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Numerical Analysis on the Effect of n-Si on Cu(In, Ga)Se2 Based Thin-Films for High-Performance Solar Cells by 1D-SCAPS
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作者 Rasika N. Mohottige Micheal Farndale +1 位作者 Gary S. Coombs Shahnoza Saburhhojayeva 《Open Journal of Applied Sciences》 2024年第5期1315-1329,共15页
We report the performances of a chalcopyrite Cu(In, Ga)Se<sub>2 </sub>CIGS-based thin-film solar cell with a newly employed high conductive n-Si layer. The data analysis was performed with the help of the ... We report the performances of a chalcopyrite Cu(In, Ga)Se<sub>2 </sub>CIGS-based thin-film solar cell with a newly employed high conductive n-Si layer. The data analysis was performed with the help of the 1D-Solar Cell Capacitance Simulator (1D-SCAPS) software program. The new device structure is based on the CIGS layer as the absorber layer, n-Si as the high conductive layer, i-In<sub>2</sub>S<sub>3</sub>, and i-ZnO as the buffer and window layers, respectively. The optimum CIGS bandgap was determined first and used to simulate and analyze the cell performance throughout the experiment. This analysis revealed that the absorber layer’s optimum bandgap value has to be 1.4 eV to achieve maximum efficiency of 22.57%. Subsequently, output solar cell parameters were analyzed as a function of CIGS layer thickness, defect density, and the operating temperature with an optimized n-Si layer. The newly modeled device has a p-CIGS/n-Si/In<sub>2</sub>S<sub>3</sub>/Al-ZnO structure. The main objective was to improve the overall cell performance while optimizing the thickness of absorber layers, defect density, bandgap, and operating temperature with the newly employed optimized n-Si layer. The increase of absorber layer thickness from 0.2 - 2 µm showed an upward trend in the cell’s performance, while the increase of defect density and operating temperature showed a downward trend in solar cell performance. This study illustrates that the proposed cell structure shows higher cell performances and can be fabricated on the lab-scale and industrial levels. 展开更多
关键词 n-si p-CIGs 1D-sCAPs Thin-films In<sub>2sub>s<sub>3sub>
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Flavor Amidst Plainness:An Examination of the Subjectivity of the“People’s Films”From the Perspective of Classical Aesthetics
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作者 Yang Guang 《Contemporary Social Sciences》 2023年第3期132-144,共13页
The“People’s Films,”when examined from the perspective of classical aesthetics,present a unique visual style that creates artistic conceptions through sparse filming and deliver a scenery-based ideology through bac... The“People’s Films,”when examined from the perspective of classical aesthetics,present a unique visual style that creates artistic conceptions through sparse filming and deliver a scenery-based ideology through background shots,contributing to the overall aesthetic taste dominated by plainness.Chinese national aesthetic tastes,distinguished by implicitness,symbolism,and ethereality,have the magical power to present charming conceptions via plain and simple scenes,thus endowing the“People’s Films”with natural,plain,and harmonious frames that are unique to China.Behind the silent and plain scenes are representations of personal cultivation and essential values cherished by the Chinese people,which are achieved via the momentary presence and entirety of scenes photographed in the films,delivering an internal transcendence of people’s consciousness. 展开更多
关键词 plainness classical aesthetics the“People’s films subjectivity
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Effect of substrate temperature and oxygen plasma treatment on the properties of magnetron-sputtered CdS for solar cell applications
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作者 Runxuan Zang Haolin Wang +9 位作者 Xiaoqi Peng Ke Li Yuehao Gu Yizhe Dong Zhihao Yan Zhiyuan Cai Huihui Gao Shuwei Sheng Rongfeng Tang Tao Chen 《中国科学技术大学学报》 CAS CSCD 北大核心 2024年第6期22-33,I0010,共13页
