Nano-Coating Process for Si [1 0 0] Wafer Using Atmospheric Pressure Plasma Jet (APPJ)

Three-electrode plasma jet system consisting of a perforated dielectric tube with two outer and one floating inner electrodes was developed and employed for nano-coating processes of Si [1 0 0] wafer. Lowered gas breakdown voltage, increasing plasma density and increased discharge current were achieved by using the floating inner electrode. The low temperature (Nonthermal) Atmospheric Pressure Plasma protective coating technique using precursor-containing gases (Ar, O2 and OMCTS mixture) which injected into Plasma Jet (APPJ), there are several techniques are introduced here to avoid substrate damage including increasing plasma density without increasing the kinetic energy of the ion bombardment. Furthermore some few precautions are given here to insure good media for silicon wafer prepared for coating.

Two-dimensional numerical study of an atmospheric pressure helium plasma jet with dual-power electrode

In this paper, the characteristics of an atmospheric pressure helium plasma jet generated by a dual-power electrode （DPE） configuration are investigated by using a two-dimensional fluid model. The effect of a needle electrode on the discharge is studied by comparing the results of the DPE configuration with those of the single ring electrode configuration. It is found that the existence of the needle leads to the generation of a helium plasma jet with a higher propagation velocity, higher species density, and larger discharge width. Furthermore, the influences of the needle radius and needle-to-ring discharge gap on the generation of a plasma jet are also studied. The simulation results indicate that the needle electrode has an evident influence on the plasma jet characteristics.

Bacteria Inactivation Using DBD Plasma Jet in Atmospheric Pressure Argon

A coaxial dielectric barrier discharge plasma jet was designed, which can be operated in atmospheric pressure argon under an intermediate frequency sinusoidal resonant power supply, and an atmospheric pressure glow-like discharge was achieved. Two kinds of typical bacteria, i.e., the Staphylococcus aureus （S. aureus） and Escherichia coil （E. coil）, were employed to study the bacterial inactivation mechanism by means of the non-thermal plasma. The killing log value （KLV） of S. aureus reached up to 5.38 with a treatment time of 90 s and that of E. coil up to 5.36 with 60 s, respectively. According to the argon emission spectra of the plasma jet and the scanning electron microscope （SEM） images of the two bacteria before and after the plasma treatment, it is concluded that the reactive species in the argon plasma played a major role in the bacterial inactivation, while the heat, electric field and UV photons had little effect.

Study on an Atmospheric Pressure Plasma Jet and its Application in Etching Photo-Resistant Materials

An atmospheric pressure radio-frequency plasma jet that can eject cold plasma has been developed. In this paper, the configuration of this type of plasma jet is illustrated and its discharge characteristics curves are studied with a current and a voltage probe. A thermal couple is used to measure the temperature distribution along the axis of the jet stream. The temperature distribution curve is generated for the He/O-2 jet stream at the discharge power of 150 W. This jet can etch the photo-resistant material at an average rate of 100 nm/min on the surface of silicon wafers at a right angle.

Atmospheric Pressure Plasma Jet in Ar and O_2/Ar Mixtures:Properties and High Performance for Surface Cleaning

An atmospheric pressure plasma jet generated in Ar and O2/Ar mixtures has been investigated by specially designed equipment with double power electrodes at 20~32 kHz, and their effects on the cleaning of surfaces have been studied. Properties of the jet discharge are studied by electrical diagnostics, including the waveform of discharge voltage, discharge current and the Q-V Lissajous figures. The optical emission spectroscopy is used to measure the plasma parameters, such as the excitation temperature and the gas temperature. It is found that the consumed power and the excitation temperature increase with increase of the discharge frequency. On the other hand, at the same discharge frequency, these parameters in O2/Ar mixture plasma are found to be much larger. The effect on surface cleaning is studied from the changes in the contact angle. For Ar plasma jet, the contact angle decreases with increase of the discharge frequency. For O2/Ar mixture plasma jet, the contact angle decreases with increase of discharge frequency up to 26 kHz, however, further increase of discharge frequency does not show further decrease in the contact angle. At the same discharge frequency, the contact angle after O2/Ar mixture plasma cleaning is found to be much lower compared to the case of pure Ar. From the results of quadrupole mass-spectrum analysis, we can identify more fragment molecules of CO and H2O in the emitted gases after O2/Ar plasma jet treatment compared with Ar plasma jet treatment, which are produced by the decomposition of surface organic contaminants during the cleaning process.

