Dual Control of Depositional Facies on Uranium Mineralization in Coal-bearing Series： Examples from the Tuanyushan Area of the Northern Qaidam Basin, NW China

The uranium deposits in the Tuanyushan area of northern Qaidam Basin commonly occur in coal-bearing series. To decipher the U-enrichment mechanism and controlling factors in this area, a database of 72 drill cores, including 56 well-logs and 3 sampling wells, was examined for sedimentology and geochemistry in relation to uranium concentrations. The results show that coal-bearing series can influence uranium mineralization from two aspects, i.e., spatial distribution and dynamic control. Five types of uranium-bearing rocks are recognized, mainly occurring in the braided river and braided delta sedimentary facies, among which sandstones near the coals are the most important. The lithological associations of sandstone-type uranium deposits can be classified into three subtypes, termed as U-coal type, coal-U-coal type, and coal-U type, respectively. The coal and fine siliciclastic rocks in the coal- bearing series confined the U-rich fluid flow and uranium accumulation in the sandstone near them. Thus, the coal-bearing series can provide good accommodations for uranium mineralization. Coals and organic matters in the coal-bearing series may have served as reducing agents and absorbing barriers. Methane is deemed to be the main acidolysis hydrocarbon in the U-bearing beds, which shows a positive correlation with U-content in the sandstones in the coal-bearing series. Additionally, the 613C in the carbonate cements of the U-bearing sandstones indicates that the organic matters, associated with the coal around the sandstones, were involved in the carbonation, one important component of alteration in the Tuanyushan area. Recognition of the dual control of coal-bearing series on the uranium mineralization is significant for the development of coal circular economy, environmental protection during coal utilization and the security of national rare metal resources.

Lithiophilic CoF_(2)@C hollow spheres towards spatial lithium deposition for stable lithium metal batteries

Lithium metal(LM)is a promising anode for next-generation batteries due to its high theoretical capacity and low electrode potential.Nonetheless,side reactions,volume change,and unwanted lithium dendrite growth seriously limit the practical application of LM.Herein,with the aid of a hard template approach,a novel lithiophilic CoF_(2)-carbon hollow sphere(CoF_(2)@C-HS)composite material is successfully prepared via a facile in-situ fluorination and etching strategy.The lithiophilic CoF_(2) acts as nucleation sites to reduce nucleation overpotential as well as induces the spatial Li deposition and the formation of LiFrich solid electrolyte interphase(SEI),and the hollow carbon matrix can enhance the electrical conductivity and offer free space for LM deposition.Theoretical simulations reveal that the synergistic effect of lithiophilic CoF_(2) and hollow carbon matrix homogenizes the electric field distribution and Li~+flux.Benefiting from these advantages,the CoF_(2)@C-HS-modified copper substrate electrode delivers an enhanced Coulombic efficiency(CE)of 93.7%for 280 cycles at 1 mA cm^(-2)and 1 mA h cm^(-2).The symmetrical cell using CoF_(2)@C-HS can stably cycle more than 1800 h with a low voltage hysteresis of 11 mV at a current density of 0.5 MA cm^(-2)and an areal capacity of 0.5 mA h cm^(-2).Moreover,the Li@CoF_(2)@C-HS composite anode enables more than 300 stable cycles at 1 C with a capacity retention of 95%in LiFePO_(4)-based full cell and 110 stable cycles at 1 C in LiNi_(0.8)Co_(0.1)Mn_(0.1)O_(2)(NCM811)-based highvoltage full cell.This work might shed a new light on designing lithiophilic hosts to spatially confine LM deposition,realizing dendrite-free LM anodes and the practical applications of LM batteries.

The composition of magmatic-hydrothermal fluids and their related metal mineralization

