Based on the stability criteria of workpiece-fixture system, quantitative optimization of clamping forces during precise machining process for thin walled part is studied considering the contact condition between wokp...Based on the stability criteria of workpiece-fixture system, quantitative optimization of clamping forces during precise machining process for thin walled part is studied considering the contact condition between wokpiece and locator, the contact mechanical model is achieved, which is further been used to calculate the entire passive forces acting on the statically undetermined workpiece by means of the force screw theory as well as minimum norm force principle. Furthermore, a new methodology to optimize clamping forces is put forward, on the criteria of keeping the stability of workpiece during cutting process. By this way, the intensity of clamping forces is decreased dramatically, which will be most beneficial for improving the machining quality of thin-walled parts. Finally, a case study is used to support and validate the proposed model.展开更多
A numerical model is established by Abaqus software for superalloy during tungsten inert gas (TIG) welding with welding fixture to simulate the weld temperature filed, stress and strain field, and weld plate's hori...A numerical model is established by Abaqus software for superalloy during tungsten inert gas (TIG) welding with welding fixture to simulate the weld temperature filed, stress and strain field, and weld plate's horizontal trasnsveral shift. The clamp force perpendicular to the weld plate varying with welding time was analyzed. The maximum clamp force during welding process was calculated. Under the condition of insufficient of clamping force, a half or one third of the maximum clamp force for example, the weld plate's horizontal transversal displacement could happen and also be computed.展开更多
Associated dynamic performance of the clamping force control valve used in continuously variable transmission (CVT) is optimized. Firstly, the structure and working principle of the valve are analyzed, and then a dy...Associated dynamic performance of the clamping force control valve used in continuously variable transmission (CVT) is optimized. Firstly, the structure and working principle of the valve are analyzed, and then a dynamic model is set up by means of mechanism analysis. For the purpose of checking the validity of the modeling method, a prototype workpiece of the valve is manufactured for comparison test, and its simulation result follows the experimental result quite well. An associated performance index is founded considering the response time, overshoot and saving energy, and five structural parameters are selected to adjust for deriving the optimal associated performance index. The optimization problem is solved by the genetic algorithm (GA) with necessary constraints. Finally, the properties of the optimized valve are compared with those of the prototype workpiece, and the results prove that the dynamic performance indexes of the optimized valve are much better than those of the prototype workpiece.展开更多
Holding an object by clamping force is a fundamental phenomena.Layered or laminated architectures with internal sliding features are essential mechanism in natural and man-made structural system.In this paper,we combi...Holding an object by clamping force is a fundamental phenomena.Layered or laminated architectures with internal sliding features are essential mechanism in natural and man-made structural system.In this paper,we combine the layered architecture and clamping mechanism to form a multilayered clamper and study the clamping force with internal friction.Our investigations show that the clamping force and energy dissipation are very much depend on the number of layers,its geometry and elasticity,as well as internal friction.The central goal of studying the multilayered clamp is not only to predict the clamping force,but also as a representative case to help finding some clue on the universal behaviours of multilayered architectures with internal friction.展开更多
Corrosion is a primary cause of the slippage of friction⁃type high⁃strength bolted(FHSB)T⁃stub connections.This paper attempts to quantify the residual capacity of FHSB T⁃stub connections with corroded nuts.Firstly,co...Corrosion is a primary cause of the slippage of friction⁃type high⁃strength bolted(FHSB)T⁃stub connections.This paper attempts to quantify the residual capacity of FHSB T⁃stub connections with corroded nuts.Firstly,corrosion simulation tests were conducted on 48 manually cut nuts to find out the relationship between the damage degree of nut section and the residual clamping force(RCF)of bolt.Then,static load tests were carried out on 24 FHSB T⁃stub connections with nuts of different degrees of damage to obtain the failure modes.By finite⁃element(FE)models,a comparative analysis was performed on the initial friction load(IFL)and ultimate strength(US)of each connection with corroded nuts.Finally,the parameters of 96 FE models for FHSB T⁃stub connections were analyzed and used to derive the calculation formulas for the degree of damage for each nut and the IFL and US of each connection.The results show that the RCF decay of a bolt is a quadratic function of the equivalent radius loss ratio and the shear failure after nut corrosion;the IFL of each connection had a clear linear correlation with the RCF of the corresponding bolts,and the correlation depends on the applied load and static friction on connecting plate interface induced by the clamping force;the static friction had little impact on the US of the connection;the proposed IFL and US formulas can effectively derive the residual anti⁃slip capacity of FHSB T⁃stub connections from the degree of damage of the corroded nut section.The research results provide a scientific basis for the replacement and maintenance of corroded bolts of FHSB T⁃stub connections.展开更多