Comparison of Sterilizing Effect of Nonequilibrium Atmospheric-Pressure He/O_2 and Ar/O_2 Plasma Jets

The sterilizing effect of the non-equilibrium atmospheric pressure plasma jet by applying it to the Bacillus subtilis spores is invesigated. A stable glow discharge in argon or helium gas fed with active gas （oxygen）, was generated in the coaxial cylindrical reactor powered by the radio-frequency power supply at atmospheric pressure. The experimental results indicated that the efficiency of killing spores by making use of an Ar/O2 plasma jet was much better than with a He/O2 plasma jet. The decimal reduction value of Ar/O2 and He/O2 plasma jets under the same experimental conditions was 4.5 seconds and 125 seconds, respectively. It was found that there exists an optimum oxygen concentration for a certain input power, at which the sterilization efficiency reaches a maximum value. It is believed that the oxygen radicals are generated most efficiently under this optimum condition.

Development of a new atmospheric pressure cold plasma jet generator and application in sterilization

This paper reports that a new plasma generator at atmospheric pressure, which is composed of two homocentric cylindrical all-metal tubes, successfully generates a cold plasma jet. The inside tube electrode is connected to ground, the outside tube electrode is connected to a high-voltage power supply, and a dielectric layer is covered on the outside tube electrode. When the reactor is operated by low-frequency （6 kHz-20 kHz） AC supply in atmospheric pressure and argon is steadily fed as a discharge gas through inside tube electrode, a cold plasma jet is blown out into air and the plasma gas temperature is only 25-30℃. The electric character of the discharge is studied by using digital real-time oscilloscope （TDS 200-Series）, and the discharge is capacitive. Preliminary results are presented on the decontamination of E.colis bacteria and Bacillus subtilis bacteria by this plasma jet, and an optical emission analysis of the plasma jet is presented in this paper. The ozone concentration generated by the plasma jet is 1.0× 10^16cm^-3 which is acquired by using the ultraviolet absorption spectroscopy.

Surface Decontamination of Chemical Agent Surrogates Using an Atmospheric Pressure Air Flow Plasma Jet

An atmospheric pressure dielectric barrier discharge （DBD） plasma jet generator using air flow as the feedstock gas was applied to decontaminate the chemical agent surrogates on the surface of aluminum, stainless steel or iron plate painted with alkyd or PVC. The experi- mental results of material decontamination show that the residual chemical agent on the material is lower than the permissible value of the National Military Standard of China. In order to test the corrosion effect of the plasma jet on different material surfaces in the decontamination pro-cess, corrosion tests for the materials of polymethyl methacrylate, neoprene, polyvinyl chloride （PVC）, polyethylene （PE）, phenolic resin, iron plate painted with alkyd, stainless steel, aluminum, etc. were carried out, and relevant parameters were examined, including etiolation index, chroma- tism, loss of gloss, corrosion form, etc. The results show that the plasma jet is slightly corrosive for part of the materials, but their performances are not affected. A portable calculator, computer display, mainboard, circuit board of radiogram, and a hygrometer could work normally after being treated by the plasma jet.

The interaction of an atmospheric pressure plasma jet using argon or argon plus hydrogen peroxide vapour addition with bacillus subtilis

This paper reports that an atmospheric pressure dielectric barrier discharge plasma jet, which uses argon or argon ＋ hydrogen peroxide vapour as the working gas, is designed to sterilize the bacillus subtilis. Compared with the pure argon plasma, the bacterial inactivation efficacy has a significant improvement when hydrogen peroxide vapour is added into the plasma jet. In order to determine which factors play the main role in inactivation, several methods are used, such as determination of optical emission spectra, high temperature dry air treatment, protein leakage quantification, and scanning electron microscope. These results indicate that the possible inactivation mechanisms are the synergistic actions of chemically active species and charged species.

Influence of Additive Gas on Electrical and Optical Characteristics of Non-equilibrium Atmospheric Pressure Argon Plasma Jet

Electrical and optical properties of an argon plasma jet were characterized. In particular, effects of an additive gas, namely nitrogen or oxygen, on these properties were studied in detail. The plasma jet was found to be of a glow-like discharge, which scarcely changed upon the injection of an additive gas, either directly or through a glass capillary. Optical emission spectroscopy characterization revealed that excited argon atoms were the predominant active species in this plasma jet. Metastable argon atoms were highly quenched, and N2（C3yIu） became the main energy carrier following nitrogen injection. When oxygen was added to the afterglow zone through a glass capillary, no significant quenching effect was observed and the number of oxygen atoms decreased with the increase in oxygen concentration. Finally, to demonstrate an application of this plasma jet, a high-density polyethylene surface was treated with argon, argon/nitrogen, and argon/oxygen plasmas.

