Thin-film lithium niobate electro-optical modulator will become the key device in the future optical communication,which has the advantages of high modulation rate,low half-wave voltage,large bandwidth,and easy integr...Thin-film lithium niobate electro-optical modulator will become the key device in the future optical communication,which has the advantages of high modulation rate,low half-wave voltage,large bandwidth,and easy integration compared with conventional bulk lithium niobate modulator.However,because the electrode gap of the lithium niobate film modulator is very narrow,when the microwave frequency gets higher,it leads to higher microwave loss,and the electro-optical performance of the modulator will be greatly reduced.Here,we propose a thin film lithium niobate electro-optic modulator with a bimetallic layer electrode structure to achieve microwave loss less than 8 dB/cm in the range of 200 GHz,exhibiting a voltage-length product of 1.1 V·cm and a 3 dB electro-optic bandwidth greater than 160 GHz.High-speed data transmission test has been performed,showing good performance.展开更多
The Al22Si/ZL102 bimetal was designed and prepared by extrusion at near-eutectic temperature.The properties and fracture behaviors of different surface treatments between oxide film and zinc coating were compared betw...The Al22Si/ZL102 bimetal was designed and prepared by extrusion at near-eutectic temperature.The properties and fracture behaviors of different surface treatments between oxide film and zinc coating were compared between the Al22 Si and ZL102 bimetal.The average bonding strength of bimetal with intermittent oxide film interface was about 89.3MPa,which is higher than that of the bimetal fabricated by zinc coating method（about 76.3MPa）.During the process of extrusion,the oxidation film was extruded to crush and the metal was extruded through the micro-cracks of the oxidation film,then the two surfaces were joined together.Altogether,the results showed that extrusion at near-eutectic temperature is favorable for achieving a high-quality metallurgical bonded interface.展开更多
This paper introduces a type of out-of-plane microelectrothermal actuator, which is based on the principle of bimetal film thermal expansion in the fuse. A polymer SU-8 material and nickel are used as the functional a...This paper introduces a type of out-of-plane microelectrothermal actuator, which is based on the principle of bimetal film thermal expansion in the fuse. A polymer SU-8 material and nickel are used as the functional and structural materials of the actuator. Through heating the resistance wire using electricity, the actuator produces out-of-plane motion in the perpendicular axial direction of the device and the bias layer contact with the substrate, completing signal output. Using Coventorware software to establish the three-dimensional model, the geometric structure is optimized and the electrothermal capabilities are determined theoretically. From electrothermal ana- lysis, the actuator＇s displacement is 18 #m and the temperature rises from 300 to 440 K under a voltage of 5 V and the response time is 5 ms. The actuator＇s displacement is 20μm under a 100000 m/s2 acceleration in the accelerating field. In the coupled field, applying a 3 V voltage, the initial temperature is 300 K, while the acceleration is 50000 m/s2, the driving displacement of the actuator is 23μm, and temperature rises to 400 K. Finally, through checking the stress in different field sources, the maximum stress of the actuator is smaller than the allowable stress of nickel. The results show that the electrothermal actuator has high reliability.展开更多
基金supported by the Self-deployment Project of Fujian Science&Technology Innovation Laboratory for Optoelectronic Information of China(No.2021ZZ104)the Fujian Province STS Project(Nos.2020T3002 and 2022T3012)。
文摘Thin-film lithium niobate electro-optical modulator will become the key device in the future optical communication,which has the advantages of high modulation rate,low half-wave voltage,large bandwidth,and easy integration compared with conventional bulk lithium niobate modulator.However,because the electrode gap of the lithium niobate film modulator is very narrow,when the microwave frequency gets higher,it leads to higher microwave loss,and the electro-optical performance of the modulator will be greatly reduced.Here,we propose a thin film lithium niobate electro-optic modulator with a bimetallic layer electrode structure to achieve microwave loss less than 8 dB/cm in the range of 200 GHz,exhibiting a voltage-length product of 1.1 V·cm and a 3 dB electro-optic bandwidth greater than 160 GHz.High-speed data transmission test has been performed,showing good performance.
文摘The Al22Si/ZL102 bimetal was designed and prepared by extrusion at near-eutectic temperature.The properties and fracture behaviors of different surface treatments between oxide film and zinc coating were compared between the Al22 Si and ZL102 bimetal.The average bonding strength of bimetal with intermittent oxide film interface was about 89.3MPa,which is higher than that of the bimetal fabricated by zinc coating method（about 76.3MPa）.During the process of extrusion,the oxidation film was extruded to crush and the metal was extruded through the micro-cracks of the oxidation film,then the two surfaces were joined together.Altogether,the results showed that extrusion at near-eutectic temperature is favorable for achieving a high-quality metallurgical bonded interface.
文摘This paper introduces a type of out-of-plane microelectrothermal actuator, which is based on the principle of bimetal film thermal expansion in the fuse. A polymer SU-8 material and nickel are used as the functional and structural materials of the actuator. Through heating the resistance wire using electricity, the actuator produces out-of-plane motion in the perpendicular axial direction of the device and the bias layer contact with the substrate, completing signal output. Using Coventorware software to establish the three-dimensional model, the geometric structure is optimized and the electrothermal capabilities are determined theoretically. From electrothermal ana- lysis, the actuator＇s displacement is 18 #m and the temperature rises from 300 to 440 K under a voltage of 5 V and the response time is 5 ms. The actuator＇s displacement is 20μm under a 100000 m/s2 acceleration in the accelerating field. In the coupled field, applying a 3 V voltage, the initial temperature is 300 K, while the acceleration is 50000 m/s2, the driving displacement of the actuator is 23μm, and temperature rises to 400 K. Finally, through checking the stress in different field sources, the maximum stress of the actuator is smaller than the allowable stress of nickel. The results show that the electrothermal actuator has high reliability.
