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Thermal performance of sputtered Cu films containing insoluble Zr and Cr for advanced barrierless Cu metallization
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作者 王新建 董显平 姜传海 《Transactions of Nonferrous Metals Society of China》 SCIE EI CAS CSCD 2010年第2期217-222,共6页
Pure Cu films and Cu alloy films containing insoluble substances(Zr and Cr)were deposited on Si(100)substrates,in the presence of interfacial native suboxide(SiOx),by magnetron sputtering.Samples were vacuum annealed ... Pure Cu films and Cu alloy films containing insoluble substances(Zr and Cr)were deposited on Si(100)substrates,in the presence of interfacial native suboxide(SiOx),by magnetron sputtering.Samples were vacuum annealed between 300℃and 500 ℃to investigate effects of Zr and Cr additions on the thermal performance of Cu films.After annealing,copper silicides were found in the Cu(Zr)films,while no detectable silicides were observed in Cu and Cu(Cr)films.Upon annealing,Zr accelerated the diffusion and reaction between the film and the substrate,and lowered the thermal stability of Cu(Zr)alloy films on Si substrates,which was ascribed to the‘purifying effect’of Zr on the Si substrates.Whereas,Cr prohibited the agglomeration of Cu films at 500℃and decreased the surface roughness.As a result,the diffusion of Cu in Si substrates for Cu(Cr)films was effectively inhibited.In contrast to the high resistivity of Cu(Zr)films,the final resistivity of about 2.76μΩ·cm was achieved for the Cu(Cr)film.These results indicate that Cu(Cr)films have higher thermal stability than Cu(Zr)films on Si substrates and are preferable in the advanced barrierless Cu metallization. 展开更多
关键词 copper film barrierless metallization magnetron sputtering thermal stability purifying effect
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Effect of solvents on the barrierless reaction in the excited state of cyanine dye
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作者 FENGJuan XIANGJunfeng 《Chinese Science Bulletin》 SCIE EI CAS 2003年第6期526-530,共5页
UV-Vis, fluorescence spectroscopy and time resolved spectroscopic technique on picosecond and femto- second scales have been utilized to investigate the effect of steric hindrance and multiple hydroxyl groups of solve... UV-Vis, fluorescence spectroscopy and time resolved spectroscopic technique on picosecond and femto- second scales have been utilized to investigate the effect of steric hindrance and multiple hydroxyl groups of solvents on the barrierless isomerization in excited state of 3, 3′- di(3-sulfopropyl)thiacyanine triethylaminium salt. The re-sults show that the factors mentioned above may be respon-sible for a different 搒hort-time behavior?of the bleaching signal on the ground state and nonlinear viscosity depend-ence of the excited-state lifetime in isopropanol and glycol. These phenomena are distinguished from the situation re-ported in the long-chained monohydroxyl alcohol solvents. However, the dye molecule still exhibits the analyzing- wavelength dependence of the observed fluorescence lifetime, that is, the fluorescence lifetime increases with the increasing of analyzing-wavelength. The conclusions are in agreement with those drawn from femtosecond upconversion fluores-cence experiments and further exemplify the barrierless isomerization model in the excited state. 展开更多
