Flexible capacitive pressure sensor based on interdigital electrodes with porous microneedle arrays for physiological signal monitoring

Flexible pressure sensors have many potential applications in the monitoring of physiological signals because of their good biocompatibil-ity and wearability.However,their relatively low sensitivity,linearity,and stability have hindered their large-scale commercial application.Herein,aflexible capacitive pressure sensor based on an interdigital electrode structure with two porous microneedle arrays(MNAs)is pro-posed.The porous substrate that constitutes the MNA is a mixed product of polydimethylsiloxane and NaHCO3.Due to its porous and interdigital structure,the maximum sensitivity(0.07 kPa-1)of a porous MNA-based pressure sensor was found to be seven times higher than that of an imporous MNA pressure sensor,and it was much greater than that of aflat pressure sensor without a porous MNA structure.Finite-element analysis showed that the interdigital MNA structure can greatly increase the strain and improve the sensitivity of the sen-sor.In addition,the porous MNA-based pressure sensor was found to have good stability over 1500 loading cycles as a result of its bilayer parylene-enhanced conductive electrode structure.Most importantly,it was found that the sensor could accurately monitor the motion of afinger,wrist joint,arm,face,abdomen,eye,and Adam’s apple.Furthermore,preliminary semantic recognition was achieved by monitoring the movement of the Adam’s apple.Finally,multiple pressure sensors were integrated into a 33 array to detect a spatial pressure distribu-×tion.Compared to the sensors reported in previous works,the interdigital electrode structure presented in this work improves sensitivity and stability by modifying the electrode layer rather than the dielectric layer.

Progress of Proximity Sensors for Potential Applications in Electronic Skins

Recently,electronic skins and fl exible wearable devices have been developed for widespread applications in medical monitoring,artifi cial intelligence,human–machine interaction,and artifi cial prosthetics.Flexible proximity sensors can accurately perceive external objects without contact,introducing a new way to achieve an ultrasensitive perception of objects.This article reviews the progress of fl exible capacitive proximity sensors,fl exible triboelectric proximity sensors,and fl exible gate-enhanced proximity sensors,focusing on their applications in the electronic skin fi eld.Herein,their working mechanism,materials,preparation methods,and research progress are discussed in detail.Finally,we summarize the future challenges in developing fl exible proximity sensors.

A novel method for simulating nuclear explosion with chemical explosion to form an approximate plane wave: Field test and numerical simulation

A nuclear explosion in the rock mass medium can produce strong shock waves,seismic shocks,and other destructive effects,which can cause extreme damage to the underground protection infrastructures.With the increase in nuclear explosion power,underground protection engineering enabled by explosion-proof impact theory and technology ushered in a new challenge.This paper proposes to simulate nuclear explosion tests with on-site chemical explosion tests in the form of multi-hole explosions.First,the mechanism of using multi-hole simultaneous blasting to simulate a nuclear explosion to generate approximate plane waves was analyzed.The plane pressure curve at the vault of the underground protective tunnel under the action of the multi-hole simultaneous blasting was then obtained using the impact test in the rock mass at the site.According to the peak pressure at the vault plane,it was divided into three regions:the stress superposition region,the superposition region after surface reflection,and the approximate plane stress wave zone.A numerical simulation approach was developed using PFC and FLAC to study the peak particle velocity in the surrounding rock of the underground protective cave under the action of multi-hole blasting.The time-history curves of pressure and peak pressure partition obtained by the on-site multi-hole simultaneous blasting test and numerical simulation were compared and analyzed,to verify the correctness and rationality of the formation of an approximate plane wave in the simulated nuclear explosion.This comparison and analysis also provided a theoretical foundation and some research ideas for the ensuing study on the impact of a nuclear explosion.