Magmatic hydrothermal deposits are important sources of many bulk,precious,and rare metals,and have attracted interest from both academic and industrial communities.However,it is still unclear if the major enrichment of the ore-forming metals occurs in the parental magma source region,during the magma evolution,or after the fluid exsolution.Fluid inclusions trapped in hydrothermal minerals crystallized in the early,high-temperature stage before metal precipitation record information close to that of the initially exsolved magmatic fluids,which are helpful in revealing whether the metals have been already significantly enriched prior to the hydrothermal stage.In this study,available compositional data of such early-stage fluid inclusions from magmatic hydrothermal systems globally have been compiled.The results indicate that the concentrations of Cu,Sn,and W respectively from the Cu-,Sn-,and W-mineralized fluids are significantly higher than the hydrothermal systems that do not produce ores with the corresponding metals.This suggests that Cu,Sn,and W could have already been enriched in the magma source and/or magma evolution stage.The Mo concentrations show no difference between Mo-mineralized and Mobarren fluid systems,indicating no significant pre-enrichment in the source region or during the magma evolution.This also implies that an efficient collection of Mo from a large volume of magmas is required to account for the formation of a large Mo deposit.Almost all the hydrothermal fluids contain high concentrations of Fe and Zn-Pb,but only a few of them eventually form Fe or Zn-Pb deposits,reflecting an important role of the hydrothermal evolution process on the selective metal mineralization.The above results indicate that different metals are enriched in different stages of a magmatic hydrothermal system,and that the major roles played in the formation of a deposit vary with the metal types.In addition to the metal concentrations in the orerelated magmas and fluids,other factors(including but not limited to the intrusion shapes,emplacement depths,structural pathways,and wallrock properties)are also critical in determining the fertility and mineralization diversity of a magmatic hydrothermal system.

Relation between Atmospheric Deposition and Accumulation of Heavy Metals in Rice in Mining Areas of Guangxi

Firstly, the concept, sources and damage of atmospheric deposition were introduced, and then the relation between atmospheric deposition and accumulation of heavy metals in rice in Guangxi was analyzed to provide reference for the implementation of effective risk early warning of pollution from heavy metal deposition and safe production of rice in mining areas of Guangxi.

The Ore-forming Mechanism of the Jiajika Pegmatite-Type Rare Metal Deposit in Western Sichuan Province:Evidence from Isotope Dating

Granitic pegmatites are commonly thought to form by fractional crystallization or by liquid immiscibility of granitic magma; however, these proposals are based mainly on analyses of fluid and melt inclusions. Here, we use the Jiajika pegmatite deposit, the largest spodumene deposit in Asia, as a case study to investigate ore forming processes using isotope dating. Dating of a single granite sample from the Jiajika deposit using multiple methods gave a zircon U-Pb SHRIMP age of 208.4 ~ 3.9 Ma, an 4~Ar/39Ar age for muscovite of 182.9 ~ 1.7 Ma, and an 4~Ar/39Ar age for biotite of 169.9 ＋ 1.6 Ma. Based on these dating results and the 4~Ar/39Ar age of muscovite from the Jiajika pegmatite, a temperature-time cooling track for the Jiajika granite was constructed using closure temperatures of the different isotope systems. This track indicates that the granite cooled over ^-40 m. y., with segregation of the pegmatite fluid from the granitic magma at a temperature of ~700~C. This result suggests that the Jiajika pegmatite formed not by fractional crystallization, but by segregation of an immiscible liquid from the granitic magma. When compared with fractional crystallization, the relatively early timing of segregation of an immiscible liquid from a granitic magma can prevent the precipitation of ore-forming elements during crystallization, and suggests that liquid immiscibility could be an important ore-forming process for rare metal pegmatities. We also conclude that isotope dating is a method that can potentially be used to determine the dominant ore-forming processes that occurred during the formation of granite-related ore deposits, and suggest that this method can be employed to determine the formation history of the W-Sn ore deposits found elsewhere within the Nanling Metallogenic Belt.

Metallogenic Epoch of Nonferrous Metallic and Silver Deposits in the Jiaodong Peninsula, China and its Geological Significance

