Due to the importance of metal layers in the product yield,serpentine test structures are usually fabricated on test chips to extract parameters for yield prediction.In this paper,the confidence level and estimation p...Due to the importance of metal layers in the product yield,serpentine test structures are usually fabricated on test chips to extract parameters for yield prediction.In this paper,the confidence level and estimation precision of the average defect density on metal layers are investigated to minimize the randomness of experimental results and make the measured parameters more convincing.On the basis of the Poisson yield model,the method to determine the total area of all serpentine test structures is obtained using the law of large numbers and the Lindeberg-Levy theorem.Furthermore,the method to determine an adequate area of each serpentine test structure is proposed under a specific requirement of confidence level and estimation precision.The results of Monte Carlo simulation show that the proposed method is consistent with theoretical analyses.It is also revealed by wafer experimental results that the method of designing serpentine test structure proposed in this paper has better performance.展开更多
针对通信系统解调损失测试过程中存在的引用理论误码率不准确以及保证置信度情况下的码元测试长度的标准不一问题,对部分常引用错误的调制体制的理论误码率进行了推导分析,对误码率测试长度与置信度之间的关系进行分析计算,得到在置信度...针对通信系统解调损失测试过程中存在的引用理论误码率不准确以及保证置信度情况下的码元测试长度的标准不一问题,对部分常引用错误的调制体制的理论误码率进行了推导分析,对误码率测试长度与置信度之间的关系进行分析计算,得到在置信度0.99情况下码元测试长度应不小于136/Pe(Pe为系统的误码率上限)。开展了验证实验,实验数据表明,错误的引用BPSK以及CPFSK(非相干解调)的理论误码率将引起解调损失误差分别不小于0.7 d B和1.0 d B;相对于136/Pe的码元测试长度下的解调损失的重复性为0.08 d B,10/Pe的码元测试长度下的解调损失的重复性增大了4倍。展开更多
基金Project (No. 2009ZX02023-004-1) supported by the National Science and Technology Major Project,China
文摘Due to the importance of metal layers in the product yield,serpentine test structures are usually fabricated on test chips to extract parameters for yield prediction.In this paper,the confidence level and estimation precision of the average defect density on metal layers are investigated to minimize the randomness of experimental results and make the measured parameters more convincing.On the basis of the Poisson yield model,the method to determine the total area of all serpentine test structures is obtained using the law of large numbers and the Lindeberg-Levy theorem.Furthermore,the method to determine an adequate area of each serpentine test structure is proposed under a specific requirement of confidence level and estimation precision.The results of Monte Carlo simulation show that the proposed method is consistent with theoretical analyses.It is also revealed by wafer experimental results that the method of designing serpentine test structure proposed in this paper has better performance.
文摘针对通信系统解调损失测试过程中存在的引用理论误码率不准确以及保证置信度情况下的码元测试长度的标准不一问题,对部分常引用错误的调制体制的理论误码率进行了推导分析,对误码率测试长度与置信度之间的关系进行分析计算,得到在置信度0.99情况下码元测试长度应不小于136/Pe(Pe为系统的误码率上限)。开展了验证实验,实验数据表明,错误的引用BPSK以及CPFSK(非相干解调)的理论误码率将引起解调损失误差分别不小于0.7 d B和1.0 d B;相对于136/Pe的码元测试长度下的解调损失的重复性为0.08 d B,10/Pe的码元测试长度下的解调损失的重复性增大了4倍。
