In this study,three-probe error separation was developed with three chromatic confocal displacement sensors for roundness measurement.Here,the harmonic suppression is discussed first to set suitable orientation angles...In this study,three-probe error separation was developed with three chromatic confocal displacement sensors for roundness measurement.Here,the harmonic suppression is discussed first to set suitable orientation angles among three sensors.Monte Carlo simulation is utilized to test the error separation and optimize the orientation angles and off-axial distance.The experimental setup is established using chromatic confocal sensors with a precise rotary platform.The experimental results show that the measured roundness with an orientation-angle combination of(0°,90.1°,and 178.6°)is much better than that of another nonoptimal selection(0°,90.4°,and 177.4°).The roundness error is only 0.7%between the proposed measurement system and an expensive ultraprecision roundness meter.Furthermore,it is proven that the eccentricity distance should be decreased as small as possible to improve the measurement accuracy.In sum,this paper proposes a feasible method for roundness measurement with reliable simulations,easily integrated sensors,and an ordinary precision rotary platform.展开更多
基金This work was supported by the National Natural Science Foundation of China(61905129)Start-up Funding of Tsinghua Shenzhen International Graduate School,Tsinghua University(QD2020001N)Shenzhen Stable Supporting Program(WDZC20200820200655001).
文摘In this study,three-probe error separation was developed with three chromatic confocal displacement sensors for roundness measurement.Here,the harmonic suppression is discussed first to set suitable orientation angles among three sensors.Monte Carlo simulation is utilized to test the error separation and optimize the orientation angles and off-axial distance.The experimental setup is established using chromatic confocal sensors with a precise rotary platform.The experimental results show that the measured roundness with an orientation-angle combination of(0°,90.1°,and 178.6°)is much better than that of another nonoptimal selection(0°,90.4°,and 177.4°).The roundness error is only 0.7%between the proposed measurement system and an expensive ultraprecision roundness meter.Furthermore,it is proven that the eccentricity distance should be decreased as small as possible to improve the measurement accuracy.In sum,this paper proposes a feasible method for roundness measurement with reliable simulations,easily integrated sensors,and an ordinary precision rotary platform.
