Based on cavity resonance and sandwich composite plate （3D） theoretical model for frequency dispersion characterization theory, this paper presents a universal three-dimensional and displacement profile shapes of th...Based on cavity resonance and sandwich composite plate （3D） theoretical model for frequency dispersion characterization theory, this paper presents a universal three-dimensional and displacement profile shapes of the film bulk acoustic resonator （FBARs）. This model provides results of FBAR excited thickness-extensional and flexure modes, and the result of frequency dispersion is proposed in which the thicknesses and impedance of the electrodes and the piezoelectric material are taken into consideration; its further simplification shows good agreement with the modified Butterworth-Van-Dyke （MBVD） model. The displacement profile reflects the vibration stress distribution of electrode shapes and the lateral resonance effect, which depends on the axis ratio of the electrode shapes a/b. The results are consistent with the 3D finite element method modeling and laser interferometry measurement in general.展开更多
Tunable and switchable Ba 0.5 Sr 0.5 TiO 3 film bulk acoustic resonators（FBARs） based on SiO 2 /Mo Bragg reflectors are explored,which can withstand high temperature for the deposition of Ba x Sr 1 x TiO 3（BST） fi...Tunable and switchable Ba 0.5 Sr 0.5 TiO 3 film bulk acoustic resonators（FBARs） based on SiO 2 /Mo Bragg reflectors are explored,which can withstand high temperature for the deposition of Ba x Sr 1 x TiO 3（BST） films at 800 C.The dc bias-dependent resonance may be attributed to the piezoelectricity of the BST film induced by an electrostrictive effect.The series resonant frequency is strongly dc bias-dependent and shifts downwards with dc bias increasing,while the parallel resonant frequency is only weakly dc bias-dependent and slightly shifts upwards at low dc bias（ 45 V） while downwards at higher dc bias.The calculated relative tunability of shifts at series resonance frequency is around 2.3% and the electromechanical coupling coefficient is up to approximately 8.09% at 60-V dc bias,which can be comparable to AlN FBARs.This suggests that a high-quality tunable BST FBAR device can be achieved through the use of molybdenum（Mo） as the high acoustic impedance layer in a Bragg reflector,which not only provides excellent acoustic isolation from the substrate,but also improves the crystallinity of BST films withstanding higher deposition temperature.展开更多
Contactless acoustic manipulation of micro/nanoscale particles has attracted considerable attention owing to its near independence of the physical and chemical properties of the targets,making it universally applicabl...Contactless acoustic manipulation of micro/nanoscale particles has attracted considerable attention owing to its near independence of the physical and chemical properties of the targets,making it universally applicable to almost all biological systems.Thin-film bulk acoustic wave(BAW)resonators operating at gigahertz(GHz)frequencies have been demonstrated to generate localized high-speed microvortices through acoustic streaming effects.Benefitting from the strong drag forces of the high-speed vortices,BAW-enabled GHz acoustic streaming tweezers(AST)have been applied to the trapping and enrichment of particles ranging in size from micrometers to less than 100 nm.However,the behavior of particles in such 3D microvortex systems is still largely unknown.In this work,the particle behavior(trapping,enrichment,and separation)in GHz AST is studied by theoretical analyses,3D simulations,and microparticle tracking experiments.It is found that the particle motion in the vortices is determined mainly by the balance between the acoustic streaming drag force and the acoustic radiation force.This work can provide basic design principles for AST-based lab-on-a-chip systems for a variety of applications.展开更多
The blood–brain barrier(BBB)is a structural and functional barrier necessary for brain homeostasis,and it plays an important role in the realization of neural function and in protecting the brain from damage by circu...The blood–brain barrier(BBB)is a structural and functional barrier necessary for brain homeostasis,and it plays an important role in the realization of neural function and in protecting the brain from damage by circulating toxins and pathogens.However,the extremely dense BBB also severely limits the transport of molecules across it,which is a great hindrance to the diagnosis and treatment of central nervous system(CNS)diseases.This paper reports a new method for controllable opening of the BBB,based on the gigahertz acoustic streaming(AS)generated by a bulk acoustic wave resonant device.By adjusting the input power and working distance of the device,AS with tunable flow rate can be generated to disrupt tight junction proteins(TJs)between endothelial cells.The results obtained with this method show that the gigahertz AS promotes the penetration of dextran molecules with different molecular weights across the BBB.This work provides a new platform for studying the mechanical regulation of BBB by fluid shear forces and a new method for improving the efficiency of drug delivery.展开更多
基金supported by the National Natural Science Foundation of China(Grant No.61275081)
文摘Based on cavity resonance and sandwich composite plate （3D） theoretical model for frequency dispersion characterization theory, this paper presents a universal three-dimensional and displacement profile shapes of the film bulk acoustic resonator （FBARs）. This model provides results of FBAR excited thickness-extensional and flexure modes, and the result of frequency dispersion is proposed in which the thicknesses and impedance of the electrodes and the piezoelectric material are taken into consideration; its further simplification shows good agreement with the modified Butterworth-Van-Dyke （MBVD） model. The displacement profile reflects the vibration stress distribution of electrode shapes and the lateral resonance effect, which depends on the axis ratio of the electrode shapes a/b. The results are consistent with the 3D finite element method modeling and laser interferometry measurement in general.