The first wall in the Experimental Advanced Superconducting Tokamak (EAST) used graphite tiles to withstand high thermal energy. The graphite tiles are mounted on the heat sink using screw bolts which have been prel...The first wall in the Experimental Advanced Superconducting Tokamak (EAST) used graphite tiles to withstand high thermal energy. The graphite tiles are mounted on the heat sink using screw bolts which have been preloaded to produce a clamp force. The clamp force is very important to keep the graphite tiles tightly on the surface of the heat sink so that the heat flux crosses this contacting surface in a small thermal resistor. Without the clamp force, the small gap between the graphite tiles and the heat sink will make it impossible for thermal power to be carried away by cooling water. Some bolts may even fall off with the loss of clamp force. From the mathematical models, the loss process of the clamp force has been studied. Research results explain how the different thermal expansions of three members of the screw joint makes the clamp force decrease to zero under temperature rise and external force, and how the stiffness affects the relation between the clamp force and temperature. The research also gives the critical temperature at which the clamp force can remain above zero. Analysis results indicate that the current screw joints are almost destined to lose their clamp force during the running time of EAST, so the bolt joints should be redesigned in order to improve its reliability.展开更多
A neck-linker swing model has been proposed in this work to investigate the mechanochemical coupling of kinesin. The difference between force-velocity curves given by force clamp and fixed trap respectively has been s...A neck-linker swing model has been proposed in this work to investigate the mechanochemical coupling of kinesin. The difference between force-velocity curves given by force clamp and fixed trap respectively has been satisfactorily interpreted by this model. The study implies that ADP releasing and ATP hydrolysis are much less forcedependent in force clamp experiments than that in fixed trap experiments in the regime of moderate loading force, which might be a consequence of the delayed response of servo system in force clamp experiments.展开更多
Aiming at the problems of loose bowl,nutritive bowl damage and planting leakage caused by lack of perception and detection of seedling clamping force in vegetable transplanting,a semi-micro-column structure sensor for...Aiming at the problems of loose bowl,nutritive bowl damage and planting leakage caused by lack of perception and detection of seedling clamping force in vegetable transplanting,a semi-micro-column structure sensor for measuring potted seedling clamping force was developed based on polyvinylidene fluoride(PVDF)piezoelectric film.The diameter of the semi-micro-column is 4 mm.The size of the force probe is 14 mm×30 mm,the encapsulation position of the force probe is 25 mm away from the tip of the seedling claw.The hardware circuit for sensor signal acquisition including pre-amplification module,power frequency notch module,low-pass filter module,processor module and power module was designed.The circuit completes charge-voltage conversion,clamping force signal amplification,power frequency signal elimination,vibration and noise elimination,and ensures the accurate acquisition of clamping force signal.In order to verify the sensor performance,sensor calibration tests and indoor experiments were carried out respectively.The calibration tests showed that the sensitivity of the clamping force sensor was 0.5264 V/N,the linearity was 4.74%,the accuracy was 6.51%,the hysteresis was 3.63%,and the range was 8 N under the impact of different waveforms and frequencies,which fully meet the accuracy requirements of the clamping force detection during transplanting.Indoor experiments showed that the clamping force sensor had good stability and adaptability under different seedling frequencies.The sensor can provide useful reference for the perception and detection of seedling clamping force and the feedback regulation of seedling clamping force.展开更多
As one of the core components of IC manufacturing equipment, the electrostatic chuck (ESC) has been widely applied in semiconductor processing such as etching, PVD and CVD. The clamping force of the ESC is one of th...As one of the core components of IC manufacturing equipment, the electrostatic chuck (ESC) has been widely applied in semiconductor processing such as etching, PVD and CVD. The clamping force of the ESC is one of the most important technical indicators. A multi-physics simulation software COMSOL is used to analyze the factors influencing the clamping force. The curves between the clamping force and the main parameters such as DC voltage, electrode thickness, electrode radius, dielectric thickness and helium gap are obtained. Moreover, the effects of these factors on the clamping force are investigated by means oforthogonal experiments. The results show that the factors can be ranked in order of voltage, electrode radius, helium gap and dielectric thickness according to their importance, which may offer certain reference for the design of ESCs.展开更多
Electrostatic chucks are one of the core components of semiconductor devices. As a key index of electrostatic chucks, the clamping force must be controlled within a reasonable range. Therefore, it is essential to accu...Electrostatic chucks are one of the core components of semiconductor devices. As a key index of electrostatic chucks, the clamping force must be controlled within a reasonable range. Therefore, it is essential to accurately measure the clamping force. To reduce the negative factors influencing measurement precision and repeatability, this article presents a novel method to measure the clamping force and we elaborate both the principle and the key procedure. A micro-force probe component is introduced to monitor, adjust, and eliminate the gap between the wafer and the electrostatic chuck. The contact force between the ruby probe and the wafer is selected as an important parameter to characterize de-chucking, and we have found that the moment of de-chucking can be exactly judged. Moreover, this article derives the formula calibrating equivalent action area of backside gas pressure under real working conditions, which can effectively connect the backside gas pressure at the moment of de-chucking and the clamping force. The experiments were then performed on a self-designed measuring platform.The de-chucking mechanism is discussed in light of our analysis of the experimental data. Determination criteria for de-chucking point are summed up. It is found that the relationship between de-chucking pressure and applied voltage conforms well to quadratic equation. Meanwhile, the result reveals that actual de-chucking behavior is much more complicated than the description given in the classical empirical formula.展开更多
