrier between two coaxial electrodes

The glow discharge in pure helium at atmospheric pressure, controlled by a dielectric barrier between coaxial electrodes, is investigated based on a one-dimensional self-consistent fluid model. By solving the continuity equations for electrons, ions, and excited atoms, with the current conservation equation and the electric field profile, the time evolution of the discharge current, gas voltage and the surface density of charged particles on the dielectric barrier are calculated. The simulation results show that the peak values of the discharge current, gas voltage and electric field in the first half period are asymmetric to the second half. When the current reaches its positive or negative maximum, the electric field profile, and the electron and ion densities represent similar properties to the typical glow discharge at low pressures. Obviously there exist a cathode fall, a negative glow region, and a positive column. Effects of the barrier position in between the two coaxial electrodes and the discharge gap width on discharge current characteristics are also analysed. The result indicates that, in the case when the dielectric covering the outer electrode only, the gas is punctured earlier during the former half period and later during the latter half period than other cases, also the current peak value is higher, and the difference of pulse width between the two half periods is more obvious. On reducing the gap width, the multiple current pulse discharge happens.

Characteristics of a Normal Glow Discharge Excited by DC Voltage in Atmospheric Pressure Air

Atmospheric pressure glow discharges were generated in an air gap between a needle cathode and a water anode. Through changing the ballast resistor and gas gap width between the electrodes, it has been found that the discharges are in normal glow regime judged from the currentvoltage characteristics and visualization of the discharges. Results indicate that the diameter of the positive column increases with increasing discharge current or increasing gap width. Optical emission spectroscopy is used to calculate the electron temperature and vibrational temperature. Both the electron temperature and the vibrational temperature increases with increasing discharge current or increasing gap width. Spatially resolved measurements show that the maxima of electron temperature and vibrational temperature appeared in the vicinity of the needle cathode.

The Role of Metastable Atoms in a Homogeneous Atmospheric Pressure Barrier Discharge in Helium

A one-dimensional fluid model for homogeneous atmospheric pressure barrier discharges in helium is presented by considering elementary processes of excitation and ionization including a metastable atom effect. Using this model we investigate the behaviours of the helium metastable atoms in discharges as well as their influence on the discharge characteristics. It is shown that the metastable atoms with a relatively high concentration during the discharge are mainly produced in the active phase of the discharge and dissolved in the off phase. It is also found that the metastable atom collisions can not only provide seed electrons for discharges but also influence the concentration of ions. A reduction of matestable atom density results in a drop in the charged particle densities and causes a qualitative change in the discharge patterns.

Atmospheric pressure gliding arc discharge plasma treatments for improving germination, growth and yield of wheat

Wheat （Triticum aestivum） seeds were treated with atmospheric pressure gliding arc discharge plasmas to investigate the effects on water absorption, seed germination rate, seedling growth and yield in wheat. The surface architectures and functionalities of the seeds were found to modify due to plasma treatments. 6 rain treatment was provided 95%-100% germination rate. For the treatment duration of 3 and 9 rain the growth activity, dry matter accumulation, leaves chlorophyll contents, longest spikes, number of spikes/spikelet and total soluble protein content in shoots were improved. The grain yield of wheat was increased ,--20% by 6 min treatment with H2O/O2 plasma with respect to control.

An Experimental Study on Atmospheric Pressure Glow Discharge in Different Gases

Usually, the electrical breakdown of dielectric barrier discharge (DBD) at atmo-spheric pressure leads to a filamentary non-homogeneous discharge. However, it is also possible to obtain a diffuse DBD in homogeneous form, called atmospheric pressure glow discharge (APGD). We obtained a uniform APGD in helium and in the mixture of argon with alcohol, and studied the electrical characteristics of helium APGD. It is found that the relationship between discharge current and source frequency is different depending on the difference in gas gap when the applied voltage is kept constant. The discharge current shows an increasing trend with the increased frequency when gas gap is 0.8 cm, but the discharge current tends to decrease with the increased frequency when the gas gap increases. The discharge current always increases with the increased applied voltage when the source frequency is kept constant. We also observed a glow-like discharge in nitrogen at atmospheric pressure.