As China＇s most important gold-producing district, the Jiaodong Peninsula also contains copper, lead-zinc, molybdenum （tungsten）, and other nonferrous metal ore deposits, but the space-time and genetic relationships with gold deposits remain uncertain. To investigate the temporal relationship between these nonferrous metal and gold ore deposits, We collected the samples from a number of nonferrous metallic and silver deposits and metallogenetic rock bodies in the eastern Jiaodong Peninsula for isotopic dating. The results show that the Re-Os isotopic model ages of the Lengjia molybdenum deposit in Rongcheng range from 114.5 ± 1.8 Ma to 112.6 ± 1.5 Ma, with an average age of 113.6 ± 1.6 Ma; the LA-ICP-MS ^206pb/^238U ages of 33 zircons in the sericitization porphyritic monzogranite that hosts the Tongjiazhuang silver deposit in Rongcheng range between 122 Ma and 109 Ma, with a weighted mean age of 116.04 ± 0.95 Ma; the LA-ICP-MS ^206pb/^238U ages of 31 zircons in the copper metallogenic pyroxene monzodiorite that hosts the Kuangbei copper deposit in Rongcheng range from 126 Ma to 106 Ma, with a weighted mean age of 116.6 ± 1.7 Ma; and the LA-ICP-MS ^206pb/^238U ages of 19 zircons in the pyroxene monzodiorite surrounding the Dadengge gold and multimetal deposit in Weihai range from 113 Ma to 110 Ma, with a weighted mean age of 111.7 ± 0.6 Ma. All these results indicate that the metallogenic ages of the silver and nonferrous metallic deposits in the Jiaodong Peninsula are in a limited range from 118 Ma to 111 Ma. Previous studies have demonstrated that the isotopic ages of gold deposits in the Jiaodong Peninsula range from 123 Ma to 110 Ma, while Weideshanian magmatism occurred between 126 Ma to 108 Ma. Both these ranges are grossly consistent with the metallogenic ages of silver and nonferrous metallic deposits in this study, suggesting that the large-scale mineralization occurred in the Early Cretaceous when magmatic activities were strong. This epoch may be linked to the lithosphere thinning and the thermo-upwelling extension in eastern China at that time. In addition, field investigation also shows that gold and nonferrous metallic deposits are distributed nearby the Weideshanian granite, with the nonferrous metallic deposits lying within or surrounding the granite pluton and the gold deposits outside the granite pluton. We propose the following mineralization scenario： In the Early Cretaceous, an intensive lithospheric extension induced partial melting and degassing of the metasomatized lithospheric mantle, which resulted in the formation of mantle-derived fluids enriched in metal elements. During the rapid process of magma ascent and intrusion, crust-derived fluids were activated by the magmatic thermal dome and served to further extract ore-forming materials from the crust. These fluids may have mixed with the mantle-derived fluid to form a crust-mantle mixing-type ore-forming fluid. The high-temperature conditions in the center or in contact with the granitic magmatic thermal dome would have been favorable for the formation of porphyry-type, skarn-type, and hydrothermal-vein-type ores, thus forming a series of Mo（W）, Cu, and Pb-Zn deposits in the mid-eastern Jiaodong Peninsula. In contrast, the medium- to low-temperature conditions in the periphery of the magmatic thermal dome would have favored the deposition of gold （silver） ores under the appropriate physiochemical and structural conditions. The metaliogenic epoch of the molybdenum, copper, and silver deposits, and their spatio-temporal and genetic relations to the gold deposits, as demonstrated in this study, not only provide important insights to the study of regional metallogeny, our understanding of the metallogenesis of the Jiaodong type gold deposit, and the geodynamic background of the large-scale mineralization in the Jiaodong Peninsula, but also have practical value in guiding the mineral exploration.

INDUCTION PLASMA REACTIVE DEPOSITION OF TUNGSTEN CARBIDE FROM TUNGSTEN METAL POWDER

Experimental results on the primary carburization reaction between the tungsten powder and methane in the induction plasma, and the secondary carburization of the deposit on substrate at high temperature are reported. Optical microscopy and scanning electron microscopy were used to examine the microstructures of starting tungsten powder, carburized powder, and deposit. X-ray diffraction analysis, thermal gravimetric analysis and microhardness measurement were used to characterize the structures and properties of the powder and the deposit. It is found that the primary carburization reaction in the induction plasma starts from the surface of tungsten particles when the particles are melted. Tungsten particles are partially carburized inside the reactive plasma. Complete carburization is achieved through the secondary carburization reaction of the deposit on substrate at high temperature.

An experimental study on metal precipitation driven by fluid mixing: implications for genesis of carbonate-hosted lead–zinc ore deposits