In view of the problems of easy damage and high digging resistance in the process of green onion harvesting,a mechanical model of digging green onions was established by taking the moment of digging and drawing green ...In view of the problems of easy damage and high digging resistance in the process of green onion harvesting,a mechanical model of digging green onions was established by taking the moment of digging and drawing green onions as the research object,and the main factors affecting the digging and harvesting effect were determined as the angle of digging,the dip angle of clamping carrier and the length of shovel.Thus,a complex simulation model of soil-green onion-digging mechanism system reflecting the state of harvesting was established,and the model was verified by testing soil compactness.The simulation tests were carried out by means of the complex simulation model of soil-green onion-digging mechanism system,making it clear that digging angle and the length of shovel have a extremely significant impact on the digging resistance,and the dip angle of the clamping carrier had a significant impact on the digging resistance.Through target optimization,the optimal combination of digging parameters was obtained,namely,the digging angle of 20°,the dip angle of clamping carrier of 25°and the shovel length of 70 mm,with the digging resistance of 1394 N at this moment.The field digging resistance test has showed that the average digging resistance is 1543 N with the average clamping damage rate of 1.27%and the average clamping loss rate of 0.44%,which can meet the requirements of green onion harvesting.展开更多
Low stiffness and positioning problems are difficulties and challenges in the precise machining of near-net-shaped blades.This paper aims to achieve high accuracy in manufacturing by fixture-and deformation-control in...Low stiffness and positioning problems are difficulties and challenges in the precise machining of near-net-shaped blades.This paper aims to achieve high accuracy in manufacturing by fixture-and deformation-control in the adaptive CNC machining process.Adaptive CNC machining technology is first analyzed,and new fixture-evaluation criteria and methods to evaluate the adaptive CNC machining process fixture design are built.Second,a machining fixture is designed and manufactured after analyzing its positioning scheme,clamping scheme,materials(PEEK-GF30),and structure characteristics.Finally,the designed fixture is analyzed by FEA and experimentally verified by a cutting experiment.The results show that the deformation of the blade is an overall rigid-body displacement,the main deformation of the blade-fixture system occurs on the four clamping heads,and this fixture can effectively protect the blade from local deformation.The proposed clamping-sequence method reliably and effectively controls the local maximum deformation of the blade.The system stiffness is increased by 20 Hz,with each clamping force increased by 200 N.Both high-and low-frequency displacement in roughing milling or finishing milling are acceptable relative to the accuracy demand of blade machining.This fixture and an adaptive CNC machining process can achieve high accuracy in blade manufacturing.展开更多
One of the core semiconductor devices is the electrostatic chuck. It has been widely used in plasma- based and vacuum-based semiconductor processing. The electrostatic chuck plays an important role in adsorbing and co...One of the core semiconductor devices is the electrostatic chuck. It has been widely used in plasma- based and vacuum-based semiconductor processing. The electrostatic chuck plays an important role in adsorbing and cooling/heating wafers, and has technical advantages on non-edge exclusion, high reliability, wafer planarity, particles reduction and so on. This article extracts key design elements from the existing knowledge and techniques of electrostatic chuck by the method proposed by Paul and Beitz, and establishes a design space systematically. The design space is composed of working objects, working principles and working structures. The working objects in- volve electrostatic chuck components and materials, classifications, and relevant properties; the working principles involve clamping force, residual force, and temperature control; the working structures describe how to compose an electrostatic chuck and to fulfill the overall functions. The systematic design space exhibits the main issues during electrostatic chuck design. The design space will facilitate and inspire designers to improve the design quality and shorten the design time in the conceptual design.展开更多
基金Beijing Municipal Commission of Education Project(XK100070530)
文摘Based on the stability criteria of workpiece-fixture system, quantitative optimization of clamping forces during precise machining process for thin walled part is studied considering the contact condition between wokpiece and locator, the contact mechanical model is achieved, which is further been used to calculate the entire passive forces acting on the statically undetermined workpiece by means of the force screw theory as well as minimum norm force principle. Furthermore, a new methodology to optimize clamping forces is put forward, on the criteria of keeping the stability of workpiece during cutting process. By this way, the intensity of clamping forces is decreased dramatically, which will be most beneficial for improving the machining quality of thin-walled parts. Finally, a case study is used to support and validate the proposed model.