A Simple Model for the Calculation of Plasma Impedance in Atmospheric Radio Frequency Discharges

In atmospheric radio-frequency （rf） discharges, the plasma parameters, such as electron density, sheath thickness and sheath voltage, are not easy to be probed experimentally, while the electrical characteristics, such as impedance, resistance and reactance, are relatively convenient to be measured. In this paper we presented a simple theoretical model derived from the fluid description of generated plasmas without considering the circuit model, to investigate the relationship between the plasma impedance and plasma parameters. By introducing a relaxation frequency, the plasma impedance could be predicted by formulas presented in this study, and the mean electron density and sheath thickness can also be calculated from the measured or simulated impedance and reactance, respectively.

Generation of reactive species in atmospheric pressure dielectric barrier discharge with liquid water

Atmospheric pressure helium/water dielectric barrier discharge（DBD） plasma is used to investigate the generation of reactive species in a gas–liquid interface and in a liquid. The emission intensity of the reactive species is measured by optical emission spectroscopy（OES）with different discharge powers at the gas–liquid interface. Spectrophotometry is used to analyze the reactive species induced by the plasma in the liquid. The concentration of OH radicals reaches 2.2 μm after 3 min of discharge treatment. In addition, the concentration of primary longlived reactive species such as H;O;, NO;and O;are measured based on plasma treatment time.After 5 min of discharge treatment, the concentration of H;O;, NO;, and O;increased from 0 mg?·?L;to 96 mg?·?L;, 19.5 mg?·?L;, and 3.5 mg?·?L;, respectively. The water treated by plasma still contained a considerable concentration of reactive species after 6 h of storage. The results will contribute to optimizing the DBD plasma system for biological decontamination.

Numerical study on the discharge characteristics and nonlinear behaviors of atmospheric pressure coaxial electrode dielectric barrier discharges

The discharge characteristics and temporal nonlinear behaviors of the atmospheric pressure coaxial electrode dielectric barrier discharges are studied by using a one-dimensional fluid model. It is shown that the discharge is always asymmetrical between the positive pulses and negative pulses. The gas gap severely affects this asymmetry. But it is hard to acquire a symmetrical discharge by changing the gas gap. This asymmetry is proportional to the asymmetric extent of electrode structure, namely the ratio of the outer electrode radius to the inner electrode radius. When this ratio is close to unity, a symmetrical discharge can be obtained. With the increase of frequency, the discharge can exhibit a series of nonlinear behaviors such as period-doubling bifurcation, secondary bifurcation and chaotic phenomena. In the period-doubling bifurcation sequence the period-n discharge becomes more and more unstable with the increase of n. The period-doubling bifurcation can also be obtained by altering the discharge gas gap. The mechanisms of two bifurcations are further studied.It is found that the residual quasineutral plasma from the previous discharges and corresponding electric field distribution can weaken the subsequent discharge, and leads to the occurrence of bifurcation.

Surface modification of polytetrafluoroethylene film using single liquid electrode atmospheric-pressure glow discharge

Polytetrafluoroethylene films are treated by room temperature helium atmospheric pressure plasma plumes, which are generated with a home-made single liquid electrode plasma device. After plasma treatment, the water contact angle of polytetrafiuoroethylene fihn drops from 114° to 46° and the surface free energy increases from 22.0 mJ/m2 to 59.1 mJ/m2. The optical emission spectrum indicates that there are reactive species such as O2＋, O and He in the plasma plume. After plasma treatment, a highly crosslinking structure is formed on the fihn surface and the oxygen element is incorporated into the film surface in the forms of C O-C-, -C=O, and O C=O groups. Over a period of 10 days, the contact angle of the treated film is recovered by only about 10°, which indicates that the plasma surface modification is stable with time.

Various concentric-ring patterns formed in a water-anode glow discharge operated at atmospheric pressure

Pattern formation is a very interesting phenomenon formed above a water anode in atmospheric pressure glow discharge.Up to now,concentric-ring patterns only less than four rings have been observed in experiments.In this work,atmospheric pressure glow discharge above a water anode is conducted to produce diversified concentric-ring patterns.Results indicate that as time elapses,the number of concentric rings increases continuously and up to five rings have been found in the concentric-ring patterns.Moreover,the ring number increases continuously with increasing discharge current.The electrical conductivity of the anode plays an important role in the transition of the concentric patterns due to its positive relation with ionic strength.Hence,the electrical conductivity of the water anode is investigated as a function of time and discharge current.From optical emission spectrum,gas temperature and intensity ratio related with density and temperature of electron have been calculated.The various concentric-ring patterns mentioned above have been simulated at last with an autocatalytic reaction model.