A type of carbonate-hosted lead–zinc(Pb–Zn)ore deposits, known as Mississippi Valley Type(MVT)deposits, constitutes an important category of lead–zinc ore deposits. Previous studies proposed a fluid-mixing model to account for metal precipitation mechanism of the MVT ore deposits, in which fluids with metal-chloride complexes happen to mix with fluids with reduced sulfur, producing metal sulfide deposition. In this hypothesis, however, the detailed chemical kinetic process of mixing reactions, and especially the controlling factors on the metal precipitation are not yet clearly stated. In this paper, a series of mixing experiments under ambient temperature and pressure conditions were conducted to simulate the fluid mixing process, by titrating the metal-chloride solutions, doping withor without dolomite, and using NaHS solution. Experimental results, combined with the thermodynamic calculations, suggest that H_2S, rather than HS^-or S^(2-),dominated the reactions of Pb and/or Zn precipitation during the fluid mixing process, in which metal precipitation was influenced by the stability of metal complexes and the pH. Given the constant concentrations of metal and total S in fluids, the pH was a primary factor controlling the Pb and/or Zn metal precipitation. This is because neutralizing or neutralized processes for the ore-forming fluids can cause instabilities of Pb and/or Zn chloride complexes and re-distribution of sulfur species, and thus can facilitate the hydrolysis of Pb and Zn ions and precipitation of sulfides. Therefore, a weakly acidic to neutral fluid environment is most favorable for the precipitation of Pb and Zn sulfides associated with the carbonate-hosted Pb–Zn deposits.

Fluid Inclusion Geochemistry of Metallic Ore Deposits in the South- Central Sector of theDa Hinggan Mountains in China

Physicochemical parameters of mineralization such as temperature, pressure, salinity, density, composition and boiling of ore fluids as well as pH, Eh, fo2 and reducing parameter in theprocess of mineralization of major ore deposits in the study district have been obtained by the authors through systematic observation and determination of characteristics and phase changes of fluid inclusions at different temperatures and analysis of gaseous and liquid phase compositions of the inclusions, thus providing a scientific basis for the division of mineralization-alteration stages, types of mineral deposits and minerogenetic series and the deepening of the knowledge about the ore-forming processes and mechanisms of mineral deposits. It is indicated that the deposits of the same type have similar fluid inclusion geochemical features and physicochemical parameters though they belong to different minerogenetic series, while the compositions of inclusions are not conditioned by deposit types but closely related to the minerogenetic series of deposits.

Growth mechanism of atomic-layer-deposited TiAlC metal gate based on TiCl4 and TMA precursors

TiAIC metal gate for the metal-oxide-semiconductor field-effect-transistor （MOSFET） is grown by the atorr/ic layer deposition method using TiCI4 and AI（CH3） 3 （TMA） as precursors. It is found that the major PrOduct of the TIC14 and TMA reaction is TiA1C, and the components of C and A1 are found to increase with higher growth temperature. The reaction mechanism is investigated by using x-ray photoemission spectroscopy （XPS）, Fourier transform infrared spectroscopy （FFIR）, and scanning electron microscope （SEM）. The reaction mechanism is as follows. Ti is generated through the reduction of TiCI4 by TMA. The reductive behavior of TMA involves the formation of ethane. The Ti from the reduction of TIC14 by TMA reacts with ethane easily forming heterogenetic TiCH2, TiCH=CH2 and TiC fragments. In addition, TMA thermally decomposes, driving A1 into the TiC film and leading to TiA1C formation. With the growth temperature increasing, TMA decomposes more severely, resulting in more C and A1 in the TiA1C film. Thus, the film composition can be controlled by the growth temperature to a certain extent.

Preparation and Characterization of Mesoporous Al-MCM-41 Layers Deposited on FeCrAl Metallic Foils by an In-situ Hydrothermal Method

A new class of activated mesoporous Al-MCM-41 layers was deposited on Fe-CrAl metallic foils in the presence of cationic surfactant cetyltrimethylammonium bromide under basic conditions by an in-situ hydrothermal method. The characterization techniques including X-ray diffraction, nitrogen adsorption and transmission electron microscopy, as well as field-emission scanning electron microscopy were performed to investigate the pore structure and surface morphology of the Al-MCM-41 layers. The Al-MCM-41 materials are of amorphous structure but exhibit large BET surface area （up to 757.0 m2/g） and pore volume （up to 0.72 cm3/g）, as well as a mean pore diameter of 3 nm. The layers deposited on the FeCrAl foils are continuous despite with a few of holes on the surface.

In situ laser deposition of NiTi intermetallics for corrosion improvement of Ti-6Al-4V alloy

NiTi intermetallic coatings were fabricated on the surface of Ti-6Al-4V alloy by melting Ni and Ti powders using laser metal deposition（LMD） process.The effects of NiTi reinforcement content on the microstructure,hardness and corrosion properties of the coatings were examined.The results show that the deposited coatings are characterized by NiTi,NiTi2 and NiTi3 intermetallic phases.An appreciable increase in corrosion resistance is obtained for all the coatings,and Ti55Ni45 coating shows the highest corrosion resistance;while coatings Ti50Ni50 and Ti45Ni55 follow in that succession.The reinforcement materials are proven to be corrosion resistant in the tested environment,and the effect of Ti is more dominant.

