Structured mirror array for two-dimensional collimation of a chromium beam in atom lithography

Direct-write atom lithography,one of the potential nanofabrication techniques,is restricted by some difficulties in producing optical masks for the deposition of complex structures.In order to make further progress,a structured mirror array is developed to transversely collimate the chromium atomic beam in two dimensions.The best collimation is obtained when the laser red detunes by natural line-width of transition 7S3 → 7P40 of the chromium atom.The collimation ratio is 0.45 vertically（in x axis）,and it is 0.55 horizontally（in y axis）.The theoretical model is also simulated,and success of our structured mirror array is achieved.

Scanning and Splicing Atom Lithography for Self-traceable Nanograting Fabrication

Atom lithography is a unique method to fabricate self-traceable pitch standards and angle standards,but extending its structure area to millimeter-level for application is challenging.In this paper,on the one hand,we put forward a new approach to fabricate a full-covered self-traceable Cr nanograting by inserting and scanning a Dove prism in the Gaussian beam direction of atom lithography.On the other hand,we extend the structure area along the standing-wave direction by splicing two-step atom deposition.Both nanostructures manufactured via scanning atom lithography and splicing atom lithography demonstrate good pitch accuracy,parallelism,continuity,and homogeneity,which opens a new way to fabricate centimeter-level full-covered self-traceable nanograting and lays the basis for the application of square ruler and optical encoders at the nanoscale.

Simulation research on surface growth process of positive and negative frequency detuning chromium atom lithographic gratings

Chromium atom photolithography gratings are a promising technology for the development of nanoscale length standard substances due to their high accuracy,uniformity,and consistency.However,the inherent difference between the interaction of positive and negative frequency detuning standing wave field and the atoms can cause a difference in the adjacent peak-to-valley heights of the grating in positive and negative frequency detuning chromium atom lithography,which greatly reduces its accuracy.In this study,we performed a controlled variable growth simulation using the semi-classical theoretical model and Monte Carlo method with trajectory tracking and ballistic deposition methods to investigate the influence of key experimental parameters on the surface growth process of positive and negative frequency detuning atomic lithography gratings.We established a theoretical model based on simulation results and summarized empirical equations to guide the selection of experimental parameters.Our simulations achieved uniform positive and negative frequency detuning atomic lithography gratings with a period of 1/4 of the wavelength corresponding to the atomic transition frequency,and adjacent peak-to-valley heights differing by no more than 2 nm,providing an important theoretical reference for the controllable fabrication of these gratings.

The influence of divergence angle on the deposition of neutral chromium atoms using a laser standing wave

The characteristics of neutral chromium atoms in the standing wave field are discussed. Based on a semi-classical model, the motion equation of neutral atoms in the laser standing wave field is analyzed, and the trajectories of the atoms are obtained by simulations with the different divergence angles of the atomic beam. The simulation results show that the full width at half maximum （FWHM） of the stripe is 2.75 nm and the contrast is 38.5 ： 1 when the divergence angle equals 0 mrad, the FWHM is 24.1 nm and the contrast is 6.8：1 when the divergence angle equals 0.2 mrad and the FWHMs are 58.6 and 137.8 nm, and the contrasts are 3.3 ： 1 and 1.6 ： i when the divergence angles equal 0.5 and 1.0 mrad, respectively.

Analysis of Cr atom focusing deposition properties in the double half Gaussian standing wave field

The use of the dipole force on atoms is a new technology that is used to build nanostructures. In this way, a high quality standard nano-grating can be obtained. Based on the semi-classical model, the motion equation is investigated and the trajectories of atoms in double half Gaussian standing wave field are simulated. Compared with the Gaussian standing wave field, the double half Gaussian standing wave can well focus the Cr atoms. In order to obtain this kind of beam, a prism is designed and the experimental result shows that the beam is well generated.

Fabrication and measurement of traceable pitch standard with a big area at trans-scale

Atom lithography with chromium can be utilized to fabricate a pitch standard, which is chrectly traceable to me wavelength of the laser standing waves. The result of a calibrated commercial AFM measurement demonstrates that the pitch standard is （212.8±0.1） nm with a peak-to-valley-height （PTVH） better than 20 nm. The measurement results show the high period accuracy of traceability with the standing laser wavelength （λ/2 = 212.78 nm）. The Cr nano-grating covers a 1000μm×500 μm area, with a PTVH better than 10 nm. The feature width broadening of the Cr nanostructure has been experimentally observed along the direction of the standing waves. The PTVH along the Gaussian laser direction is similar to a Gaussian distribution. Highly uniform periodic nanostructures with a big area at the millimeter scale, and the surface growth uniformity of the Cr nano-grating, show its great potential in the application of a traceable pitch standard at trans-scales.

Electrocondensation and Evaporation of Attoliter Water Droplets: Direct Visualization Using Atomic Force Microscopy

Working with a biased atomic force microscope(AFM)tip in the tapping mode under ambient atmosphere,attoliter(10^(-18) L)water droplet patterns have been generated on a patterned carbonaceous surface.This is essentially electrocondensation of water leading to charged droplets,as evidenced from electrostatic force microscopy measurements.The droplets are unusual in that they exhibit a highly corrugated surface and evaporate rather slowly,taking several tens of minutes.