Cadmium sulfide(CdS)is an n-type semiconductor with excellent electrical conductivity that is widely used as an electron transport material(ETM)in solar cells.At present,numerous methods for preparing CdS thin films h... Cadmium sulfide(CdS)is an n-type semiconductor with excellent electrical conductivity that is widely used as an electron transport material(ETM)in solar cells.At present,numerous methods for preparing CdS thin films have emerged,among which magnetron sputtering(MS)is one of the most commonly used vacuum techniques.For this type of technique,the substrate temperature is one of the key deposition parameters that affects the interfacial properties between the target film and substrate,determining the specific growth habits of the films.Herein,the effect of substrate temperature on the microstructure and electrical properties of magnetron-sputtered CdS(MS-CdS)films was studied and applied for the first time in hydrothermally deposited antimony selenosulfide(Sb_(2)(S,Se)_(3))solar cells.Adjusting the substrate temperature not only results in the design of the flat and dense film with enhanced crystallinity but also leads to the formation of an energy level arrangement with a Sb_(2)(S,Se)_(3)layer that is more favorable for electron transfer.In addition,we developed an oxygen plasma treatment for CdS,reducing the parasitic absorption of the device and resulting in an increase in the short-circuit current density of the solar cell.This study demonstrates the feasibility of MS-CdS in the fabrication of hydrothermal Sb_(2)(S,Se)_(3)solar cells and provides interface optimization strategies to improve device performance. 展开更多
关键词 magnetron sputtering CDs substrate heating plasma treatment sb_(2)(s se)_(3) thin film solar cell
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Photo-activated microtubule targeting drugs: Advancing therapies for colorectal cancer
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作者 Naresh Singh Samantha Sharma 《World Journal of Gastroenterology》 SCIE CAS 2024年第26期3257-3260,共4页
Over the years immunotherapy has demonstrably improved the field of cancer treatment.However,achieving long-term survival for colorectal cancer(CRC)patients remains a significant unmet need.Combination immunotherapies... Over the years immunotherapy has demonstrably improved the field of cancer treatment.However,achieving long-term survival for colorectal cancer(CRC)patients remains a significant unmet need.Combination immunotherapies incor-porating targeted drugs like MEK or multi-kinase inhibitors have offered some palliative benefit.Nevertheless,substantial gaps remain in the current therapeutic armamentarium for CRC.In recent years,there has been a surge of interest in exploring novel treatment strategies,including the application of light-activated drugs in conjunction with optical devices.This approach holds promise for achie-ving localized and targeted delivery of cytotoxic agents,such as microtubule-targeting drugs,directly to cancerous cells within the colon. 展开更多
关键词 Colorectal cancer Therapy MICROTUBULE Photo pharmacology Immuno-therapies©The author(s)2024.Published by Baishideng Publishing Group Inc.All rights reserved.
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Comprehensive effects of traditional Chinese medicine treatment on heart failure and changes in B-type natriuretic peptide levels: A meta-analysis
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作者 Li-Li Xia Shu-Yun Yang +2 位作者 Jun-Yao Xu Han-Qing Chen Zhu-Yuan Fang 《World Journal of Clinical Cases》 SCIE 2024年第4期766-776,共11页
BACKGROUND Heart failure(HF),a common cardiovascular condition,is characterized by significant morbidity and mortality.While traditional Chinese medicine(TCM)is often used as a complementary approach in HF management,... BACKGROUND Heart failure(HF),a common cardiovascular condition,is characterized by significant morbidity and mortality.While traditional Chinese medicine(TCM)is often used as a complementary approach in HF management,systematic evalua-tions of its impact on clinical outcomes,TCM syndrome scores,and B-type natriuretic peptide(BNP)levels are lacking.This study fills this gap through a comprehensive analysis of randomized controlled trials(RCTs)focusing on TCM for HF treatment.It encompasses an assessment of methodological quality,a meta-analysis,and an evaluation of evidence quality based on established standards.The results offer crucial insights into the potential advantages