The growth and structural properties of Ag films prepared by radio-frequency（2, 13.56 and27.12 MHz） and very-high-frequency（40.68 and 60 MHz） magnetron sputtering were investigated. Using 2 MHz sputtering, the Ag ...The growth and structural properties of Ag films prepared by radio-frequency（2, 13.56 and27.12 MHz） and very-high-frequency（40.68 and 60 MHz） magnetron sputtering were investigated. Using 2 MHz sputtering, the Ag film has a high deposition rate, a uniform and smooth surface and a good fcc structure. Using 13.56 and 27.12 MHz sputtering, the Ag films still have a high deposition rate and a good fcc structure, but a non-uniform and coarse surface.Using 40.68 MHz sputtering, the Ag film has a moderate deposition rate and a good fcc structure, but a less smooth surface. Using 60 MHz sputtering, the Ag film has a uniform and smooth surface, but a low deposition rate and a poor fcc structure. The growth and structural properties of Ag films are related to the ions＇ energy and flux density. Therefore, changing the driving frequency is a good way to control the growth and structure of the Ag films.展开更多
基金supported by National Natural Science Foundation of China(Nos.11675118 and 11275136)
文摘The growth and structural properties of Ag films prepared by radio-frequency（2, 13.56 and27.12 MHz） and very-high-frequency（40.68 and 60 MHz） magnetron sputtering were investigated. Using 2 MHz sputtering, the Ag film has a high deposition rate, a uniform and smooth surface and a good fcc structure. Using 13.56 and 27.12 MHz sputtering, the Ag films still have a high deposition rate and a good fcc structure, but a non-uniform and coarse surface.Using 40.68 MHz sputtering, the Ag film has a moderate deposition rate and a good fcc structure, but a less smooth surface. Using 60 MHz sputtering, the Ag film has a uniform and smooth surface, but a low deposition rate and a poor fcc structure. The growth and structural properties of Ag films are related to the ions＇ energy and flux density. Therefore, changing the driving frequency is a good way to control the growth and structure of the Ag films.
