The effect of a negative DC bias,|V_(dc)|,on the electrical parameters and discharge mode is investigated experimentally in a radiofrequency(RF)capacitively coupled Ar plasma operated at different RF voltage amplitude...The effect of a negative DC bias,|V_(dc)|,on the electrical parameters and discharge mode is investigated experimentally in a radiofrequency(RF)capacitively coupled Ar plasma operated at different RF voltage amplitudes and gas pressures.The electron density is measured using a hairpin probe and the spatio-temporal distribution of the electron-impact excitation rate is determined by phase-resolved optical emission spectroscopy.The electrical parameters are obtained based on the waveforms of the electrode voltage and plasma current measured by a voltage probe and a current probe.It was found that at a low|V_(dc)|,i.e.inα-mode,the electron density and RF current decline with increasing|V_(dc)|;meanwhile,the plasma impedance becomes more capacitive due to a widened sheath.Therefore,RF power deposition is suppressed.When|V_(dc)|exceeds a certain value,the plasma changes toα–γhybrid mode(or the discharge becomes dominated by theγ-mode),manifesting a drastically growing electron density and a moderately increasing RF current.Meanwhile,the plasma impedance becomes more resistive,so RF power deposition is enhanced with|V_(dc)|.We also found that the electrical parameters show similar dependence on|V_(dc)|at different RF voltages,andα–γmode transition occurs at a lower|V_(dc)|at a higher RF voltage.By increasing the pressure,plasma impedance becomes more resistive,so RF power deposition and electron density are enhanced.In particular,theα–γmode transition tends to occur at a lower|V_(dc)|with increase in pressure.展开更多
Numerical analyses of earthquake effects on the deformation, stability, and load transfer of a slope covered by deposits are traditionally based on the assumption that the slope is a continuum. It would be problem...Numerical analyses of earthquake effects on the deformation, stability, and load transfer of a slope covered by deposits are traditionally based on the assumption that the slope is a continuum. It would be problematic, however, to extend these approaches to the simulation of the slide, collapse and disintegration of the deposits under seismic loading. Contrary to this, a discrete element method (DEM) provides a means to consider large displacement and rotation of the non-continuum. To take the advantages of both methods of continuum and non- continuum analyses, seismic responses of a slope covered by deposits are studied by coupling a twodimensional (a-D) finite difference method and a 2-D DEM, with the bedrock being modelled by the finite difference grids and the deposits being represented by disks. A smooth transition across the boundaries of the continuous/discontinuous domains is obtained by imposing the compatibility condition and equilibrium condition along their interfaces. In the course of computation, the same time-step value is chosen for both continuous and discontinuous domains. The free-field boundaries are adopted for lateral grids of bedrock domain to eliminate the radiation damping effect. When the static equilibrium under gravity load is obtained, dynamic calculation begins under excitation of the seismic wave input from the continuum model bottom. In this way, responses to the earthquake of a slope covered by deposits are analyzed dynamically. Combined with field monitoring data, deformation and stability of the slope are discussed. The effects of the relevant parameters of spectrum characteristic, duration, andpeak acceleration of seismic waves are further investigated and explained from the simulations.展开更多
The skarn and ore bodies of the stratabound skarn copper deposits of Tongling, Anhui Province, are both controlled by definite stratigraphic horizons, and they are concordant with the strata. They occur as layers and ...The skarn and ore bodies of the stratabound skarn copper deposits of Tongling, Anhui Province, are both controlled by definite stratigraphic horizons, and they are concordant with the strata. They occur as layers and layer-like bodies in permeable carbonate rocks of the Middle-Upper Carboniferous Huanglong and Chuanshan Formations which are underlain by impermeable shale or siliceous rocks of the Upper Devonian Wutong Formation. The authors study the dynamics of ore-forming processes of the ore deposits with the dynamic model of coupled transport and reaction, and the following results are obtained: The salinity gradient and flow rate of the ore-forming fluids