In order to achieve high-accuracy measurement of radius of curvature of optical sphere, ultra-high accuracy radius of curvature testing device is developed by dual-frequency laser interferometer and Fizeau interferome...In order to achieve high-accuracy measurement of radius of curvature of optical sphere, ultra-high accuracy radius of curvature testing device is developed by dual-frequency laser interferometer and Fizeau interferometer based on cat’s eye and confocal method. Through analyzing the error source models of radius of curvature testing, optical configuration of the testing device has been optimized. Precise environment control and real-time monitoring system is also established to reduce the errors caused by environment. Through the above processes, the radius of curvature measurement relative accuracy is better than 2 ppm. One optical sphere, R88.5 mm, test aperture 59 mm, has been tested. Testing result is 88499.465 ± 0.176 μm, meeting the design requirement. The method has high accuracy and practical advantages.展开更多
Generally, a confocal Fabry-Perot interferometer is only able to detect the out-of-plane component of a displacement field; while the in-plane component often has the information about the material which cannot be fou...Generally, a confocal Fabry-Perot interferometer is only able to detect the out-of-plane component of a displacement field; while the in-plane component often has the information about the material which cannot be found in this out-of-plane component. In this paper, based on a confocal Fabry-Perot interferometer set-up for detecting the out-of-plane component of a laser generated acoustic field, a technique is developed to detect both the out-of-plane and in-plane displacement components simultaneously with a novel two-channel confocal Fabry-Perot interferometer.展开更多
文摘In order to achieve high-accuracy measurement of radius of curvature of optical sphere, ultra-high accuracy radius of curvature testing device is developed by dual-frequency laser interferometer and Fizeau interferometer based on cat’s eye and confocal method. Through analyzing the error source models of radius of curvature testing, optical configuration of the testing device has been optimized. Precise environment control and real-time monitoring system is also established to reduce the errors caused by environment. Through the above processes, the radius of curvature measurement relative accuracy is better than 2 ppm. One optical sphere, R88.5 mm, test aperture 59 mm, has been tested. Testing result is 88499.465 ± 0.176 μm, meeting the design requirement. The method has high accuracy and practical advantages.
基金This work was supported by the National Nature Science Foundation of China (No. 10174025 and No.10134020).
文摘Generally, a confocal Fabry-Perot interferometer is only able to detect the out-of-plane component of a displacement field; while the in-plane component often has the information about the material which cannot be found in this out-of-plane component. In this paper, based on a confocal Fabry-Perot interferometer set-up for detecting the out-of-plane component of a laser generated acoustic field, a technique is developed to detect both the out-of-plane and in-plane displacement components simultaneously with a novel two-channel confocal Fabry-Perot interferometer.