and constraints of TCM in HF management.RCTs on TCM for HF treatment published since the establishment of the database were searched in four Chinese and English databases,including China National Knowledge Infrastructure,Wanfang,VIP Information Chinese Science and Technology Journal,and PubMed.Methodological quality was assessed for the included studies with the Cochrane risk-of-bias assessment tool,and the meta-analysis and publication bias assessment was performed with the RevMan5.3 software.Finally,the quality of evidence was rated according to the GRADE criteria.RESULTS A total of 1098 RCTs were initially retrieved.After screening,16 RCTs were finally included in our study,which were published between 2020 and 2023.These RCTs involved 1660 HF patients,including 832 in the TCM group[TCM combined with conventional Western medicine(CMW)treatment]and 828 in the CWM group(CWM treatment).The course of treatments varied from 1 wk to 3 months.TCM syndrome differentiation was analyzed in 11 of the included RCTs.In all included RCTs,outcome indicators included comprehensive clinical outcomes,TCM syndrome scores,and BNP levels.The meta-analysis results showed significant differences between the TCM and CWM groups in terms of comprehensive clinical outcomes[risk ratio=-0.54;95%confidence interval(CI)=-0.61,-0.47;P<0.00001],TCM syndrome scores[weighted mean difference(WMD)=-142.07;95%CI=-147.56,-136.57;P<0.00001],and BNP levels(WMD=-142.07;95%CI=-147.56,-136.57;P<0.00001).According to the GRADE criteria,RCTs where"TCM improves clinical comprehensive outcomes"were rated as low-quality evidence,and RCTs where"TCM reduces TCM syndrome scores"or"TCM decreases BNP levels"were rated as medium-quality evidence.CONCLUSION TCM combined with CWM treatment effectively improves comprehensive clinical outcomes and diminishes TCM syndrome scores and BNP levels in HF patients.Given the low and medium quality of the included RCTs,the application of these results should be cautious. 展开更多
关键词 Traditional Chinese medicine Heart failure Comprehensive clinical outcomes Traditional Chinese medicine syndrome score B-type natriuretic peptide level Meta-analysis©The author(s)2024.Published by Baishideng Publishing Group Inc.
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化学水浴沉积制备高质量Zn(O,S)薄膜及其性能研究
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作者 孙祺 赵颖 +3 位作者 李博研 陈静允 赵子铭 钟大龙 《太阳能学报》 EI CAS CSCD 北大核心 2024年第4期482-488,共7页
为获得铜铟镓硒薄膜太阳电池中高质量Zn(O,S)无镉缓冲层薄膜,该研究阐述了柠檬酸三钠作为络合剂制备Zn(O,S)薄膜的成膜机理,系统性研究了该体系下各反应参数对薄膜化学水浴沉积的影响。研究表明,柠檬酸三钠的浓度值显著影响反应类型,异... 为获得铜铟镓硒薄膜太阳电池中高质量Zn(O,S)无镉缓冲层薄膜,该研究阐述了柠檬酸三钠作为络合剂制备Zn(O,S)薄膜的成膜机理,系统性研究了该体系下各反应参数对薄膜化学水浴沉积的影响。研究表明,柠檬酸三钠的浓度值显著影响反应类型,异质反应更有利于生成高质量薄膜。同时,柠檬酸三钠与金属离子浓度的比值直接影响成膜质量和成膜速率,适合的pH溶液环境有助于提高Zn(O,S)薄膜沉积的质量。此外,通过工艺参数的优化,获得了电学性能接近传统CdS/CIGS太阳电池的Zn(O,S)/CIGS电池器件。 展开更多
关键词 薄膜太阳电池 缓冲层 络合 CIGs 柠檬酸三钠 Zn(O s) 化学水浴沉积
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Depth Profile Study of Electroless Deposited Sb2S3 Thin Films Using XPS for Photovoltaic Applications
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作者 Towhid Adnan Chowdhury 《Materials Sciences and Applications》 2023年第7期397-406,共10页
Sb<sub>2</sub>S<sub>3</sub> has gained tremendous research recently for thin film solar cell absorber material because of their easy synthesis, unique electrical and optical properties. The sto... Sb<sub>2</sub>S<sub>3</sub> has gained tremendous research recently for thin film solar cell absorber material because of their easy synthesis, unique electrical and optical properties. The stoichiometry and composition of electroless Sb<sub>2</sub>S<sub>3</sub> thin films were analyzed using XPS depth profile studies. The surface layers were found nearly stoichiometric. On the other hand, the inner layer was rich in antimony composition making it more conductive electrically. 展开更多
关键词 sb<sub>2sub>s<sub>3sub> Depth Profiling X-Ray Photoelectron spectroscopy Thin film ELECTROLEss
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Influence of Thermal Treatments on In-depth Compositional Uniformity of Culn(S,Se)2 Thin Films
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作者 谢海兵 刘伟丰 +3 位作者 江国顺 李欣益 严飞 朱长飞 《Chinese Journal of Chemical Physics》 SCIE CAS CSCD 2012年第4期481-486,I0004,共7页