关键词 花青染料 光异构作用 溶剂 激发态 飞秒瞬态吸收 无势垒反应
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乙酸基+O_(2)及其分解异构化反应速率常数计算和不确定度分析
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作者 殷阁媛 肖波 +1 位作者 胡二江 黄佐华 《西安交通大学学报》 EI CAS CSCD 北大核心 2023年第5期109-117,共9页
为了构建准确乙酸燃烧化学反应动力学模型,进行了乙酸基与O_(2)及其分解异构化高精度的量子计算。利用CCSD(T)-F12/cc-pVTZ-F12//B2PLYPD3/cc-pVTZ算法,得到了反应体系势能面,并基于多参考态方法CASPT2/CBS//CASPT2/cc-pVTZ,获得无势垒... 为了构建准确乙酸燃烧化学反应动力学模型,进行了乙酸基与O_(2)及其分解异构化高精度的量子计算。利用CCSD(T)-F12/cc-pVTZ-F12//B2PLYPD3/cc-pVTZ算法,得到了反应体系势能面,并基于多参考态方法CASPT2/CBS//CASPT2/cc-pVTZ,获得无势垒反应势能面。通过气相单分子反应理论(RRKM)和主方程理论求解了温度和压力相关的速率常数,利用可变反应坐标过渡态理论求解无势垒反应乙酸基与O_(2)加成反应的速率常数。结果表明:在低压或者高温条件下,超过99%的化学活化的O_(2)CH_(2)CO_(2)H自由基直接分解为CH_(2)O_(2)H+CO_(2)。随着压力升高,化学活化的O_(2)CH_(2)CO_(2)H碰撞稳定后生成O_(2)CH_(2)CO_(2)H,O_(2)CH_(2)CO_(2)H则在后续反应中分解为CH_(2)O_(2)H+CO_(2)。乙酸自由基在分解时,CO_(2)+CH_(3)产物通道占据主导地位。基于计算结果改进了原有乙酸模型,改进后的模型能够更好地预测层流燃烧速度,并且乙酸基存在更多的消耗路径,与量化计算结果一致。 展开更多
关键词 酸雨 乙酸 无势垒反应 主方程理论
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Quantum Wave Packet Studies on F+HBr Reaction 被引量:1
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作者 QUAN Wei-long TANG Ping-ying +1 位作者 TANG Bi-yu HAN Ke-li 《Chemical Research in Chinese Universities》 SCIE CAS CSCD 2007年第1期96-100,共5页
Time-dependent quantum wave packet calculations were carried out for the F + HBr reaction on the latest London-Erying-Polanyi-Sato potential energy surface constructed by Persky et al. The calculated reaction probabi... Time-dependent quantum wave packet calculations were carried out for the F + HBr reaction on the latest London-Erying-Polanyi-Sato potential energy surface constructed by Persky et al. The calculated reaction probabilities dramatically increase near the zero collision energy and then slightly decrease with increasing collision energy, which corresponds well to the behavior of a barrierless reaction. The effects of reagent HBr excitation were examined, it is shown that both the vibrational and the rotational excitations of reagent HBr have a negative effect on the reactivity of F + HBr. The integral cross-section for the ground state of the reagent HBr decreases at a low collision energy and then becomes plat with increasing collision energy, which is reasonable for the feasibility of such an exothermal reaction. The rate constant that was obtained is slightly higher than that obtained in the quasi-classical trajectory calculation. 展开更多
关键词 barrierless reaction Reaction cross-section Rate constant Ro-vibrational excitation
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基于稳定固溶体团簇模型的无扩散阻挡Cu合金薄膜的成分设计 被引量:1
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作者 杨冕 利助民 +4 位作者 李晓娜 李南军 郑月红 朱瑾 董闯 《表面技术》 EI CAS CSCD 北大核心 2020年第5期48-60,97,共14页
随着超大规模集成电路的发展,器件特征尺寸不断缩小,必然会出现Cu互连扩散阻挡层厚度无法进一步减小等瓶颈问题。因此,开发新型无扩散阻挡层Cu合金薄膜(Cu种籽层)势在必行。该新型互连结构在长时间的中高温(400~500℃)后续工艺实施过程... 随着超大规模集成电路的发展,器件特征尺寸不断缩小,必然会出现Cu互连扩散阻挡层厚度无法进一步减小等瓶颈问题。因此,开发新型无扩散阻挡层Cu合金薄膜(Cu种籽层)势在必行。该新型互连结构在长时间的中高温(400~500℃)后续工艺实施过程中,需同时具备高的稳定性(不发生互扩散反应)和低的电阻率。基于此,首先综述了目前无扩散阻挡层结构的研究现状及问题,然后对基于稳定固溶体团簇模型设计制备的无扩散阻挡Cu-Ni-M薄膜的研究工作进行了梳理,通过多系列薄膜微观结构、电阻率及稳定性的对比,深入探讨了第三组元M的选择原则及其对薄膜热稳定性的影响。为进一步验证稳定固溶体团簇模型的有效性,对第二组元的变化进行了相关讨论。结果证实,选取原子半径略大于Cu、难扩散且难溶的元素作为第三组元M,薄膜表现出良好的扩散阻挡能力;当M/Ni=1/12,即合金元素完全以团簇形式固溶于Cu基体时,薄膜综合性能达到最优,能够满足微电子行业的要求。所有研究表明,稳定固溶体团簇模型在无扩散阻挡层Cu合金薄膜的成分设计方面十分有效,该模型也有望在耐高温Cu合金及抗辐照材料成分设计方面推广使用。 展开更多
关键词 铜合金薄膜 无扩散阻挡结构 稳定固溶体团簇模型 成分设计 热稳定性 电阻率
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现代城市公交客车人性化设计 被引量:1