基金Project supported by the National Natural Science Foundation of China (Grant Nos. 60871049 and 50972024)
文摘Tunable and switchable Ba 0.5 Sr 0.5 TiO 3 film bulk acoustic resonators（FBARs） based on SiO 2 /Mo Bragg reflectors are explored,which can withstand high temperature for the deposition of Ba x Sr 1 x TiO 3（BST） films at 800 C.The dc bias-dependent resonance may be attributed to the piezoelectricity of the BST film induced by an electrostrictive effect.The series resonant frequency is strongly dc bias-dependent and shifts downwards with dc bias increasing,while the parallel resonant frequency is only weakly dc bias-dependent and slightly shifts upwards at low dc bias（ 45 V） while downwards at higher dc bias.The calculated relative tunability of shifts at series resonance frequency is around 2.3% and the electromechanical coupling coefficient is up to approximately 8.09% at 60-V dc bias,which can be comparable to AlN FBARs.This suggests that a high-quality tunable BST FBAR device can be achieved through the use of molybdenum（Mo） as the high acoustic impedance layer in a Bragg reflector,which not only provides excellent acoustic isolation from the substrate,but also improves the crystallinity of BST films withstanding higher deposition temperature.
基金The authors gratefully acknowledge financial support from the National Key R&D Program of China(2018YFE0118700)the Natural Science Foundation of China(NSFC No.62174119)+1 种基金Tianjin Applied Basic Research and Advanced Technology(17JCJQJC43600)the 111 Project(B07014).
文摘Contactless acoustic manipulation of micro/nanoscale particles has attracted considerable attention owing to its near independence of the physical and chemical properties of the targets,making it universally applicable to almost all biological systems.Thin-film bulk acoustic wave(BAW)resonators operating at gigahertz(GHz)frequencies have been demonstrated to generate localized high-speed microvortices through acoustic streaming effects.Benefitting from the strong drag forces of the high-speed vortices,BAW-enabled GHz acoustic streaming tweezers(AST)have been applied to the trapping and enrichment of particles ranging in size from micrometers to less than 100 nm.However,the behavior of particles in such 3D microvortex systems is still largely unknown.In this work,the particle behavior(trapping,enrichment,and separation)in GHz AST is studied by theoretical analyses,3D simulations,and microparticle tracking experiments.It is found that the particle motion in the vortices is determined mainly by the balance between the acoustic streaming drag force and the acoustic radiation force.This work can provide basic design principles for AST-based lab-on-a-chip systems for a variety of applications.
基金financial support from the National Natural Science Foundation of China(Grant No.61971302)。
文摘The blood–brain barrier(BBB)is a structural and functional barrier necessary for brain homeostasis,and it plays an important role in the realization of neural function and in protecting the brain from damage by circulating toxins and pathogens.However,the extremely dense BBB also severely limits the transport of molecules across it,which is a great hindrance to the diagnosis and treatment of central nervous system(CNS)diseases.This paper reports a new method for controllable opening of the BBB,based on the gigahertz acoustic streaming(AS)generated by a bulk acoustic wave resonant device.By adjusting the input power and working distance of the device,AS with tunable flow rate can be generated to disrupt tight junction proteins(TJs)between endothelial cells.The results obtained with this method show that the gigahertz AS promotes the penetration of dextran molecules with different molecular weights across the BBB.This work provides a new platform for studying the mechanical regulation of BBB by fluid shear forces and a new method for improving the efficiency of drug delivery.