CuIn(S,Se)2 thin films were prepared by thermal crystallization of co-sputtered Cu-In alloy precursors in S/Se atmosphere. In-depth compositional uniformity is an important prereq- uisite for obtaining device-qualit... CuIn(S,Se)2 thin films were prepared by thermal crystallization of co-sputtered Cu-In alloy precursors in S/Se atmosphere. In-depth compositional uniformity is an important prereq- uisite for obtaining device-quality CuIn(S,Se)2 absorber thin films. In order to figure out the influence of heat treatments on in-depth composition uniformity of CuIn(S,Se)2 thin films, two kinds of reaction temperature profiles were investigated. One process is "one step profile", referring to formation of CuIn(S,Se)2 thin films just at elevated temperature (e.g. 500 ℃). The other is "two step profile", which allows for slow diffusion of S and Se elements into the alloy precursors at a low temperature before the formation and re-crystallization of CuIn(S,Se)2 thin films at higher temperature (e.g. first 250 ℃ then 500 ℃). X-ray diffrac- tion studies reveal that there is a discrepancy in the shape of (112) peak. Samples annealed with "one step profile" have splits on (112) peaks, while samples annealed with "two step profile" have relatively symmetrical (112) peaks. Grazing incident X-ray diffraction and en- ergy dispersive spectrum measurements of samples successively etched in bromine methanol show that CuIn(S,Se)2 thin films have better in-depth composition uniformity after "two step profile" annealing. The reaction mechanism during the two thermal processing was also investigated by X-ray diffraction and Raman spectra. 展开更多
关键词 Thermal treatment In-depth compositional uniformity CuIn(s se)2 thin film
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Thermal Expansion Coefficients of Thin Crystal Films 被引量:6
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作者 HUANG Jian-Ping WU Xue-Zhong LI Sheng-Yi 《Communications in Theoretical Physics》 SCIE CAS CSCD 2005年第5X期921-924,共4页
The formulas for atomic displacements and Hamiltonian of a thin crystal film in phonon occupation number representation are obtained with the aid of Green's function theory. On the basis of these results, the form... The formulas for atomic displacements and Hamiltonian of a thin crystal film in phonon occupation number representation are obtained with the aid of Green's function theory. On the basis of these results, the formulas for thermal expansion coefficients of the thin crystal film are derived with the perturbation theory, and the numerical calculations are carried out. The results show that the thinner films have larger thermal expansion coefficients. 展开更多
关键词 thermal expansion coefficients thin crystal film Green's function perturbation theory
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Effect of concentration of cadmium sulfate solution on structural,optical and electric properties of Cd_(1-x)Zn_(x)S thin films 被引量:4
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作者 Yuming Xue Shipeng Zhang +4 位作者 Dianyou Song Liming Zhang Xinyu Wang Lang Wang Hang Sun 《Journal of Semiconductors》 EI CAS CSCD 2021年第11期26-31,共6页
Cd_(1-x)Zn_(x)S thin films were deposited by chemical bath deposition(CBD)on the glass substrate to study the influence of cadmium sulfate concentration on the structural characteristics of the thin film.The SEM resul... Cd_(1-x)Zn_(x)S thin films were deposited by chemical bath deposition(CBD)on the glass substrate to study the influence of cadmium sulfate concentration on the structural characteristics of the thin film.The SEM results show that the thin film surfaces under the cadmium sulfate concentration of 0.005 M exhibit better compactness and uniformity.The distribution diagrams of thin film elements illustrate the film growth rate changes on the trend of the increase,decrease,and increase with the increase of cadmium sulfate concentration.XRD studies exhibit the crystal structure of the film is the hexagonal phase,and there are obvious diffraction peaks and better crystallinity when the concentration is 0.005 M.Spectrophotometer test results demonstrate that the relationship between zinc content x and optical band gap value E_(g) can be expressed by the equation E_(g)(x)=0.59x^(2)+0.69x+2.43.Increasing the zinc content can increase the optical band gap,and the absorbance of the thin film can be improved by decreasing the cadmium sulfate concentration,however,all of them have good transmittance.At a concentration of 0.005 M,the thin film has good absorbance in the 300-800 nm range,80%transmittance,and band gap value of 3.24 eV,which is suitable for use as a buffer layer for solar cells. 展开更多
