This paper reviews the recent progress on bionic microelectromechanical systems(MEMS)used for touching and hearing sensations,focusing on the following three types of devices:MEMS tactile sensors,MEMS directional micr...This paper reviews the recent progress on bionic microelectromechanical systems(MEMS)used for touching and hearing sensations,focusing on the following three types of devices:MEMS tactile sensors,MEMS directional microphones,and MEMS vector hydrophones.After reviewing the electromechanical coupling principles,design,and performance of these MEMS devices,the authors conclude that it is vital for future research efforts in bionic MEMS to focus more on microfabrication technologies.The development of robust microfabrication flows is the basis to implement hybrid electromechanical coupling principles based on novel functional materials.High-quality polymeric micromachining technologies can also significantly enhance the potential of existing bionic MEMS designs for more practical applications.展开更多
A biomimetic three-dimensional piezoresistive vibration sensor based on MEMS technology is reported. The mechanical properties of the sensor are analyzed and the static and dynamic characteristics of the sensor are si...A biomimetic three-dimensional piezoresistive vibration sensor based on MEMS technology is reported. The mechanical properties of the sensor are analyzed and the static and dynamic characteristics of the sensor are simulated by ANSYS Workbenchl2.0. The structure was made by MEMS processes including lithography, ion implantation, PECVD, etching, etc. Finally, the sensor is tested by using a TV5220 sensor auto calibration system. The results show that the lowest sensitivity of the sensor is 394.7μV/g and can reach up to 460.2 μV/g, and the dimension coupling is less than 0.6152%, and the working frequency range is 0-1000 Hz.展开更多
文摘This paper reviews the recent progress on bionic microelectromechanical systems(MEMS)used for touching and hearing sensations,focusing on the following three types of devices:MEMS tactile sensors,MEMS directional microphones,and MEMS vector hydrophones.After reviewing the electromechanical coupling principles,design,and performance of these MEMS devices,the authors conclude that it is vital for future research efforts in bionic MEMS to focus more on microfabrication technologies.The development of robust microfabrication flows is the basis to implement hybrid electromechanical coupling principles based on novel functional materials.High-quality polymeric micromachining technologies can also significantly enhance the potential of existing bionic MEMS designs for more practical applications.
基金supported by the National High Technology Research and Development Program of China(No.2011AA040404)the Young Scientists Fund of the National Natural Science Foundation of China(No.51205374)the Special Funds of the National Natural Science Foundation of China(No.61127008)
文摘A biomimetic three-dimensional piezoresistive vibration sensor based on MEMS technology is reported. The mechanical properties of the sensor are analyzed and the static and dynamic characteristics of the sensor are simulated by ANSYS Workbenchl2.0. The structure was made by MEMS processes including lithography, ion implantation, PECVD, etching, etc. Finally, the sensor is tested by using a TV5220 sensor auto calibration system. The results show that the lowest sensitivity of the sensor is 394.7μV/g and can reach up to 460.2 μV/g, and the dimension coupling is less than 0.6152%, and the working frequency range is 0-1000 Hz.
