The Ti-Al ohmic contact to n-type 6H-SiC has been fabricated. An array of TLM (transfer length method) test patterns with Au/Ti/A1/Ti/SiC structure is formed on N-wells created by P^+ ion implantation into Si-faced...The Ti-Al ohmic contact to n-type 6H-SiC has been fabricated. An array of TLM (transfer length method) test patterns with Au/Ti/A1/Ti/SiC structure is formed on N-wells created by P^+ ion implantation into Si-faced p-type 6H-SiC epilayer. The specific contact resistance pc as low as 8.64×10-6Ω·cm^2 is achieved after annealing in N2 at 900℃ for 5min. The sheet resistance Rsh of the implanted layers is 975Ω. X-ray diffraction (XRD) analysis shows the formation of Ti3SiC2 at the metal/n-SiC interface after thermal annealing, which is responsible for the low resistance contact.展开更多
By formation of an intermediate semiconductor layer (ISL) with a narrow band gap at the metallic contact/SiC interface, this paper realises a new method to fabricate the low-resistance Ohmic contacts for SiC. An arr...By formation of an intermediate semiconductor layer (ISL) with a narrow band gap at the metallic contact/SiC interface, this paper realises a new method to fabricate the low-resistance Ohmic contacts for SiC. An array of transfer length method (TLM) test patterns is formed on N-wells created by P+ ion implantation into Si-faced p-type 4H- SiC epilayer. The ISL of nickel-metal Ohmic contacts to n-type 4H-SiC could be formed by using Germanium ion implantation into SiC. The specific contact resistance pc as low as 4.23×10-5Ω·cm2 is achieved after annealing in N2 at 800 ℃ for 3 min, which is much lower than that (〉 900℃) in the typical SiC metallisation process. The sheet resistance Rsh of the implanted layers is 1.5 kΩ/□. The technique for converting photoresist into nanocrystalline graphite is used to protect the SiC surface in the annealing after Ge+ ion implantations.展开更多
The ohmic contacts of 4H-SiC are fabricated on nitrogen ion implanted layers made by performing box-like-profile implantation three and four times. Implantation parameters such as the standard deviation σ and the pro...The ohmic contacts of 4H-SiC are fabricated on nitrogen ion implanted layers made by performing box-like-profile implantation three and four times. Implantation parameters such as the standard deviation σ and the projection range Rp are calculated by the Monte Carlo simulator TRIM. Ni/Cr ohmic contacts on Si-face 4H-SiC implantation layers are measured by transfer length methods (TLMs). The results show that the values of sheet resistance Rsh are 30 kΩ/□ and 4.9 kΩ/□ and the values of specific contact resistance Pc of ohmic contacts are 7.1 × 10^-4 Ω. cm^2 and 9.5× 10^-5Ω. cm^2 for the implanted layers with implantation performed three and four times respectively.展开更多
Wear is an important issue in hip implants. Excessive wear can lead to toxicity and other implant associated medical issues such as patient discomfort and decreased mobility. Since implant wear is the result of contac...Wear is an important issue in hip implants. Excessive wear can lead to toxicity and other implant associated medical issues such as patient discomfort and decreased mobility. Since implant wear is the result of contact between surfaces of femoral head and acetabulum implant, it is important to establish a model that can address implant surface roughness interaction. A statistical contact model is developed for the interaction of femoral head and acetabulum implant in which surface roughness effects are included. The model accounts for the elastic-plastic interaction of the implant surface roughness. For this purpose femoral head and acetabulum implants are considered as macroscopically spherical surfaces containing micron-scale roughness. Approximate equations are obtained that relate the contact force to the mean surface separation explicitly. Closed form equations are obtained for hysteretic energy loss in implant using the approximate equations.展开更多
This paper reports that the nickel silicide ohmic contacts to n-type 6H-SiC have been fabricated. Transfer length method test patterns with NiSi/SiC and NiSi2/SiC structure axe formed on N-wells created by N^+ ion im...This paper reports that the nickel silicide ohmic contacts to n-type 6H-SiC have been fabricated. Transfer length method test patterns with NiSi/SiC and NiSi2/SiC structure axe formed on N-wells created by N^+ ion implantation into Si-faced p-type 6H-SiC epilayer respectively. NiSi and NiSi2 films are prepared by annealing the Ni and Si films separately deposited. A two-step annealing technology is performed for decreasing of oxidation problems occurred during high temperature processes. The specific contact resistance Pc of NiSi contact to n-type 6H-SiC as low as 1.78× 10^-6Ωcm^2 is achieved after a two-step annealing at 350 ℃for 20 min and 950℃ for 3 min in N2. And 3.84×10-6Ωcm^2 for NiSi2 contact is achieved. The result for sheet resistance Rsh of the N+ implanted layers is about 1210Ω/□. X-ray diffraction analysis shows the formation of nickel silicide phases at the metal/n-SiC interface after thermal annealing. The surfaces of the nickel silicide after thermal annealing are analysed by scanning electron microscope.展开更多