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作者 曹琳琳 曾维鑫 《人民公交》 2005年第2期41-43,4,共4页
本文针对我国现代城市交通的现状,阐述了我国城市内部运行的公交客车的人性化设计趋势,并提出了一系列人性化设计思路。
关键词 公交客车 人性化设计 无障碍设施
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The Synthesis of Sub-Nano-Thick Pd Nanobelt-Based Materials for Enhanced Hydrogen Evolution Reaction Activity 被引量:4
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作者 Bing Ni Qinghua Zhang +5 位作者 Chen Ouyang Simin Zhang Biao Yu Jing Zhuang Lin Gu Xun Wang 《CCS Chemistry》 CAS 2020年第1期642-654,共13页
Tailoring atomic structures of noblemetal nanomaterials with size close to single-unit cell range is essential in both fundamental researchand applications,including their development into high catalytic performance m... Tailoring atomic structures of noblemetal nanomaterials with size close to single-unit cell range is essential in both fundamental researchand applications,including their development into high catalytic performance materials in renewable,green energy conversions,devices for energy storage,and as biosensors for environmental pollutants.However,several strategies used in fabricating these materials still impose enormous challenges,arising from lack of even size distribution,shape uniformity,and controlled composition,which are critical in determining their specific activities and efficiencies.Herein,we report a facile approach for preparing sub-nano-thick palladium nanobelt-based(PdNB)materials.Then we rationalized the formation mechanism of such highly anisotropic structures by morphology-related thermodynamic and kinetic analysis.Moreover,we investigated if electrocatalysis performance of these NB-basedmaterialswere enhanced.Thepalladium(Pd)NBs featured a thickness of∼0.9-1.2 nm and width of 5-18nmwith length extending to severalmicrometers[denoted as Pd(0.9)],or a thickness of∼0.7-0.9 nm and width of 2.5-6 nmwith length of several hundreds of nanometers[denoted as Pd(0.7)].According to our theoretical analysis,one-dimensional(1D)growth encountered almost no energy barrier at optimal reaction conditions,whereas the growth of Pd nanostructures with other dimensions confronted high barriers,indicating that it was plausible to prepare 1D structures with sizes close to single-unit cells.Also,platinum(Pt)could be successfully doped into the Pd(0.9)NBs through a galvanic epitaxial growth,forming edge-Pt-enriched Pd NBs(eePtPd NBs).Further,electron transfer from Pd to Pt imparted the eePtPd NBs with high hydrogen evolution reaction(HER)activity.The eePtPd NBs showed a 3.5 and 1.8 times higher in exchange current density and mass activity(at−0.1 V),respectively,compared to those of Pt catalysts in perchloric acid(HClO_(4))solutions.Finally,the NBs all showed high activity toward ethanol and formic acid oxidation reactions.Our current work aids in gaining insights into tailoring Pd nanostructures at an atomic level and provides Pd sub-nanometric 1D structures for further research.Moreover,our morphology-related thermodynamic and kinetic analysis extend our understanding of the control of nanostructure morphology and might shed light on the precision of designing specific morphologies of noble metal nanocrystal structures. 展开更多
关键词 growth mechanism Pd nanobelt PdPt heterostructure hydrogen evolution reaction barrierless growth
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