A Novel Uniplanar Multi-Electrode Capacitive Sensor for In-Situ Weathering Damage Detection of Nonmetallic Materials

A uniplanar capacitive sensor with 5-electrodes on one plane substrate and a large reflector electrode,was designed to get the corresponding capacitance information for weathering damage detection of non-metallic materials exposed to a service environment.A 2-D finite-element method was employed to simulate the electric potential distribution and capacitance measurements for the sensor.2 marble slabs,one was healthy and the other was notched,were experimentally detected.Both the simulation and the preliminary experimental results show that the measured capacitances decrease after weathering damage occurs in nonmetallic material.The reflector can enlarge the sensitive depth.The weathering assessment of nonmetallic materials can be done by processing the measured capacitances.The proposed approach can effectively detect the weathering damage of nonmetallic material and can be practically used for in-situ weathering damage evaluation.

State-of-the-art and recent developments in micro/nanoscale pressure sensors for smart wearable devices and health monitoring systems

Small-sized,low-cost,and high-sensitivity sensors are required for pressure-sensing applications because of their critical role in consumer electronics,automotive applications,and industrial environments.Thus,micro/nanoscale pressure sensors based on micro/nanofabrication and micro/nanoelectromechanical system technologies have emerged as a promising class of pressure sensors on account of their remarkable miniaturization and performance.These sensors have recently been developed to feature multifunctionality and applicability to novel scenarios,such as smart wearable devices and health monitoring systems.In this review,we summarize the major sensing principles used in micro/nanoscale pressure sensors and discuss recent progress in the development of four major categories of these sensors,namely,novel material-based,flexible,implantable,and selfpowered pressure sensors.

Recent progress in flexible capacitive sensors:Structures and properties

The future intelligent era that will be brought about by 5G technology can be well predicted.For example,the connection between humans and smart wearable devices will become increasingly more intimate.Flexible wearable pressure sensors have received much attention as a part of this process.Nevertheless,there is a lack of complete and detailed discussion on the recent research status of capacitive pressure sensors composed of polymer composites.Therefore,this article will mainly discuss the key concepts,preparation methods and main performance of flexible wearable capacitive sensors.The concept of a processing“toolbox”is used to review the developmental status of the dielectric layer as revealed in highly cited literature from the past five years.The preparation methods are categorized into types of processing:primary and secondary.Using these categories,the preparation methods and structure of the dielectric layer are discussed.Their influence on the final capacitive sensing behavior is also addressed.Recent developments in the electrode layer are also systematically reviewed.Finally,the results of the above discussion are summarized and future development trends are discussed.

Optical sensors based on the NiPc-CoPc composite films deposited by drop casting and under the action of centrifugal force

In this study, solution processed composite films of nickel phthalocyanine（NiPc） and cobalt phthalocyanine（CoPc）are deposited by drop casting and under centrifugal force. The films are deposited on surface-type inter-digitated silver electrodes on ceramic alumina substrates. The effects of illumination on the impedance and capacitance of the NiPc–CoPc composite samples are investigated. The samples deposited under centrifugal force show better conductivity than the samples deposited by drop casting technique. In terms of impedance and capacitance sensitivities the samples fabricated under centrifugal force are more sensitive than the drop casting samples. The values of impedance sensitivity（Sz）are equal to（-1.83） MΩ·cm^2/mW and（-5.365） MΩ·cm^2/mW for the samples fabricated using drop casting and under centrifugal force, respectively. Similarly, the values of capacitance sensitivity（Sc） are equal to 0.083 pF·cm^2/mW and 0.185 pF·cm～2/mW for the samples fabricated by drop casting and under centrifugal force. The films deposited using the different procedures could potentially be viable for different operational modes（i.e., conductive or capacitive） of the optical sensors. Both experimental and simulated results are discussed.