关键词 CIGs thin film solar cell CBD(chemical bath deposition) buffer layer Cd_(1-x)Zn_(x)s thin films cadmium sulfate
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Artificial network prediction on degradable properties of coal-filled films 被引量:2
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作者 杨志远 周安宁 曲建林 《Journal of Coal Science & Engineering(China)》 2005年第2期78-81,共4页
Utilized degradable data of coal-filled films from the accelerated UV chamber ageing degradation experiments, and on the basis of control factors’ analysis, presented a predicting model on degradable properties of th... Utilized degradable data of coal-filled films from the accelerated UV chamber ageing degradation experiments, and on the basis of control factors’ analysis, presented a predicting model on degradable properties of this film in photo-degradation according to back-propagation artificial neural network (BP ANN). 4 controlling factors in films degrada-tion, including temperature, the time of UV irradiation, the concentration and the type of coals were used as input parameters in the ANN model. While the degradable properties after film degradation, including the mechanical properties and carbonyl index, were used as output parameters. It was carried out by the neural network toolbox of Matlab 6.5 soft-ware and Visual Basic 6.0. Discussed partition of sample data and model’s parameters, and then selected the best configuration of ANN network. The accurate scope of predicting results was analyzed. This model has a high precision in predicting on properties of the coal-filled film degradation. 展开更多
关键词 coal-filled film degradable properties model's parameters ANN PREDICTION
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First-principles study on the alkali chalcogenide secondary compounds in Cu(In,Ga)Se_2 and Cu_2ZnSn(S,Se)_4 thin film solar cells 被引量:1
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作者 Xian Zhang Dan Han +2 位作者 Shiyou Chen Chungang Duan Junhao Chu 《Journal of Energy Chemistry》 SCIE EI CAS CSCD 2018年第4期1140-1150,共11页
The beneficial effect of the alkali metals such as Na and K on the Cu(In.Ga)Se2 (CIGS) and Cu2ZnSn(S,Se)4 (CZTSSe) solar cells has been extensively investigated in the past two decades, however, in most of the... The beneficial effect of the alkali metals such as Na and K on the Cu(In.Ga)Se2 (CIGS) and Cu2ZnSn(S,Se)4 (CZTSSe) solar cells has been extensively investigated in the past two decades, however, in most of the studies the alkali metals were treated as dopants. Several recent studies have showed that the alkali metals may not only act as dopants but also form secondary phases in the absorber layer or on the surfaces of the films. Using the first-principles calculations, we screened out the most probable secondary phases of Na and K in CIGS and CZTSSe, and studied their electronic structures and optical properties. We found that all these alkali chalcogenide compounds have larger band gaps and lower VBM levels than CIGS and CZTSSe, because the existence of strong p-d coupling in CIS and CZTS pushes the valence band maximum (VBM) level up and reduces the band-gaps, while there is no such p-d coupling in these alkali chalcogenides. This band alignment repels the photo-generated holes from the secondary phases and prevents the electron-hole recombination. Moreover, the study on the optical properties of the secondary phases showed that the absorption coefficients of these alkali chalcogenides are much lower than those of CIGS and CZTSSe in the energy range of 0-3.4eV, which means that the alkali chalcogenides may not influence the absorption of solar light. Since the alkali metal dopants can passivate the grain boundaries and increase the hole carrier concentration, and meanwhile their related secondary phases have innocuous effect on the optical absorption and band alignment, we can understand why the alkali metal dopants can improve the CIGS and CZTSSe solar cell performance. 展开更多