基金supported by the National Natural Science Foundation of China(Grant No.51275496)
文摘A numerical model is established by Abaqus software for superalloy during tungsten inert gas (TIG) welding with welding fixture to simulate the weld temperature filed, stress and strain field, and weld plate's horizontal trasnsveral shift. The clamp force perpendicular to the weld plate varying with welding time was analyzed. The maximum clamp force during welding process was calculated. Under the condition of insufficient of clamping force, a half or one third of the maximum clamp force for example, the weld plate's horizontal transversal displacement could happen and also be computed.
基金Key Science-Technology Foundation of Hunan Province, China (No. 05GK2007).
文摘Associated dynamic performance of the clamping force control valve used in continuously variable transmission (CVT) is optimized. Firstly, the structure and working principle of the valve are analyzed, and then a dynamic model is set up by means of mechanism analysis. For the purpose of checking the validity of the modeling method, a prototype workpiece of the valve is manufactured for comparison test, and its simulation result follows the experimental result quite well. An associated performance index is founded considering the response time, overshoot and saving energy, and five structural parameters are selected to adjust for deriving the optimal associated performance index. The optimization problem is solved by the genetic algorithm (GA) with necessary constraints. Finally, the properties of the optimized valve are compared with those of the prototype workpiece, and the results prove that the dynamic performance indexes of the optimized valve are much better than those of the prototype workpiece.
基金This work was supported by Xi’an University of Architecture and Technology(No.002/2040221134).
文摘Holding an object by clamping force is a fundamental phenomena.Layered or laminated architectures with internal sliding features are essential mechanism in natural and man-made structural system.In this paper,we combine the layered architecture and clamping mechanism to form a multilayered clamper and study the clamping force with internal friction.Our investigations show that the clamping force and energy dissipation are very much depend on the number of layers,its geometry and elasticity,as well as internal friction.The central goal of studying the multilayered clamp is not only to predict the clamping force,but also as a representative case to help finding some clue on the universal behaviours of multilayered architectures with internal friction.
文摘Corrosion is a primary cause of the slippage of friction⁃type high⁃strength bolted(FHSB)T⁃stub connections.This paper attempts to quantify the residual capacity of FHSB T⁃stub connections with corroded nuts.Firstly,corrosion simulation tests were conducted on 48 manually cut nuts to find out the relationship between the damage degree of nut section and the residual clamping force(RCF)of bolt.Then,static load tests were carried out on 24 FHSB T⁃stub connections with nuts of different degrees of damage to obtain the failure modes.By finite⁃element(FE)models,a comparative analysis was performed on the initial friction load(IFL)and ultimate strength(US)of each connection with corroded nuts.Finally,the parameters of 96 FE models for FHSB T⁃stub connections were analyzed and used to derive the calculation formulas for the degree of damage for each nut and the IFL and US of each connection.The results show that the RCF decay of a bolt is a quadratic function of the equivalent radius loss ratio and the shear failure after nut corrosion;the IFL of each connection had a clear linear correlation with the RCF of the corresponding bolts,and the correlation depends on the applied load and static friction on connecting plate interface induced by the clamping force;the static friction had little impact on the US of the connection;the proposed IFL and US formulas can effectively derive the residual anti⁃slip capacity of FHSB T⁃stub connections from the degree of damage of the corroded nut section.The research results provide a scientific basis for the replacement and maintenance of corroded bolts of FHSB T⁃stub connections.