Improvement of High Dynamic Range Capacitive Displacement Sensor by a Globalm Planarization

This study presents an improvement of high dynamic range contact-type capacitive displacement sensor by applying planarization. The sensor is called the contact-type linear encoder-like capacitive displacement sensor (CLECDiS), is a nano-meter-resolution sensor with a wide dynamic range. However, height differences due to patterned electrodes may cause a variety of problems or performance degradation. In devices of two glass wafer surfaces with patterned structures assembled face-to-face and in sliding contact, the heights of the patterns crucially affect their performance and practicality, so it should be planarized for reducing the problem. A number of techniques for planarizing glass wafer surfaces with patterned chrome electrodes were evaluated and the following three were selected as adequate: lift-off, etch-back, and chemical mechanical polishing (CMP). The fabricated samples showed that CMP provided the best planarization. CMP was successfully employed to produce CLECDiS with improved signal reliability due to reduced collisions between electrodes.

Complete Focal Plane Compression Based on CMOS Image Sensor Using Predictive Coding

In this paper, a CMOS image sensor(CIS) is proposed, which can accomplish both decorrelation and entropy coding of image compression directly on the focal plane. The design is based on predictive coding for image decorrelation. The predictions are performed in analog domain by 2×2 pixel units. Both the prediction residuals and original pixel values are quantized and encoded in parallel. Since the residuals have a peak distribution around zero,the output codewords can be replaced by the valid part of the residuals' binary mode. The compressed bit stream is accessible directly at the output of CIS without extra disposition. Simulation results show that the proposed approach achieves a compression rate of 2. 2 and PSNR of 51 on different test images.

Nondestructive testing method of wood moisture content based on a planar capacitance sensor model

For our research, a new hybrid experimental-computational method is presented. We applied a least squares fitting method （LSFM） to reconstruct the wood moisture content （WMC） from the data measured with a planar capacitance sensor. A boundary element method （BEM） was used to compute the relationship between capacitance and the dielectric constant. A functional relationship between MC and the dielectric constant was identified by LSFM. The agreement of this final computation result with the experimental data indicates that this method can be used to estimate the WMC quickly and effectively with engineering analysis. Compared with popular statistical methods, a large number of experiments are avoided, some costs of testing are reduced and the efficiency of testing is enhanced.

Novel pressure and displacement sensors based on carbon nanotubes

We report newly designed pressure and displacement capacitive sensors based on a flexible paper–CNT structure.The carbon nanotube（CNT） powder was deposited on a thin paper substrate and was pressed at an elevated temperature.The sheet resistance of the paper–CNT films was in the range of 2–4 kΩ/cm^2. The paper–CNT films were used to fabricate pressure and displacement sensors. The sensitivities of the pressure and the displacement sensors were found to be17.3 p F·m^2/k N and 0.93 10-3p F/μm, respectively. The experimental results were compared with the simulated data and they found good agreement with each other.

The Study of Condensation Processes in the Low-Temperature Short Heat Pipes with a Nozzle-Shaped Vapour Channel

The results of researches of condensation processes in the vapour channel similar to the Laval nozzle of short linear heat pipes are presented. Capacitive sensors are additionally installed in cooled top covers of the heat pipes, and electromagnetic pulses were supplied to them from the external generator. At heating the heat pipe evaporator, starting from a certain thermal power threshold value, electromagnetic pulses became modulated. It is related with the formations of the boiling process in the capillary-porous evaporator and large amount of vapour over it. Boiling process results in rapid increase of the pressure under which the average temperature of the evaporator occurs to be less than the boiling temperature of the working fluid under increased pressure. Considering condensation of excess vapour, this leads to repeated initiation and extinction of the boiling process in the evaporator, which reflects in pressure pulsations in the vapour channel. Pressure pulsations cause modulating effect on electromagnetic impulses. Pulsations frequencies are measured as well as their dependence from overheating of the evaporator. Using the capacitive sensors and a special electronic equipment we measured the local thickness of the working fluid at the condensing surface inside the heat pipes. Time-averaged values of the condensate film thickness are measured, depending on the heat load on the capillary-porous evaporator. The measurement error does not exceed 2 × 10–3 mm. It is demonstrated that the condensate film thickness lessens sharply with the increase of the heat load on the evaporator of a Laval-like low-temperature heat pipe, while the heat resistance of the film on the condensing surface reaches 60% of the total heat resistance of heat pipe with the capillary-porous evaporator.

