A new method for fabricating electroabsorption modulator integrated with a distributed feedback laser(EML) was proposed.With the method we fabricated a selective area growth double stack active layer EML(SAG-DSAL-EML)...A new method for fabricating electroabsorption modulator integrated with a distributed feedback laser(EML) was proposed.With the method we fabricated a selective area growth double stack active layer EML(SAG-DSAL-EML).Through comparing with other fabrication methods of EMLs,the characters and the merits of the new method presented in this paper were discussed.展开更多
基金Supported by the National High-Tech Research and Development Program of China (Grant Nos.2001AA312050,2005AA31g060 and 2007AA-03Z417)
文摘A new method for fabricating electroabsorption modulator integrated with a distributed feedback laser(EML) was proposed.With the method we fabricated a selective area growth double stack active layer EML(SAG-DSAL-EML).Through comparing with other fabrication methods of EMLs,the characters and the merits of the new method presented in this paper were discussed.