文摘The first wall in the Experimental Advanced Superconducting Tokamak (EAST) used graphite tiles to withstand high thermal energy. The graphite tiles are mounted on the heat sink using screw bolts which have been preloaded to produce a clamp force. The clamp force is very important to keep the graphite tiles tightly on the surface of the heat sink so that the heat flux crosses this contacting surface in a small thermal resistor. Without the clamp force, the small gap between the graphite tiles and the heat sink will make it impossible for thermal power to be carried away by cooling water. Some bolts may even fall off with the loss of clamp force. From the mathematical models, the loss process of the clamp force has been studied. Research results explain how the different thermal expansions of three members of the screw joint makes the clamp force decrease to zero under temperature rise and external force, and how the stiffness affects the relation between the clamp force and temperature. The research also gives the critical temperature at which the clamp force can remain above zero. Analysis results indicate that the current screw joints are almost destined to lose their clamp force during the running time of EAST, so the bolt joints should be redesigned in order to improve its reliability.
基金Supported by National Basic Research Program of China (973 Program) under Grant No. 2007CB935903
文摘A neck-linker swing model has been proposed in this work to investigate the mechanochemical coupling of kinesin. The difference between force-velocity curves given by force clamp and fixed trap respectively has been satisfactorily interpreted by this model. The study implies that ADP releasing and ATP hydrolysis are much less forcedependent in force clamp experiments than that in fixed trap experiments in the regime of moderate loading force, which might be a consequence of the delayed response of servo system in force clamp experiments.
基金sponsored by the National Key Research and Development Program of China Project(No.2016YFD0700100)the National Natural Science Foundation of China(No.51875175)+2 种基金the Key Research and Development Program of Guangdong Province(No.2019B020222004)the Innovation Scientists and Technicians Talent Projects of Henan Provincial Department of Education(No.19HASTIT021)the Innovation Scientists and Technicians Troop Construction Projects of Henan Province(No.184200510017).
文摘Aiming at the problems of loose bowl,nutritive bowl damage and planting leakage caused by lack of perception and detection of seedling clamping force in vegetable transplanting,a semi-micro-column structure sensor for measuring potted seedling clamping force was developed based on polyvinylidene fluoride(PVDF)piezoelectric film.The diameter of the semi-micro-column is 4 mm.The size of the force probe is 14 mm×30 mm,the encapsulation position of the force probe is 25 mm away from the tip of the seedling claw.The hardware circuit for sensor signal acquisition including pre-amplification module,power frequency notch module,low-pass filter module,processor module and power module was designed.The circuit completes charge-voltage conversion,clamping force signal amplification,power frequency signal elimination,vibration and noise elimination,and ensures the accurate acquisition of clamping force signal.In order to verify the sensor performance,sensor calibration tests and indoor experiments were carried out respectively.The calibration tests showed that the sensitivity of the clamping force sensor was 0.5264 V/N,the linearity was 4.74%,the accuracy was 6.51%,the hysteresis was 3.63%,and the range was 8 N under the impact of different waveforms and frequencies,which fully meet the accuracy requirements of the clamping force detection during transplanting.Indoor experiments showed that the clamping force sensor had good stability and adaptability under different seedling frequencies.The sensor can provide useful reference for the perception and detection of seedling clamping force and the feedback regulation of seedling clamping force.
基金Project supported by the National Science and Technology Major Project No.02(No.2011ZX02403)
文摘As one of the core components of IC manufacturing equipment, the electrostatic chuck (ESC) has been widely applied in semiconductor processing such as etching, PVD and CVD. The clamping force of the ESC is one of the most important technical indicators. A multi-physics simulation software COMSOL is used to analyze the factors influencing the clamping force. The curves between the clamping force and the main parameters such as DC voltage, electrode thickness, electrode radius, dielectric thickness and helium gap are obtained. Moreover, the effects of these factors on the clamping force are investigated by means oforthogonal experiments. The results show that the factors can be ranked in order of voltage, electrode radius, helium gap and dielectric thickness according to their importance, which may offer certain reference for the design of ESCs.
