Chip-sized alkali atom vapor cells with high hermeticity are successfully fabricated through deep silicon etching and two anodic bonding processes.A self-built absorption spectrum testing system is used to test the ab...Chip-sized alkali atom vapor cells with high hermeticity are successfully fabricated through deep silicon etching and two anodic bonding processes.A self-built absorption spectrum testing system is used to test the absorption spectra of the ru-bidium atoms in alkali atom vapor cells.The influence of silicon cavity size,filling amount of rubidium atoms and temperature on the absorption spectra of rubidium atom vapor in the atom vapor cells are studied in depth through a theoretical analysis.This study provides a reference for the design and preparation of high quality chip-sized atom vapor cells.展开更多
The physics package of a chip-scale atomic clock （CSAC） has been successfully realized by integrating vertical cavity surface emitting laser （VCSEL）, neutral density （ND） filter, λ/4 wave plate, 87Rb vapor cell...The physics package of a chip-scale atomic clock （CSAC） has been successfully realized by integrating vertical cavity surface emitting laser （VCSEL）, neutral density （ND） filter, λ/4 wave plate, 87Rb vapor cell, photodiode （PD）, and magnetic coil into a cuboid metal package with a volume of about 2.8 cm3. In this physics package, the critical component, 87Rb vapor cell, is batch-fabricated based on MEMS technology and in-situ chemical reaction method. Pt heater and thermistors are integrated in the physics package. A PTFE pillar is used to support the optical elements in the physics package, in order to reduce the power dissipation. The optical absorption spectrum of 87Rb D1 line and the microwave frequency correction signal are successfully observed while connecting the package with the servo circuit system. Using the above mentioned packaging solution, a CSAC with short-term frequency stability of about 7 × 10^-10τ-1/2 has been successfully achieved, which demonstrates that this physics package would become one promising solution for the CSAC.展开更多
Strong environmental dependence is an intractable problem for vapor cell clocks,for which the high-temperature sensitivity of the physics package is considered one of the dominant reasons.In this paper,we report the d...Strong environmental dependence is an intractable problem for vapor cell clocks,for which the high-temperature sensitivity of the physics package is considered one of the dominant reasons.In this paper,we report the design and realization of a low-temperature-sensitive physics package for vapor cell clocks.The physics package comprises three layers of magnetic shields,three layers of heating ovens,and the cavity-cell assembly.The cavity-cell assembly employs a compact magnetron-type cavity and a Rb vapor cell sealed with N2-Ar mixed buffer gas.The dependence of the clock frequency on temperature fluctuation is evaluated to be 2×10^(−11)/℃.In pursuit of the stable temperature,a three-stage temperature regulator is implemented on the physics package.It adopts a combination of open andclosed-loop control to address the problem of significant thermal coupling between the heating ovens.Under a laboratory environment,the measured Hadamard deviation of the temperature variation is 4×10^(−5)℃in 1 day of averaging.展开更多
文摘Chip-sized alkali atom vapor cells with high hermeticity are successfully fabricated through deep silicon etching and two anodic bonding processes.A self-built absorption spectrum testing system is used to test the absorption spectra of the ru-bidium atoms in alkali atom vapor cells.The influence of silicon cavity size,filling amount of rubidium atoms and temperature on the absorption spectra of rubidium atom vapor in the atom vapor cells are studied in depth through a theoretical analysis.This study provides a reference for the design and preparation of high quality chip-sized atom vapor cells.
基金supported by the Knowledge Innovation Project of Chinese Academy of Sciences(Grant No.KGCX2-YW-143)
文摘The physics package of a chip-scale atomic clock （CSAC） has been successfully realized by integrating vertical cavity surface emitting laser （VCSEL）, neutral density （ND） filter, λ/4 wave plate, 87Rb vapor cell, photodiode （PD）, and magnetic coil into a cuboid metal package with a volume of about 2.8 cm3. In this physics package, the critical component, 87Rb vapor cell, is batch-fabricated based on MEMS technology and in-situ chemical reaction method. Pt heater and thermistors are integrated in the physics package. A PTFE pillar is used to support the optical elements in the physics package, in order to reduce the power dissipation. The optical absorption spectrum of 87Rb D1 line and the microwave frequency correction signal are successfully observed while connecting the package with the servo circuit system. Using the above mentioned packaging solution, a CSAC with short-term frequency stability of about 7 × 10^-10τ-1/2 has been successfully achieved, which demonstrates that this physics package would become one promising solution for the CSAC.
基金the National Natural Science Foundation of China under Grant No.11703031,U1731132in part by the West Light Foundation of the Chinese Academy of Sciences under Grant No.XAB2017B04.
文摘Strong environmental dependence is an intractable problem for vapor cell clocks,for which the high-temperature sensitivity of the physics package is considered one of the dominant reasons.In this paper,we report the design and realization of a low-temperature-sensitive physics package for vapor cell clocks.The physics package comprises three layers of magnetic shields,three layers of heating ovens,and the cavity-cell assembly.The cavity-cell assembly employs a compact magnetron-type cavity and a Rb vapor cell sealed with N2-Ar mixed buffer gas.The dependence of the clock frequency on temperature fluctuation is evaluated to be 2×10^(−11)/℃.In pursuit of the stable temperature,a three-stage temperature regulator is implemented on the physics package.It adopts a combination of open andclosed-loop control to address the problem of significant thermal coupling between the heating ovens.Under a laboratory environment,the measured Hadamard deviation of the temperature variation is 4×10^(−5)℃in 1 day of averaging.