关键词 Cu(In Ga)se2 and Cu2Znsn(s se)4 Thin film solar cells First-principles calculations secondary phases Alkali dopants
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Cotton's Water Demand and Water-Saving Benefits under Drip Irrigation with Plastic Film Mulch 被引量:2
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作者 Yingyu YAN Juyan LI 《Asian Agricultural Research》 2016年第4期32-36,41,共6页
The primary purpose of this research was to give suitable irrigation program according to the growth period and water requirement.A cotton field experiment with mulched drip irrigation was conducted at the National Fi... The primary purpose of this research was to give suitable irrigation program according to the growth period and water requirement.A cotton field experiment with mulched drip irrigation was conducted at the National Field Observation and Research Station for Oasis Farmland Ecosystem in Aksu of Xinjiang in 2008.Water balance method was adopted to study the water requirement and water consumption law of cotton under mulched drip irrigation in Tarim Irrigated Area.Statistical analysis of experimental data of irrigation indicates that the relationship between yield of cotton and irrigation presents a quadratic parabola.We fit the model of cotton water production on the basis of field experimental data of cotton.And the analysis on water saving benefit of cotton under mulched drip irrigation was done.Results indicate that water requirements for the irrigated cotton are 543 mm in Tarim Irrigated Area.The water requirements of seedling stage is 252 mm,budding stage is 186 mm,bolling stage is 316 mm and wadding stage is 139 mm.the irrigation amount determines the spatial distribution of soil moisture and water consumption during cotton life cycle.However,water consumption at different growth stages was inconsistent with irrigation.Quantitatively,the water consumed by cotton decreases upon the increase of irrigation amount.From the perspective of water saving,the maximal water use efficiency can reach 3 091 m3/ha.But the highest cotton yield needs 3464 m3/ha irrigation water.In summary,compared to the conventional drip irrigation,a number of benefits in water saving and yield increase were observed when using plastic mulch.At the same amount of irrigation,the cotton yield with plastic mulch was 30.2% higher than conventional approaches,and the efficiency of water utilization increased by30.2%.While at the same yield level,29.3% water was saved by using plastic mulch,and the efficiency increased by 41.5%. 展开更多
关键词 Cotton’s WATER demand Cotton’s WATER consumption WATER-sAVING BENEFITs DRIP irrigation with PLAsTIC film MULCH
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Influence of Ag and Sn incorporation in In_2S_3 thin films 被引量:1
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作者 林灵燕 俞金玲 +1 位作者 程树英 陆培民 《Chinese Physics B》 SCIE EI CAS CSCD 2015年第7期539-543,共5页
Ag- and Sn-doped In2S3 thin films were deposited on glass substrates using the thermal evaporation technique. The doping was realized by thermal diffusion. The influences of Ag and Sn impurities on the electrical, str... Ag- and Sn-doped In2S3 thin films were deposited on glass substrates using the thermal evaporation technique. The doping was realized by thermal diffusion. The influences of Ag and Sn impurities on the electrical, structural, morphological, and optical properties of the In2S3 films were investigated. In all deposited samples, the x-ray diffraction spectra revealed the formation of cubic In2S3 phase. A significant increase in the crystallite size was observed after Ag doping,while the doping of Sn slightly decreased the crystallite size. The x-ray photoelectron spectroscopy verified the diffusion of Ag and Sn into the In2S3 films after annealing. The optical study illustrated that Ag doping resulted in a reduction of the optical band gap while Sn doping led to a widening of the gap. Optical properties were investigated to determine the optical constants. Besides, it was found that the resistivity decreases significantly either after Ag or Sn incorporation. The study demonstrates that the Sn-doped In2S3 thin films are more suitable for buffer layer application in solar cells than the Ag-doped In2S3 thin films. 展开更多
