For operation and manipulation with nanometric positioning precision,an integrated micro nano-positioning xy-stage is developed,which is mainly composed of a silicon-based xy-stage,comb-driven actuator and displacemen...For operation and manipulation with nanometric positioning precision,an integrated micro nano-positioning xy-stage is developed,which is mainly composed of a silicon-based xy-stage,comb-driven actuator and displacement sensor.The high-aspect-ratio comb-driven xy-stage is achieved by deep reactive ion etching (DRIE) in both sides of wafer.The displacement sensor is mainly composed of four vertical sidewall surface piezoresistor connected to form a full Wheatstone bridge.A simple vertical sidewall surface piezoresistor process which improves on the basis of the conventional surface piezoresistor technique is proposed.The experimental results verify the integrated micro nano-positioning xy-stage including the vertical sidewall surface piezoresistor technique.The sensitivity of the fabricated piezoresistive sensors is better than 1.17 mV/μm without amplification and the linearity is better than 0.814%.Under 30 V driving voltage,a ±10 μm single-axis displacement is measured without crosstalk.The displacement resolution of the micro xy-stage is better than 10.8 nm.展开更多
We experimentally demonstrate the generation of highly coherent Type-II micro-combs based on a microresonator nested in a fiber cavity loop, known as the filter-driven four wave mixing(FD-FWM) laser scheme.In this sys...We experimentally demonstrate the generation of highly coherent Type-II micro-combs based on a microresonator nested in a fiber cavity loop, known as the filter-driven four wave mixing(FD-FWM) laser scheme.In this system, the frequency spacing of the comb can be adjusted to integer multiples of the free-spectral range(FSR) of the nested micro-resonator by properly tuning the fiber cavity length. Sub-comb lines with single FSR spacing around the primary comb lines can be generated. Such a spectral emission is known as a "Type-II comb".Our system achieves a fully coherent output. This behavior is verified by numerical simulations. This study represents an important step forward in controlling and manipulating the dynamics of an FD-FWM laser.展开更多
基金Funded by the High Technology Research and Development Programme of China (2007AA04Z315)
文摘For operation and manipulation with nanometric positioning precision,an integrated micro nano-positioning xy-stage is developed,which is mainly composed of a silicon-based xy-stage,comb-driven actuator and displacement sensor.The high-aspect-ratio comb-driven xy-stage is achieved by deep reactive ion etching (DRIE) in both sides of wafer.The displacement sensor is mainly composed of four vertical sidewall surface piezoresistor connected to form a full Wheatstone bridge.A simple vertical sidewall surface piezoresistor process which improves on the basis of the conventional surface piezoresistor technique is proposed.The experimental results verify the integrated micro nano-positioning xy-stage including the vertical sidewall surface piezoresistor technique.The sensitivity of the fabricated piezoresistive sensors is better than 1.17 mV/μm without amplification and the linearity is better than 0.814%.Under 30 V driving voltage,a ±10 μm single-axis displacement is measured without crosstalk.The displacement resolution of the micro xy-stage is better than 10.8 nm.
基金Engineering and Physical Sciences Research Council(EPSRC)(EP/M013294/1)MC REA(630833,327627)+3 种基金Horizon 2020 Framework Programme(H2020)(725046)CRC,Natural Sciences and Engineering Research Council of Canada(NSERC)(074-U 01)MEIE,the ITMO and its Professorship Program1000 Talents Sichuan Program,China
文摘We experimentally demonstrate the generation of highly coherent Type-II micro-combs based on a microresonator nested in a fiber cavity loop, known as the filter-driven four wave mixing(FD-FWM) laser scheme.In this system, the frequency spacing of the comb can be adjusted to integer multiples of the free-spectral range(FSR) of the nested micro-resonator by properly tuning the fiber cavity length. Sub-comb lines with single FSR spacing around the primary comb lines can be generated. Such a spectral emission is known as a "Type-II comb".Our system achieves a fully coherent output. This behavior is verified by numerical simulations. This study represents an important step forward in controlling and manipulating the dynamics of an FD-FWM laser.