The negative ion implantation technique was applied to modify polymer surfaces of culture dishes for neuronal cells, PC12h. The silver negative ion (Ag-)-implantation was carried out at an ion energy of 20 keV and a d...The negative ion implantation technique was applied to modify polymer surfaces of culture dishes for neuronal cells, PC12h. The silver negative ion (Ag-)-implantation was carried out at an ion energy of 20 keV and a dose of 3 × 1015 ions/cm2 with non-treated polystyrene (NTPS), tissue culture polystyrene (TCPS), and collagen-coated TCPS-Iwaki (CCPS). Ag--implanted surfaces of Ag/NTPS, Ag/TCPS, and Ag/CCPS were studied with respect to contact angle and/or chemical composition. The numerical values of contact angles on Ag/NTPS and Ag/TCPS were similar within experimental error, indicating the resemblance in their hydrophobicity and hydrophilicity. The PC12h cells, however, were attached only to the Ag--implanted region of NTPS, but not to the non-implanted NTPS region. Moreover, the neurite outgrowth was also observed to extend specifically along the Ag--implanted region of NTPS but not on the non-implanted NTPS region, although neurites extended towards all directions on collagen-coated TCPS as a control surface. There was no remarkable difference in neurite outgrowth among Ag--implanted regions of TCPS and CCPS. Thus Ag/NTPS region was affirmed to promote highly selective attachment, growth, and differentiation of PC12h cells, although its mechanism is still unknown.展开更多
The critical surface energy of steels surface modified by ion implantation was evaluated. Zisman’s method was used to investigate the critical surface energy of 40Cr, # 45, GCr15, 1Crl8Ni9Ti steels implanted under th...The critical surface energy of steels surface modified by ion implantation was evaluated. Zisman’s method was used to investigate the critical surface energy of 40Cr, # 45, GCr15, 1Crl8Ni9Ti steels implanted under the different conditions from the contact angle data. The critical surface energy in steel shows a general tendency to decrease with the increase of implanting energy and dose. On the grounds of the relationship between the energy of adhesion of sliding interfaces and the solid surface energy, reduction of friction and increase of wear resistance of the implanted surfaces have been demonstrated experimentally.展开更多
Background: Non-implantable bone anchored hearing devices (BCHDs) are utilized for patients with conductive or mixed hearing loss who are unsuitable for conventional hearing aids or have unresolved middle ear issues. ...Background: Non-implantable bone anchored hearing devices (BCHDs) are utilized for patients with conductive or mixed hearing loss who are unsuitable for conventional hearing aids or have unresolved middle ear issues. These devices can be surgically implanted or attached using adhesive plates, dental sticks, elastic headbands, or bone conduction spectacles. Optimal fitting of bone conduction spectacles requires appropriate frame selection and contact pressure in the temporal and mastoid areas. The ANSI S3.6 and DIN EN ISO 389-3 standards recommend a contact area of approximately 1.75 cm2 and a maximum force of 5.4 N for effective sound transmission and comfort. Methods: This study aimed to evaluate the technical fit and mechanical stability of universal bone conduction hearing spectacles compared to established systems. A Sen-Pressure 02 thin-film sensor connected to an Arduino Uno R3 board measured contact force in the temporal and mastoid areas. Several BCHDs were tested, including the Bruckhoff la belle BC D50/70, Radioear B71 headset, Radioear B71 elastic headband, Cochlear Baha SoundArc M, and Cochlear Baha elastic headband, on a PVC artificial head, with data analyzed using ANOVA and LSD post hoc tests. Results: The la belle BC D50/70 spectacles showed comparable contact force to established BCHDs, ensuring adequate sound transmission and comfort. Significant differences were observed between the systems, with the Radioear B71 headset exhibiting the highest forces. The la belle BC D50/70 had similar forces to the Radioear B71 elastic headband. Conclusion: The la belle BC D50/70 universal bone conduction hearing spectacles are a technically equivalent alternative to established BCHDs, maintaining pressure below 5.4 N. Future research should explore the impact of different contact forces on performance and comfort, and the integration of force control in modified spectacles. This study indicates that the la belle BC D50/70 is a viable alternative that meets audiological practice requirements.展开更多
基金Project supported by the National Basic Research Program of China (Grant No 2002CB311904), the National Defense Basic Research Program of China (Grant No 51327010101) and the National Natural Science Foundation of China (Grant No 60376001).