Numerical study of the effect of water content on OH production in a pulsed-dc atmospheric pressure helium–air plasma jet

A numerical study of the effect of water content on OH production in a pulsed-dc atmospheric pressure helium-air plasma jet is presented. The generation and loss mechanisms of the OH radicals in a positive half-cycle of the applied voltage are studied and discussed. It is found that the peak OH density increases with water content in air （varying from 0% to 1%） and reaches 6.3 x 10^18 m-3 when the water content is 1%. Besides, as the water content increases from 0.01% to 1%, the space-averaged reaction rate of three-body recombination increases dramatically and is comparable to those of main OH generation reactions.

An Indirect Method for Measuring Electron Density of Atmospheric Pressure Plasma Jets

An indirect method for measuring the electron density of radio frequency atmospheric pressure plasma jets （RF-APPJ） based on the discharge voltage and current waveforms is presented. An equivalent circuit of the plasma discharge is assumed by taking into account the electrode capacitance, serial resistance and inductance of the bulk plasma, as well as the sheath impedance. Based on the circuit model, the electron density can be obtained according to Ohm＇s law. By using this method, the effects of the electrode shape and discharge gap on the electron density are discussed.

Characteristics of a kHz helium atmospheric pressure plasma jet interacting with two kinds of targets

This study investigates the influence of two types of target,skin tissue and cell culture medium,with different permittivities on a k Hz helium atmospheric pressure plasma jet(APPJ)during its application for wound healing.The basic optical-electrical characteristics,the initiation and propagation and the emission spectra of the He APPJ under different working conditions are explored.The experimental results show that,compared with a jet freely expanding in air,the diameter and intensity of the plasma plume outside the nozzle increase when it interacts with the pigskin and cell culture medium targets,and the mean velocity of the plasma bullet from the tube nozzle to a distance of 15 mm is also significantly increased.There are also multiple increases in the relative intensity of OH(A^(2)Σ→X^(2)Π)and O(3p^(5)S-3s^(5)S)at a position 15 mm away from nozzle when the He APPJ interacts with cell culture medium compared with the air and pigskin targets.Taking the surface charging of the low permittivity material capacitance and the strengthened electric field intensity into account,they make the various characteristics of He APPJ interacting with two different targets together.

Study of generation characteristics of glow-type atmospheric-pressure plasma jet based on DC discharge in air

In order to form an atmospheric-pressure plasma jet without airflow, a needle–ring electrode structure is proposed in this paper. When heteropolar potentials are applied to a needle and a ring, a marked electric field strength enhancement around the needle’s pointed end has been found. When the same potential is applied to both the needle and the ring, the lateral electric field strength for the needle can be weakened. By using the above two methods, an increase of the difference between the pointed end electric field strength and the lateral one is achieved and stable plasma jets are formed. A symmetrical space electric field distribution is established at the pointed end of the needles when several sets of heteropolar needle–ring electrodes are uniformly arranged, which is conducive to forming a uniform array plasma jet. Under DC discharge conditions, a safe and stable plasma jet of high density and an array plasma jet are successfully achieved.

Investigation of paint removal by atmospheric pressure plasma jet

Acrylic polyurethane paint on the surface of 2A12 Al alloy was cleaned utilizing an atmospheric pressure plasma jet in this work.The dynamic evolution of the paint removal process during plasma treatment with time was explored through analysis of morphology and chemical states.The results showed that although the thickness of paint could be reduced effectively with an increase in cleaning time,the removal rate of paint gradually decreased with time.During the initial cleaning process range,its original smooth morphology of paint turned rugged quickly and was almost unchanged with further plasma treatment.Element and chemical state analysis showed that the content of C in the paint layer decreased obviously after plasma treatment.In contrast,the O content increased remarkably.The cleaning mechanism could be mainly attributed to the reaction between active O-containing species in air plasma and organic components in the paint.After removal of superficial organic matter,residue inorganic metal oxide substances aggregated on the base.The exposed metal oxides on the one hand elevated the superficial O content,but on the other hand hindered further plasma penetration,resulting in a gradual decrease in cleaning rate with cleaning time.Therefore,physical wiping was proposed to be incorporated with the plasma method and effective removal of paint was realized.

Cleaning of nitrogen-containing carbon contamination by atmospheric pressure plasma jet

Atmospheric pressure plasma jet(APPJ)was used to clean nitrogen-containing carbon films(C–N)fabricated by plasma-assisted chemical vapor deposition method employing the plasma surface interaction linear device at Sichuan University(SCU-PSI).The properties of the contaminated films on the surface of pristine and He-plasma pre-irradiated tungsten matrix,such as morphology,crystalline structure,element composition and chemical structure were characterized by scanning electron microscopy,grazing incidence x-ray diffraction and x-ray photoelectron spectroscopy.The experimental results revealed that the removal of C–N film with a thickness of tens of microns can be realized through APPJ cleaning regardless of the morphology of the substrates.Similar removal rates of 16.82 and 13.78μm min^(-1)were obtained for C–N films deposited on a smooth pristine W surface and rough fuzz-covered W surface,respectively.This is a remarkable improvement in comparison to the traditional cleaning method.However,slight surface oxidation was found after APPJ cleaning,but the degree of oxidation was acceptable with an oxidation depth increase of only 3.15 nm.Optical emission spectroscopy analysis and mass spectrometry analysis showed that C–N contamination was mainly removed through chemical reaction with reactive oxygen species during APPJ treatment using air as the working gas.These results make APPJ cleaning a potentially effective method for the rapid removal of C–N films from the wall surfaces of fusion devices.

