Chip-sized alkali atom vapor cells with high hermeticity are successfully fabricated through deep silicon etching and two anodic bonding processes.A self-built absorption spectrum testing system is used to test the ab...Chip-sized alkali atom vapor cells with high hermeticity are successfully fabricated through deep silicon etching and two anodic bonding processes.A self-built absorption spectrum testing system is used to test the absorption spectra of the ru-bidium atoms in alkali atom vapor cells.The influence of silicon cavity size,filling amount of rubidium atoms and temperature on the absorption spectra of rubidium atom vapor in the atom vapor cells are studied in depth through a theoretical analysis.This study provides a reference for the design and preparation of high quality chip-sized atom vapor cells.展开更多
Existing microfabricated atomic vapor cells have only one optical channel,which is insufficient for supporting the multiple orthogonal beams required by atomic devices.In this study,we present a novel wafer-level manu...Existing microfabricated atomic vapor cells have only one optical channel,which is insufficient for supporting the multiple orthogonal beams required by atomic devices.In this study,we present a novel wafer-level manufacturing process for fabricating multi-optical-channel atomic vapor cells and an innovative method for batch processing the inner sidewalls of millimeter glass holes to meet optical channel requirements.Surface characterization and transmittance tests demonstrate that the processed inner sidewalls satisfy the criteria for an optical channel.In addition,the construction of an integrated processing platform enables multilayer non-isothermal anode bonding,the filling of inert gases,and the recovery and recycling of noble gases.Measurements of the absorption spectra and free-induction decay signals of xenon-129(^(129)Xe)and xenon-131(^(131)Xe)under different pump-probe schemes demonstrate the suitability of our vapor cell for use in atomic devices including atomic gyroscopes,dual-beam atomic magnetometers,and other optical/atomic devices.The proposed micromolding technology has broad application prospects in the field of optical-device processing.展开更多
Strong environmental dependence is an intractable problem for vapor cell clocks,for which the high-temperature sensitivity of the physics package is considered one of the dominant reasons.In this paper,we report the d...Strong environmental dependence is an intractable problem for vapor cell clocks,for which the high-temperature sensitivity of the physics package is considered one of the dominant reasons.In this paper,we report the design and realization of a low-temperature-sensitive physics package for vapor cell clocks.The physics package comprises three layers of magnetic shields,three layers of heating ovens,and the cavity-cell assembly.The cavity-cell assembly employs a compact magnetron-type cavity and a Rb vapor cell sealed with N2-Ar mixed buffer gas.The dependence of the clock frequency on temperature fluctuation is evaluated to be 2×10^(−11)/℃.In pursuit of the stable temperature,a three-stage temperature regulator is implemented on the physics package.It adopts a combination of open andclosed-loop control to address the problem of significant thermal coupling between the heating ovens.Under a laboratory environment,the measured Hadamard deviation of the temperature variation is 4×10^(−5)℃in 1 day of averaging.展开更多
文摘Chip-sized alkali atom vapor cells with high hermeticity are successfully fabricated through deep silicon etching and two anodic bonding processes.A self-built absorption spectrum testing system is used to test the absorption spectra of the ru-bidium atoms in alkali atom vapor cells.The influence of silicon cavity size,filling amount of rubidium atoms and temperature on the absorption spectra of rubidium atom vapor in the atom vapor cells are studied in depth through a theoretical analysis.This study provides a reference for the design and preparation of high quality chip-sized atom vapor cells.
基金supported in part by the National Key Research and Development Plan(2022YFB3203400)the National Natural Science Foundation of China(62103324 and U1909221)the Natural Science Foundation of Shaanxi(2022JQ-554).
文摘Existing microfabricated atomic vapor cells have only one optical channel,which is insufficient for supporting the multiple orthogonal beams required by atomic devices.In this study,we present a novel wafer-level manufacturing process for fabricating multi-optical-channel atomic vapor cells and an innovative method for batch processing the inner sidewalls of millimeter glass holes to meet optical channel requirements.Surface characterization and transmittance tests demonstrate that the processed inner sidewalls satisfy the criteria for an optical channel.In addition,the construction of an integrated processing platform enables multilayer non-isothermal anode bonding,the filling of inert gases,and the recovery and recycling of noble gases.Measurements of the absorption spectra and free-induction decay signals of xenon-129(^(129)Xe)and xenon-131(^(131)Xe)under different pump-probe schemes demonstrate the suitability of our vapor cell for use in atomic devices including atomic gyroscopes,dual-beam atomic magnetometers,and other optical/atomic devices.The proposed micromolding technology has broad application prospects in the field of optical-device processing.
基金the National Natural Science Foundation of China under Grant No.11703031,U1731132in part by the West Light Foundation of the Chinese Academy of Sciences under Grant No.XAB2017B04.
文摘Strong environmental dependence is an intractable problem for vapor cell clocks,for which the high-temperature sensitivity of the physics package is considered one of the dominant reasons.In this paper,we report the design and realization of a low-temperature-sensitive physics package for vapor cell clocks.The physics package comprises three layers of magnetic shields,three layers of heating ovens,and the cavity-cell assembly.The cavity-cell assembly employs a compact magnetron-type cavity and a Rb vapor cell sealed with N2-Ar mixed buffer gas.The dependence of the clock frequency on temperature fluctuation is evaluated to be 2×10^(−11)/℃.In pursuit of the stable temperature,a three-stage temperature regulator is implemented on the physics package.It adopts a combination of open andclosed-loop control to address the problem of significant thermal coupling between the heating ovens.Under a laboratory environment,the measured Hadamard deviation of the temperature variation is 4×10^(−5)℃in 1 day of averaging.