文摘The Ti-Al ohmic contact to n-type 6H-SiC has been fabricated. An array of TLM (transfer length method) test patterns with Au/Ti/A1/Ti/SiC structure is formed on N-wells created by P^+ ion implantation into Si-faced p-type 6H-SiC epilayer. The specific contact resistance pc as low as 8.64×10-6Ω·cm^2 is achieved after annealing in N2 at 900℃ for 5min. The sheet resistance Rsh of the implanted layers is 975Ω. X-ray diffraction (XRD) analysis shows the formation of Ti3SiC2 at the metal/n-SiC interface after thermal annealing, which is responsible for the low resistance contact.
基金Project supported by the National Natural Science Foundation of China (Grant No J54508250120)Xi’an Applied Materials Innovation Fund (Grant No XA-AM-200704)
文摘By formation of an intermediate semiconductor layer (ISL) with a narrow band gap at the metallic contact/SiC interface, this paper realises a new method to fabricate the low-resistance Ohmic contacts for SiC. An array of transfer length method (TLM) test patterns is formed on N-wells created by P+ ion implantation into Si-faced p-type 4H- SiC epilayer. The ISL of nickel-metal Ohmic contacts to n-type 4H-SiC could be formed by using Germanium ion implantation into SiC. The specific contact resistance pc as low as 4.23×10-5Ω·cm2 is achieved after annealing in N2 at 800 ℃ for 3 min, which is much lower than that (〉 900℃) in the typical SiC metallisation process. The sheet resistance Rsh of the implanted layers is 1.5 kΩ/□. The technique for converting photoresist into nanocrystalline graphite is used to protect the SiC surface in the annealing after Ge+ ion implantations.
文摘The ohmic contacts of 4H-SiC are fabricated on nitrogen ion implanted layers made by performing box-like-profile implantation three and four times. Implantation parameters such as the standard deviation σ and the projection range Rp are calculated by the Monte Carlo simulator TRIM. Ni/Cr ohmic contacts on Si-face 4H-SiC implantation layers are measured by transfer length methods (TLMs). The results show that the values of sheet resistance Rsh are 30 kΩ/□ and 4.9 kΩ/□ and the values of specific contact resistance Pc of ohmic contacts are 7.1 × 10^-4 Ω. cm^2 and 9.5× 10^-5Ω. cm^2 for the implanted layers with implantation performed three and four times respectively.
文摘Wear is an important issue in hip implants. Excessive wear can lead to toxicity and other implant associated medical issues such as patient discomfort and decreased mobility. Since implant wear is the result of contact between surfaces of femoral head and acetabulum implant, it is important to establish a model that can address implant surface roughness interaction. A statistical contact model is developed for the interaction of femoral head and acetabulum implant in which surface roughness effects are included. The model accounts for the elastic-plastic interaction of the implant surface roughness. For this purpose femoral head and acetabulum implants are considered as macroscopically spherical surfaces containing micron-scale roughness. Approximate equations are obtained that relate the contact force to the mean surface separation explicitly. Closed form equations are obtained for hysteretic energy loss in implant using the approximate equations.
基金Project supported by the National Basic Research Program of China (Grant No 2002CB311904), the National Defense Basic Research Program of China (Grant No 51327010101) and the National Natural Science Foundation of China (Grant No 60376001).