Modeling on monitoring the growth and rupture assessment of saccular aneurysms

The unpredictable rupture of saccular aneurysms especially of the intracerebral aneurysm is a knotty problem that always results in high mortality. Traditional diagnosis of medical images, which gives the aneurysm size and compares with a speculated critical size from clinical statistics, was demonstrated inadequate to forecasting rupture. Here, we propose a new detecting strategy that uses a dielectric elastomer （DE） capacitance sensor to monitor the growth of saccular aneurysms and deliver both the wall stress and geometric parameters, Based on the elastic growth theory together with the finite deformation analyses, the correlation between the real-time output capacitance of the DE sensor and the wall stress and/or geometry of an aneurysm is derived. Compared to clinic statistics and biomechanics simulations, the wall stress and geometric size may be used as combined indicators to assess the rupture risk of a saccular aneurysm, Numerical results show that an output relative capacitance of 30 indicates a high risk of rupture, Finally, the sensitivity and resolution of the DE sensor are proved adequately high for monitoring the growth state and evaluating the rupture risk of a saccular aneurysm.

Dielectric Properties of Capacitive-Type Humidity Sensor Made under Different Pressures

Capacitive humidity sensors were made of nanometer barium titanate.The pellets were prepared under different pressures between 3920N to 7850N force.The capacitance changes in three orders of magnitude in the relative humidity range of 10%～98%,indicating high humidity sensitivity of the sensors.At a certain measuring frequency,the capacitance of the sensors increases as increasing of the preparation pressure,while the sensitivity of the sensors basically remains the same.The frequencies corresponding to the peaks of the dielectric loss of the sensors move to the higher frequency direction as increasing of the relative humidity.At a certain humidity,the frequencies corresponding to the peaks of the dielectric loss move to the higher frequency direction as increasing of the preparation pressure.

MOS-based model of four-transistor CMOS image sensor pixels for photoelectric simulation

By using the MOS-based model established in this paper, the physical process of photoelectron generation, transfer,and storage in the four-transistor active pixel sensor(4 T-APS) pixels can be simulated in SPICE environment. The variable capacitance characteristics of double junctions in pinned photodiodes(PPDs) and the threshold voltage difference formed by channel nonuniform doping in transfer gates(TGs) are considered with this model. The charge transfer process of photogenerated electrons from PPDs to the floating diffusion(FD) is analyzed, and the function of nonuniform doping of TGs in suppressing charge injection back to PPDs is represented with the model. The optical and electrical characteristics of all devices in the pixel are effectively combined with the model. Moreover, the charge transfer efficiency and the voltage variation in PPD can be described with the model. Compared with the hybrid simulation in TCAD and the Verilog-A simulation in SPICE, this model has higher simulation efficiency and accuracy, respectively. The effectiveness of the MOS-based model is experimentally verified in a 3 μm test pixel designed in 0.11 μm CIS process.

Textile-Based Capacitive Pressure Distribution Measurement System for Human Sitting Posture Monitoring

Flexible pressure monitoring device can help correct the sitting posture and prevent health problems(e.g.,deformity of spinal column and musculoskeletal disease).Currently,most measurement systems hinder their wide applications owing to the high cost or low accuracy.In this study,a flexible sitting pressure measurement system was proposed based on a textile-based capacitive pressure sensor array in order to measure sitting pressure distribution simply and conveniently.The capacitive pressure sensor array is sandwich structure composed of a high-density sponge layer and two electrode array fabrics,which possesses high resolution(2.26 sensors/cm2),high sensitivity(0.701 kPa-1)and fast response(≤35 ms).It is worth noting that the raw materials of the sensing fabric include commercialized copper sheets and polyester yarns.The as-prepared pressure measurement system can accurately measure the pressure distribution nephogram for sitting posture analysis.The sitting pressure of 10 volunteers was measured and six types of posture were distinguished clearly.