Operation Mode on Pulse Modulation in Atmospheric Radio Frequency Glow Discharges

The discharge operation regime of pulse modulated atmospheric radio frequency （RF） glow discharge in helium is investigated on the duty cycle and frequency of modulation pulses. The characteristics of radio frequency discharge burst in terms of breakdown voltage, alpha（s）- gamma（γ） mode transition voltage and current are demonstrated by the discharge current voltage characteristics. The minimum breakdown voltage of RF discharge burst was obtained at the duty cycle of 20% and frequency of 400 kHz, respectively. The α-γ mode transition of RF discharge burst occurs at higher voltage and current by reducing the duty cycle and elevating the modulation frequency before the RF discharge burst evolving into the ignition phase, in which the RF discharge burst can operate stably in the γ mode. It proposes that the intensity and stability of RF discharge burst can be improved by manipulating the duty cycle and modulation frequency in pulse modulated atmospheric RF glow discharge.

Numerical study on the gas heating mechanism in pulse-modulated radio-frequency glow discharge

The gas heating mechanism in the pulse-modulated radio-frequency （rf） discharge at atmospheric pressure was inves- tigated with a one-dimensional two-temperature fluid model. Firstly, the spatiotemporal profiles of the gas temperature （Tg） in both consistent rf discharge and pulse-modulated rf discharge were compared. The results indicated that Tg decreases considerably with the pulse-modulated power, and the elastic collision mechanism plays a more important role in the gas heating change. Secondly, the influences of the duty cycle on the discharge parameters, especially on the Tg, were studied. It was found that Tg decreases almost linearly with the reduction of the duty cycle, and there exists one ideal value of the duty cycle, by which both the Tg can be adjusted and the glow mode can be sustained. Thirdly, the discharge mode changing from αto γ mode in the pulse-modulated rf discharge was investigated, the spatial distributions of Tg in the two modes show different features and the ion Joule heating is more important during the mode transition.

Investigation of NO removal using a pulseassisted RF discharge

In this paper,removal of nitrogen oxide（NO） is investigated in capacitive atmospheric pressure discharges driven by both radio-frequency（RF） and trapezoidal pulsed power with a onedimensional self-consistent fluid model.The results show that the number density of NO could be reduced significantly once a short pulse of low duty ratio is additionally applied to the RF power.It is found that the process of NO removal by the pulse-modulated RF discharge could be divided into three stages：the quick reaction stage,the NO removal stage,and the sustaining stage.Furthermore,the temporal evolution of particle densities is analyzed,and the key reactions in each stage are discovered.Finally,the influence on the removal efficiency of the voltage amplitude of the pulse and the RF voltage amplitude is investigated.

Study on Glow Discharge Plasma Used in Polyester Surface Modification

To achieve an atmospheric pressure glow discharge（APGD）in air and modify the surface of polyester thread using plasma,the electric field distribution and discharge characteristics under different conditions were studied.We found that the region with a strong electric field,which was formed in a tiny gap between two electrodes constituting a line-line contact electrode structure,provided the initial electron for the entire discharge process.Thus,the discharge voltage was reduced.The dielectric barrier of the line-line contact electrodes can inhibit the generation of secondary electrons.Thus,the transient current pulse discharge was reduced significantly,and an APGD in air was achieved.We designed double layer line-line contact electrodes,which can generate the APGD on the surface of a material under treatment directly.A noticeable change in the surface morphology of polyester fiber was visualized with the aid of a scanning electron microscope（SEM）.Two electrode structures-the multi-row line-line and double-helix line-line contact electrodes-were designed.A large area of the APGD plasma with flat and curved surfaces can be formed in air using these contact electrodes.This can improve the efficiency of surface treatment and is significant for the application of the APGD plasma in industries.