文摘This paper reports that the nickel silicide ohmic contacts to n-type 6H-SiC have been fabricated. Transfer length method test patterns with NiSi/SiC and NiSi2/SiC structure axe formed on N-wells created by N^+ ion implantation into Si-faced p-type 6H-SiC epilayer respectively. NiSi and NiSi2 films are prepared by annealing the Ni and Si films separately deposited. A two-step annealing technology is performed for decreasing of oxidation problems occurred during high temperature processes. The specific contact resistance Pc of NiSi contact to n-type 6H-SiC as low as 1.78× 10^-6Ωcm^2 is achieved after a two-step annealing at 350 ℃for 20 min and 950℃ for 3 min in N2. And 3.84×10-6Ωcm^2 for NiSi2 contact is achieved. The result for sheet resistance Rsh of the N+ implanted layers is about 1210Ω/□. X-ray diffraction analysis shows the formation of nickel silicide phases at the metal/n-SiC interface after thermal annealing. The surfaces of the nickel silicide after thermal annealing are analysed by scanning electron microscope.
基金This work was supported by the Research for the Future Program of the Japan Society for the Promotion of Science (JSPS-RFTF98I00201).
文摘The negative ion implantation technique was applied to modify polymer surfaces of culture dishes for neuronal cells, PC12h. The silver negative ion (Ag-)-implantation was carried out at an ion energy of 20 keV and a dose of 3 × 1015 ions/cm2 with non-treated polystyrene (NTPS), tissue culture polystyrene (TCPS), and collagen-coated TCPS-Iwaki (CCPS). Ag--implanted surfaces of Ag/NTPS, Ag/TCPS, and Ag/CCPS were studied with respect to contact angle and/or chemical composition. The numerical values of contact angles on Ag/NTPS and Ag/TCPS were similar within experimental error, indicating the resemblance in their hydrophobicity and hydrophilicity. The PC12h cells, however, were attached only to the Ag--implanted region of NTPS, but not to the non-implanted NTPS region. Moreover, the neurite outgrowth was also observed to extend specifically along the Ag--implanted region of NTPS but not on the non-implanted NTPS region, although neurites extended towards all directions on collagen-coated TCPS as a control surface. There was no remarkable difference in neurite outgrowth among Ag--implanted regions of TCPS and CCPS. Thus Ag/NTPS region was affirmed to promote highly selective attachment, growth, and differentiation of PC12h cells, although its mechanism is still unknown.
文摘The critical surface energy of steels surface modified by ion implantation was evaluated. Zisman’s method was used to investigate the critical surface energy of 40Cr, # 45, GCr15, 1Crl8Ni9Ti steels implanted under the different conditions from the contact angle data. The critical surface energy in steel shows a general tendency to decrease with the increase of implanting energy and dose. On the grounds of the relationship between the energy of adhesion of sliding interfaces and the solid surface energy, reduction of friction and increase of wear resistance of the implanted surfaces have been demonstrated experimentally.
文摘Background: Non-implantable bone anchored hearing devices (BCHDs) are utilized for patients with conductive or mixed hearing loss who are unsuitable for conventional hearing aids or have unresolved middle ear issues. These devices can be surgically implanted or attached using adhesive plates, dental sticks, elastic headbands, or bone conduction spectacles. Optimal fitting of bone conduction spectacles requires appropriate frame selection and contact pressure in the temporal and mastoid areas. The ANSI S3.6 and DIN EN ISO 389-3 standards recommend a contact area of approximately 1.75 cm2 and a maximum force of 5.4 N for effective sound transmission and comfort. Methods: This study aimed to evaluate the technical fit and mechanical stability of universal bone conduction hearing spectacles compared to established systems. A Sen-Pressure 02 thin-film sensor connected to an Arduino Uno R3 board measured contact force in the temporal and mastoid areas. Several BCHDs were tested, including the Bruckhoff la belle BC D50/70, Radioear B71 headset, Radioear B71 elastic headband, Cochlear Baha SoundArc M, and Cochlear Baha elastic headband, on a PVC artificial head, with data analyzed using ANOVA and LSD post hoc tests. Results: The la belle BC D50/70 spectacles showed comparable contact force to established BCHDs, ensuring adequate sound transmission and comfort. Significant differences were observed between the systems, with the Radioear B71 headset exhibiting the highest forces. The la belle BC D50/70 had similar forces to the Radioear B71 elastic headband. Conclusion: The la belle BC D50/70 universal bone conduction hearing spectacles are a technically equivalent alternative to established BCHDs, maintaining pressure below 5.4 N. Future research should explore the impact of different contact forces on performance and comfort, and the integration of force control in modified spectacles. This study indicates that the la belle BC D50/70 is a viable alternative that meets audiological practice requirements.