Design of capacitance sensor system for void fraction measurement

Simulation and optimization were applied to a capacitive sensor system based on electrical tomography technology. Sensors, consisting of Morgantown Energy Technology Center (METC) axial synchro driving guard electrodes and two sets of detecting electrodes, make it possible to obtain simultaneously two groups of signals of the void fraction in oil-gas two-phase flow. The computational and experimental results showed that available sensors, charactered by high resolution and fast real-time response can be used for real-time liquid-gas two-phase flow pattern determination.

Sensor monitoring and online measurement correction in electric capacitance tomography system

The recalibration of electrical capacitance tomography (ECT) system is one of the key problems in keeping the system running steadily.However, for engineering application in solids/gas transport,online calibration can not be implemented and the data from this sensor may be unreliable due to the sensor pipe interior wall abrasion during pneumatic transport,so the solids concentration calculated from the reconstructed image based on these data will be highly inaccurate.The simulations show that, the inter-electrode relative capacitance variation of electrode pair spacing 1 is the most sensitive to the abrasion of sensor pipe interior wall, so this relative capacitance variation when the sensor is filled with air can be used as an indicator demanding offline system recalibration when the wall abrasion goes significant.Furthermore, while the pipe interior wall abrasion is not very serious, online correcting measured inter-electrode capacitance with wall capacitance variation can improve the accuracy of concentration calculation.

Simulation Study of CMUT for Pressure Sensing Applications

Capacitive micromechanical ultrasonic transducers(CMUTs)have been widely studied because they can be used as substitutes for piezoelectric ultrasonic transducers in imaging applications.However,it is unclear whether and how CMUTs can be developed for sensors incorporating other functions.For instance,researchers have proposed the use of CMUTs for pressure sensing,but fundamental and practical application issues remain unsolved.This study explored ways in which a pressure sensor can be properly developed based on a CMUT prototype using a simulation approach.A three-dimensional finite element model of CMUTs was designed using the COMSOL Multiphysics software by combining the working principle of CMUTs with pressure sensing characteristics in which the resonance frequency of the CMUT cell shifts accordingly when it is subjected to an external pressure.Simultaneously,when subjected to pressure,the CMUT membrane deforms,thus the pressure can be reflected by the change in the capacitance.

A bionic approach for the mechanical and electrical decoupling of an MEMS capacitive sensor in ultralow force measurement

Capacitive sensors are efficient tools for biophysical force measurement,which is essential for the exploration of cellular behavior.However,attention has been rarely given on the influences of external mechanical and internal electrical interferences on capacitive sensors.In this work,a bionic swallow structure design norm was developed for mechanical decoupling,and the influences of structural parameters on mechanical behavior were fully analyzed and optimized.A bionic feather comb distribution strategy and a portable readout circuit were proposed for eliminating electrostatic interferences.Electrostatic instability was evaluated,and electrostatic decoupling performance was verified on the basis of a novel measurement method utilizing four complementary comb arrays and applicationspecific integrated circuit readouts.An electrostatic pulling experiment showed that the bionic swallow structure hardly moved by 0.770 nm,and the measurement error was less than 0.009% for the area-variant sensor and 1.118% for the gap-variant sensor,which can be easily compensated in readouts.The proposed sensor also exhibited high resistance against electrostatic rotation,and the resulting measurement error dropped below 0.751%.The rotation interferences were less than 0.330 nm and(1.829×10^(-7))°,which were 35 times smaller than those of the traditional differential one.Based on the proposed bionic decoupling method,the fabricated sensor exhibited overwhelming capacitive sensitivity values of 7.078 and 1.473 pF/μm for gap-variant and area-variant devices,respectively,which were the highest among the current devices.High immunity to mechanical disturbances was maintained simultaneously,i.e.,less than 0.369% and 0.058% of the sensor outputs for the gap-variant and area-variant devices,respectively,indicating its great performance improvements over existing devices and feasibility in ultralow biomedical force measurement.