关键词 In2s3 thin films DOPING thermal evaporation
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The fabrication of ideal diamond disk(IDD)by casting diamond film on silicon wafer 被引量:1
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作者 Chen Ying-Tung Sung James C. +2 位作者 Kan Ming-Chi Chang Hsiao-Kuo Sung Michael 《金刚石与磨料磨具工程》 CAS 北大核心 2008年第S1期130-133,142,共5页
With the relentless densification of interconnected circuitry dictated by Moore’ s Law,the CMP manufacture of such delicate wafers requires the significant reduction of polishing pressure of integrated circuits,not o... With the relentless densification of interconnected circuitry dictated by Moore’ s Law,the CMP manufacture of such delicate wafers requires the significant reduction of polishing pressure of integrated circuits,not only globally,but also locally on every tip of the pad asperities.Conventional diamond disks used for dressing the polyurethane pads cannot produce asperities to achieve such uniformity.A new design of diamond disk was fabricated by casting diamond film on a silicon wafer that contains patterned etching pits. This silicon mold was subsequently removed by dissolution in a hydroxide solution.The diamond film followed the profile of the etching pits on silicon to form pyramids of identical in size and shape.The variation of their tip heights was in microns of single digit that was about one order of magnitude smaller than conventional diamond disks for CMP production.Moreover,the diamond film contained no metal that might contaminate the circuits on polished wafer during a CMP operation.The continuous diamond film could resist any corrosive attack by slurry of acid or base.Consequently,in-situ dressing during CMP is possible that may improve wafer uniformity and production throughput.This ideal diamond disk(IDD) is designed for the future manufacture of advanced semiconductor chips with node sizes of 32 nm or smaller. 展开更多
关键词 CMP pad CONDITIONER DIAMOND film CVD Moore’s Law 32 nm node
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Determination of reduced Young s modulus of thin films using indentation test 被引量:1
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作者 Wuzhu YAN Shifeng WEN Jun LIU Zhufeng YUE 《Acta Metallurgica Sinica(English Letters)》 SCIE EI CAS CSCD 2009年第6期468-480,共13页
The flat cylindrical indentation tests with different sizes of punch radius were investigated using finite element method (FEM) aimed to reveal the effect of punch size on the indentation behavior of the film/substr... The flat cylindrical indentation tests with different sizes of punch radius were investigated using finite element method (FEM) aimed to reveal the effect of punch size on the indentation behavior of the film/substrate system. Based on the FEM results analysis, two methods was proposed to separate film's reduced Young's modulus from a film/substrate system. The first method was based on a new weight function that quantifies film's and substrate's contributions to the overall mechanical properties of the film/substrate system in the flat cylindrical indentation test. The second method, a numerical approach, including fitting and extrapolation procedures was put forward. Both of the results from the two methods showed a reasonable agreement with the one input FE model. At last, the effect of maximum indentation depth and the surface micro-roughness of the thin film on the reduced Young's modulus of the film/substrate system were discussed. The methods proposed in the present study provide some new conceptions on evaluating other properties of thin films, e.g. creep, for which a flat-ended punch is also employed. 展开更多
关键词 Indentation test Reduced Young's modulus Punch size effect Weight function film/substrate system
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Surface investigation on Upilex-S polymide film iradiated by vacuum ultraviolet radiation 被引量:5
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作者 LIU Yuyan1),GONG Xianyun2),WAN Zhimin3),and DU Xingwen4)1) Department of Applied Chemistry,Harbin Institute of Technology,Harbin 150001,China 2) Department of Life Science and Chemistry,Harbin University,Harbin 150001,China 3) Analysis and Measurement Center,Harbin Institute of Technology,Harbin 150001,China 4) Center for Composite Materials,Harbin Institute of Technology,Harbin 150001,China 《Rare Metals》 SCIE EI CAS CSCD 2007年第S1期168-174,共7页
