By using the Monte Carlo method, we simulated the trajectories of coaxial backscattering electrons corresponding to a new type of scanning electron microscope. From the calculated results, we obtain a universal expres...By using the Monte Carlo method, we simulated the trajectories of coaxial backscattering electrons corresponding to a new type of scanning electron microscope. From the calculated results, we obtain a universal expression, which describes with good accuracy the backscattering coefficient versus film thickness under all conditions used. By measuring the coaxial backscattering coefficient and using this universal formula, the thickness of thin films can be determined if the composition is known.展开更多
文摘By using the Monte Carlo method, we simulated the trajectories of coaxial backscattering electrons corresponding to a new type of scanning electron microscope. From the calculated results, we obtain a universal expression, which describes with good accuracy the backscattering coefficient versus film thickness under all conditions used. By measuring the coaxial backscattering coefficient and using this universal formula, the thickness of thin films can be determined if the composition is known.