Organic/ Inorganic Occurrence of Metallic Elements of the Black Shale-Hosted Baiguoyuan Silver-Vanadium Deposit in Xingshan, Hubei

: By means of kerogen purification, the proton induced X-ray emission (PIXE) and instrumental neutron activation analysis (INAA), the authors have studied the organic/inorganic occurrence modes of the metallic elements of the Baiguoyuan silver-vanadium deposit hosted in black shale in Hubei Province, China. The result shows that Au, Hg and Ta have a strong tendency to occur organically, with more than 70% of these elements being associated organically. Se, Ga, Ag and Hf are partly associated with organic matter, with more than 20% of them occurring organically. Compared with the above elements, Zn, Cu, As and Sb are weakly associated organically, and tend to be enriched in kerogen. However, Mn, Th, U, V, Co, Cr, AI, Fe and Sc usually occur inorganically. Of the rare earth elements (REE), La, Ce, Tb, Dy, Yb and Lu have stronger ability to be associated with organic matter than Sm and Eu.

Driving lithium to deposit inside structured lithium metal anodes:A phase field model

Lithium metal anode is one of the most important anode materials for next-generation high-specificenergy secondary batteries.Structured lithium metal anodes have received extensive attention in the development of practical lithium metal batteries.Methods of driving lithium metal to deposit inside the pores of structured lithium metal anodes have always been one of the most concerned issues,especially for highly conductive frameworks.An electrochemical phase field theory with galvanostatic lithium plating process is employed in this work,the mechanism that illustrates the preference of lithium metal to deposit at the top of the framework structure has been revealed,and through the simulation analysis of various regulating strategies,the strategies that can efficiently drive lithium to deposit inside structured pores are summarized.This work presents the theoretical calculation and analysis methods that can be used for the rational design of lithium metal batteries.

A Super-Large Rb-Nb Rare Metal Deposit has been Discovered in Huashi Village of Xinglong County, Hebei Province

Objective The Huashi Village in Xinglong County of Hebei Province is located in the Yanshan subsidence zone in the central eastern North China Plate, which is 137 km away from Beijing City （Fig. la）. This area has undergone large -scale magmatic intrusion affected by the tectonic compression of the Pacific Plate in the Mesozoic （known as the Yanshanian movement） to form many alkaline rocks such as the Wulingshan rock mass. Previous studies have conducted petrological research and reconnaissance survey of rare metal ores in this area （Tian Shuzhang and Guo Zongshan, 1981; Xu Baoling et al., 1996）. In 2016, the Qinhuangdao Mineral and Hydrology Engineering Geological Brigade of Hebei Bureau of Geology and Mineral Resources Exploration implemented the project of Reconnaissance of Rare Metal Ores Including Rubidium in Huashi Village of Xinglong County, Hebei Province, and discovered super-large rare metal deposits of rubidium and biobium in the Madi alkali feldspar granite bodies in the Huashi Village to achieve great breakthrough of rare metal ore prospecting.

Effect of Al in Ti－microalloyed Mn－Ni－Mo welding wire on microstructure and toughness of deposited metal

The effect of Al in Ti-microalloyed welding wire on microstructure and toughness of deposited metals is studied.The results show that the deposited metal toughness worsens with increasing Al in wire' The mechanism of Al is as follows:(1) Al makes oxygen content in deposited metal increase.(2)Al restrains the formation of Ti-rich oxide inclusion, which causes granular bainite microstructure in deposited metal.(3)The content of solute Ti in deposited metal increases with Al content in welding wire,as a result,a part of carbonrich constitution in deposited metal is in the form of twin martensite.