Vacuum ultraviolet radiation of Upilex-S polyimide film 25 μm thick was performed using a gas jet type of vacuum ultraviolet simulator which gives unfixed wavelength from 5 nm to 200 nm.Nanoparticles redeposited on t... Vacuum ultraviolet radiation of Upilex-S polyimide film 25 μm thick was performed using a gas jet type of vacuum ultraviolet simulator which gives unfixed wavelength from 5 nm to 200 nm.Nanoparticles redeposited on the films were observed and the nanoparticles formed on the surface consist mainly of carbon clusters.Changes in the composition and the chemical characteristics of film surface after radiation were identified by X-ray photoelectron spectroscopy(XPS).Relative O content in the radiated area was found to be higher,while N content was lower than in the pristine area.This indicates that Upilex-S polyimide film releases N atoms as volatile species.And the C1s,O1s envelopes were fitted using Multipak Spectrum software.The surface morphologies on iradiated area were examined by Atomic Force Microscope(AFM).Pieces of radiant products protrude from the eradiated surface,leading to considerable roughness for the iradiated area.And the surface transmittance of Upilex-S film after radiation reduces. 展开更多
关键词 vacuum ultraviolet radiation Upilex-s polyimide film
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Optical and electrical characterizations of nanoparticle Cu_2S thin films 被引量:1
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作者 M.Saadeldin H.S.Soliman +1 位作者 H.A.M.Ali K.Sawaby 《Chinese Physics B》 SCIE EI CAS CSCD 2014年第4期476-481,共6页
Copper sulfide thin films are deposited onto different substrates at room temperature using the thermal evaporation technique. X-ray diffraction spectra show that the film has an orthorhombicchalcocite (7-Cu2S) phas... Copper sulfide thin films are deposited onto different substrates at room temperature using the thermal evaporation technique. X-ray diffraction spectra show that the film has an orthorhombicchalcocite (7-Cu2S) phase. The atomic force microscopy images indicate that the film exhibits nanoparticles with an average size of nearly 44 nm. Specrtophotometric measurements for the transmittance and reflectance are carried out at normal incidence in a spectral wavelength range of 450 nm-2500 nm. The refractive index, n, as well as the absorption index, k is calculated. Some dispersion parameters are determined. The analyses of el and e2 reveal several absorption peaks. The analysis of the spectral behavior of the absorption coefficient, c~, in the absorption region reveals direct and indirect allowed transitions. The dark electrical resistivity is studied as a function of film thickness and temperature. Tellier's model is adopted for determining the mean free path and bulk resistance. 展开更多
关键词 physical properties of Cu2s thermal evaporation nanoparticle Cu2s thin films
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Author’s Correction
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作者 Liu Ming 《Journal of Medical Colleges of PLA(China)》 CAS 2008年第6期323-323,共1页
We have made a clerical error in Table 1 on the page of 239, Volume 23, No.4 of Journal of Medical Colleges of PLA (the article is entitled as Expression and role of AQP1 in cervical squamous carcinoma
关键词 NsE s Correction author CsC AQP
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Author's Letter
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作者 Hong Jiaxing 《Acta Mathematica Scientia》 SCIE CSCD 2007年第4期908-908,共1页
To editorial board of Acta Mathematica Scientia(Acta MS) I was shocked when I was informed that the paper entitled"Eigenvalue Problem for the Laplacian Equations"by Shao Zhiqiang and Hong Jiaxing appeared in... To editorial board of Acta Mathematica Scientia(Acta MS) I was shocked when I was informed that the paper entitled"Eigenvalue Problem for the Laplacian Equations"by Shao Zhiqiang and Hong Jiaxing appeared in Acta MS(2007)Series B,no 2.For the past 15 years,I have not had any contact with Mr.Shao Zhiqiang and I have 展开更多
关键词 Ms authors Letter
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