Comparison of Formation Mechanism Between Helium and Argon Atmospheric Pressure Plasma Jets

To compare the formation mechanisms of He and Ar atmospheric pressure plasma jets(APPJs),an intensified charge-coupled device(ICCD)are utilized to observe the dynamic process of APPJ.The experimental results show that,He APPJ is first ignited,which is independent of the dielectric barrier discharge(DBD)between the two wrapped electrodes when the high voltage placed at the downstream.The intensity and APPJ length under positive discharge pulses are bigger than that under negative discharge pulses due to the space charge effect.The He APPJ is formed by the DBD development when the high-voltage electrode placed at the upstream side of tube.However,the plasma plume in Ar APPJ is formed by the propagation of DBD whatever the high-voltage electrode is arranged on upstream or downstream side of ground electrode.The difference in formation mechanism between He and Ar APPJs is mainly caused by the gas properties.Moreover,during the discharges,Ar tends to lead to thermal instability and electron Maxwellian instability.

Spectral Diagnosis of Gas Temperature of Atmospheric Pressure Plasma Jet in Helium

For atmospheric pressure plasma jets(APPJ),the gas temperature is essential for their applications.A spectral diagnosis of APPJ’s gas temperature is conducted in this work.The optical emission spectra of helium APPJ are captured by using an optical spectrometer system.Then,the grating secondary spectrum of OH(A2∑+(ν=0)→X2П(ν=0))are used to diagnose the gas temperature of plasmas because the spectrum has excellent resolution.Meanwhile,the vibrational temperatures are estimated by using the vibration sequence of N2band(SPS,the second positive system).On the basis of the method,some important conclusions were obtained.First,the spectral identifying indicates that the grating primary spectrum covers a whole wavelength range from 200 nm to 900 nm,and that the grating secondary spectrum overlaps with the primary spectrum from 400 nm to 900 nm.Second,the gas temperature(about 320 K)is close to the room temperature,while the vibrational temperature of the N2(SPS)is about 5 000 K.The trend of the two temperatures changing with the applied voltage is discussed in the end.

Sterilization of mycete attached on the unearthed silk fabrics by an atmospheric pressure plasma jet

The sterilization of the simulated unearthed silk fabrics using an atmospheric pressure plasma jet（APPJ） system employing Ar/O2 or He/O2 plasma to inactivate the mycete attached on the silk fabrics is reported. The effects of the APPJ characteristics（particularly the gas type and discharge power） on the fabric strength, physical-chemical structures,and sterilizing efficiency were investigated. Experimental results showed that the Ar/O2 APPJ plasma can inactivate the mycete completely within 4.0 min under a discharge power of 50.0 W. Such an APPJ treatment had negligible impact on the mechanical strength of the fabric and the surface chemical characteristics. Moreover, the Ar ions, O and OH radicals were shown to play important roles on the sterilization of the mycete attached on the unearthed silk fabrics.

The Effects of Gas Composition on the Atmospheric Pressure Plasma Jet Modification of Polyethylene Films

Polyethylene （PE） films are treated using an atmospheric pressure plasma jet （APPJ） with He or He/O2 gas for different periods of time. The influence of gas type on the plasma polymer interactions is studied. The surface contact angle of the PE film can be effectively lowered to 58° after 20 s of He/O2 plasma treatment and then remains almost unchanged for longer treatment durations, while, for He plasma treatment, the film surface contact angle drops gradually to 47° when the time reaches 120 s. Atomic force microscopy （AFM） results show that the root mean square （RMS） roughness was significantly higher for the He/O2 plasma treated samples than for the He plasma treated counterparts, and the surface topography of the He/O2 plasma treated PE films displays evenly distributed dome-shaped small protuberances. Chemical composition analysis reveals that the He plasma treated samples have a higher oxygen content but a clearly lower percentage of COO than the comparable He/O2 treated samples, suggesting that differences exist in the mode of incorporating oxygen between the two gas condition plasma treatments. Electron spin resonance （ESR） results show that the free radical concentrations of the He plasma treated samples were clearly higher than those of the He/O2 plasma treated ones with other conditions unchanged.