Dendrite‑Free and Stable Lithium Metal Battery Achieved by a Model of Stepwise Lithium Deposition and Stripping

The uncontrolled formation of lithium(Li)dendrites and the unnecessary consumption of electrolyte during the Li plating/stripping process have been major obstacles in developing safe and stable Li metal batteries.Herein,we report a cucumber-like lithiophilic composite skeleton(CLCS)fabricated through a facile oxidationimmersion-reduction method.The stepwise Li deposition and stripping,determined using in situ Raman spectra during the galvanostatic Li charging/discharging process,promote the formation of a dendrite-free Li metal anode.Furthermore,numerous pyridinic N,pyrrolic N,and CuxN sites with excellent lithiophilicity work synergistically to distribute Li ions and suppress the formation of Li dendrites.Owing to these advantages,cells based on CLCS exhibit a high Coulombic efficiency of 97.3%for 700 cycles and an improved lifespan of 2000 h for symmetric cells.The full cells assembled with LiFePO_(4)(LFP),SeS_(2) cathodes and CLCS@Li anodes demonstrate high capacities of 110.1 mAh g^(−1) after 600 cycles at 0.2 A g^(−1) in CLCS@Li|LFP and 491.8 mAh g^(−1) after 500 cycles at 1 A g^(−1) in CLCS@Li|SeS2.The unique design of CLCS may accelerate the application of Li metal anodes in commercial Li metal batteries.

The subduction of the Copiapó aseismic ridge,is the causing of the formation of metallic minerals deposits in north of Chile and Argentina?

The results obtained in this work evince that the metallic mineral deposits located in the northern region of the Chilean-Pampean flat slab(in northern Chile and north-western Argentina),at approximately 27°30’S,would be related to the subduction of the Copiapo aseismic ridge.The analysis of the gravity anomalies and vertical gravity gradient allows inferring a deflection and truncation of the main trend of the Andean structures at the extrapolated zone of the Copiapo ridge beneath South America.Thus,the general NNE-trend of the Andean structures are rotated locally to an ENE-strike within the area of the Ojos del Salado-San Buena Ventura lineament.We explain that this anomalous behavior of the gravity derived anomalies is related to the deformational effects imprinted by the ridge subduction.Regions with a low subduction angle(<30° to horizontal)are related to large mineralization due to fluids released by dehydration of the subducting crust.In addition,a higher degree of mantle melting could be produced by a thicker oceanic crust.Therefore,we interpret that the processes associated to the subduction of the Copiapo aseismic ridge(emplaced on a thickened oceanic crust due to a local compensation of the seamounts)are the cause of formation and emplacement of big metallic mineral deposits in this region of Chile and Argentina.

Effects of rare earth elements on sulphur and phosphorus impurities in deposited metal

In order to reduce sulphur （ S ） and phosphorus （ P ） impurities in deposited metal, a small amount of rare earth （RE） lanthanum （ La） and yttrium （Y） were added into the coating ofE4303 electrode, a low carbon steel electrode. The microstructures of deposited metal were analyzed with metalloscope, and then the content of S and P was examined by energy dispenive X-ray spectrometer （ EDXS ）, and by wavelength dispersive X-ray fluorescence （XRF） spectrometer for further examination. The results show that the proper addition of La and Y can be beneficial to the desulfurization and dephosphorization of the deposited metal. Certainly, difference in the addition amount of La and Y could lead to various desulfurization and dephosphorization efficiency, in which the former is more obvious than the latter. With the proper amount of La attd Y, there is finer microstructure in deposited metal, and mechanical properties are improved as well. The S content in deposited metal with added La and Y decreases by 44. 44 wt. % , while the P content 6. 67 wt. %, compared with that in deposited metal without La and II.

In-situ wafer bowing measurements of GaN grown on Si(111) substrate by reflectivity mapping in metal organic chemical vapor deposition system

In this work, the wafer bowing during growth can be in-situ measured by a reflectivity mapping method in the 3×2 Thomas Swan close coupled showerhead metal organic chemical vapor deposition（MOCVD） system. The reflectivity mapping method is usually used to measure the film thickness and growth rate. The wafer bowing caused by stresses（tensile and compressive） during the epitaxial growth leads to a temperature variation at different positions on the wafer, and the lower growth temperature leads to a faster growth rate and vice versa. Therefore, the wafer bowing can be measured by analyzing the discrepancy of growth rates at different positions on the wafer. Furthermore, the wafer bowings were confirmed by the ex-situ wafer bowing measurement. High-resistivity and low-resistivity Si substrates were used for epitaxial growth. In comparison with low-resistivity Si substrate, Ga N grown on high-resistivity substrate shows a larger wafer bowing caused by the highly compressive stress introduced by compositionally graded Al Ga N buffer layer. This transition of wafer bowing can be clearly in-situ measured by using the reflectivity mapping method.