Planarization mechanism of alkaline copper CMP slurry based on chemical mechanical kinetics

The planarization mechanism of alkaline copper slurry is studied in the chemical mechanical polishing （CMP） process from the perspective of chemical mechanical kinetics.Different from the international dominant acidic copper slurry,the copper slurry used in this research adopted the way of alkaline technology based on complexation. According to the passivation property of copper in alkaline conditions,the protection of copper film at the concave position on a copper pattern wafer surface can be achieved without the corrosion inhibitors such as benzotriazole（BTA）,by which the problems caused by BTA can be avoided.Through the experiments and theories research,the chemical mechanical kinetics theory of copper removal in alkaline CMP conditions was proposed. Based on the chemical mechanical kinetics theory,the planarization mechanism of alkaline copper slurry was established. In alkaline CMP conditions,the complexation reaction between chelating agent and copper ions needs to break through the reaction barrier.The kinetic energy at the concave position should be lower than the complexation reaction barrier,which is the key to achieve planarization.

Experimental and numerical study of combustion characteristics of ammonia-hydrogen-air swirling flame with/without secondary air injection

Ammonia (NH_(3)) is currently considered to be a potential carbon-free alternative fuel,and its large-scale use as such would certainly decrease greenhouse gas emissions and meet increasingly stringent emission requirements.Although the low flame propagation speed and high NO production of NH_(3) hinder its direct application as a renewable fuel,co-combustion of NH_(3)–H_(2)is an effective way to overcome these challenges.In this study,the combustion characteristics of NH_(3)–H_(2)swirling flames under different equivalence ratios and H_2blending ratios conditions are both numerically and experimentally investigated.Numerically,the One-Dimensional (1D) laminar flame computation presents a comparison base and the Three-Dimensional (3D) numerical simulation yields detailed flame property distributions.Experimentally,the high-speed camera takes instantaneous swirl flame images and the gas analyzer measures the NO emission at the exit plane of the flame chamber.Qualitative and quantitative analysis is performed on the flame structure and NO emission for a series of NH_(3)–H_(2)swirl flames.The variation trends of the NO emission calculated using different techniques agree very well.The quantitative results show that the NO emissions are much higher at lean equivalence ratios than those at rich equivalence ratios,and such difference is closely related to the combustion flame structure.Moreover,it is shown that the utilization of secondary air injection can achieve a significant reduction in NO emissions at the exit of the combustion chamber at equivalence ratios less than or equal to 0.9.