基金Project supported by No.02 National Science and Technology Major Project of China(No.2011ZX02403-004)
文摘Electrostatic chucks are one of the core components of semiconductor devices. As a key index of electrostatic chucks, the clamping force must be controlled within a reasonable range. Therefore, it is essential to accurately measure the clamping force. To reduce the negative factors influencing measurement precision and repeatability, this article presents a novel method to measure the clamping force and we elaborate both the principle and the key procedure. A micro-force probe component is introduced to monitor, adjust, and eliminate the gap between the wafer and the electrostatic chuck. The contact force between the ruby probe and the wafer is selected as an important parameter to characterize de-chucking, and we have found that the moment of de-chucking can be exactly judged. Moreover, this article derives the formula calibrating equivalent action area of backside gas pressure under real working conditions, which can effectively connect the backside gas pressure at the moment of de-chucking and the clamping force. The experiments were then performed on a self-designed measuring platform.The de-chucking mechanism is discussed in light of our analysis of the experimental data. Determination criteria for de-chucking point are summed up. It is found that the relationship between de-chucking pressure and applied voltage conforms well to quadratic equation. Meanwhile, the result reveals that actual de-chucking behavior is much more complicated than the description given in the classical empirical formula.
基金sponsored by the National Natural Science Foundation of China(Grant No.52275258)Taishan Scholar Youth Expert Project,Qingdao City Science and Technology to Benefit the People Demonstration and Guidance Special Project(Grant No.22-3-7-xdny-14-nsh)the National Natural Science Foundation of China(Grant No.51775290).
文摘In view of the problems of easy damage and high digging resistance in the process of green onion harvesting,a mechanical model of digging green onions was established by taking the moment of digging and drawing green onions as the research object,and the main factors affecting the digging and harvesting effect were determined as the angle of digging,the dip angle of clamping carrier and the length of shovel.Thus,a complex simulation model of soil-green onion-digging mechanism system reflecting the state of harvesting was established,and the model was verified by testing soil compactness.The simulation tests were carried out by means of the complex simulation model of soil-green onion-digging mechanism system,making it clear that digging angle and the length of shovel have a extremely significant impact on the digging resistance,and the dip angle of the clamping carrier had a significant impact on the digging resistance.Through target optimization,the optimal combination of digging parameters was obtained,namely,the digging angle of 20°,the dip angle of clamping carrier of 25°and the shovel length of 70 mm,with the digging resistance of 1394 N at this moment.The field digging resistance test has showed that the average digging resistance is 1543 N with the average clamping damage rate of 1.27%and the average clamping loss rate of 0.44%,which can meet the requirements of green onion harvesting.
基金supported in part by Xi’an Aero-Engine(Group)Ltd.National Key Scientific Instrument and Equipment Development Project(2016YFF0101900)+1 种基金National Natural Science Foundation of China(Grant 51575310)Beijing Municipal Natural Science Foundation(Grant 3162014)。
文摘Low stiffness and positioning problems are difficulties and challenges in the precise machining of near-net-shaped blades.This paper aims to achieve high accuracy in manufacturing by fixture-and deformation-control in the adaptive CNC machining process.Adaptive CNC machining technology is first analyzed,and new fixture-evaluation criteria and methods to evaluate the adaptive CNC machining process fixture design are built.Second,a machining fixture is designed and manufactured after analyzing its positioning scheme,clamping scheme,materials(PEEK-GF30),and structure characteristics.Finally,the designed fixture is analyzed by FEA and experimentally verified by a cutting experiment.The results show that the deformation of the blade is an overall rigid-body displacement,the main deformation of the blade-fixture system occurs on the four clamping heads,and this fixture can effectively protect the blade from local deformation.The proposed clamping-sequence method reliably and effectively controls the local maximum deformation of the blade.The system stiffness is increased by 20 Hz,with each clamping force increased by 200 N.Both high-and low-frequency displacement in roughing milling or finishing milling are acceptable relative to the accuracy demand of blade machining.This fixture and an adaptive CNC machining process can achieve high accuracy in blade manufacturing.
基金supported by the Ministry of Science and Technology of China(No.2011ZX02403)the National Natural Science Foundation of China(No.51175284)
文摘One of the core semiconductor devices is the electrostatic chuck. It has been widely used in plasma- based and vacuum-based semiconductor processing. The electrostatic chuck plays an important role in adsorbing and cooling/heating wafers, and has technical advantages on non-edge exclusion, high reliability, wafer planarity, particles reduction and so on. This article extracts key design elements from the existing knowledge and techniques of electrostatic chuck by the method proposed by Paul and Beitz, and establishes a design space systematically. The design space is composed of working objects, working principles and working structures. The working objects in- volve electrostatic chuck components and materials, classifications, and relevant properties; the working principles involve clamping force, residual force, and temperature control; the working structures describe how to compose an electrostatic chuck and to fulfill the overall functions. The systematic design space exhibits the main issues during electrostatic chuck design. The design space will facilitate and inspire designers to improve the design quality and shorten the design time in the conceptual design.