can both promote the mixing and reaction of juvenile water and formation water, and the permeable strata are favourable sites for the intense transport-reaction of mixing and the formation of deposits. (2) As isothermal transport-reaction took place along the bedding of strata, the moving transport-reaction front formed at the contact between the ore-forming fluids and the rocks advanced slowly along the permeable strata, and then stratiform skarn and ore bodies concordant with the strata were formed. (3) The gradient transport-reaction taking place across the isotherms in the cross-bedding direction caused the mineralogical composition to alter gradually from magnesian skarn to sulphide ore bodies.展开更多
Longtoushan Sn-polymetal deposit is a large-scale deposit of high-tenor. The ore-bodies occur in reef limestone of middle Devonian. There is much anthraxolite in reef limestone and ore-bodies. The anthraxolite is the ...Longtoushan Sn-polymetal deposit is a large-scale deposit of high-tenor. The ore-bodies occur in reef limestone of middle Devonian. There is much anthraxolite in reef limestone and ore-bodies. The anthraxolite is the postmature result of oil-gas' thermal metamorphism. The close relationship of anthraxolite and Sn-polymetal deposit reveals the space-time relation between oil-gas evolution and Sn-polymetal mineralization. Sulfur isotope of Longtoushan deposit is close to oil's sulfur in Devonian, which indicates obvious relationship between the sulfur's source of deposit and oil-gas' activity. The forming of Longtoushan deposit relates to exhalative-sedimentary mineralization in Devonian. Because of the favorable hydrocarbon-forming condition of Longtoushan reef and surrounding basin facies' black shale and peat, coupling of ore-formation and hydrocarbon-forming occurs in seabed's hydrothermal convection. The distributing of ore-forming elements indicates the presence of hydrothermal convection system. The thermal fluid containing organic matters conduces to Sn-polymetal elements' activation and transfer, and provides catalyzing condition to the transforming from SO42- to S2-. The erosion action of brine containing organic acid to reef limestone induces the growing of crannies and karst's caverns, which provides advantageous space to Sn-polymetal mineralization. The heat source of mineralization provides thermocatalysis condition to hydrocarbon-forming. When the circulatory fluid containing oil-gas enters the high-temperature region(>150 ℃ ), the oil-gas is decomposed and anthraxolite comes into being.展开更多
This paper presents a method of establishing a hydrothermal ore-forming reaction system. On the basis of the study of four typical hydrothermal deposits, the folowing conclusions concerning geochemical dynamic control...This paper presents a method of establishing a hydrothermal ore-forming reaction system. On the basis of the study of four typical hydrothermal deposits, the folowing conclusions concerning geochemical dynamic controlling during hydrothermal mineralization have been drawn: (1 ) The regional tectonic activities control the concentration and dispersion of elements in the ore-forming process in terms of their effects on the thermodynamic nature and conditions of the ore-forming reaction system. (2) During hydrothermal mineralization the activities of ore-bearing faults can be divided into two stages: the brittle splitting stage and the brirtle-tough tensing stage, which would create characteristically different geodynamic conditions for the geochemical thermodynamic ore-forming system. (3) The hydrothermal ore-forming reaction system is an open dynamic system. At the brittle splitting stage the system was so strongly supersaturated and unequilibrated as to speed up and enhance the crystallization and differentiation of ore-forming fluids. And at the brittle-tough tensing stage, the ore-forming system was in a weak supersaturated state; with decreasing temperature and pressure the crystallization of oreforming material would slow down, and it can be regarded as an equilibrated state. (4) In the later stages of hydrothermal evolution, gold would be concentrated in the residual ore-forming solution. The pulsating fracture activity in this stage led to the crush of pyrite ore and it was then filled with gold-enriched solution, forming high-grade "fissure" gold ore. This ore-forming process could be called the coupling mechanism of ore formation.展开更多
The macro mechanical properties of materials with characteristics of large scale and complicated structural composition can be analyzed through its reconstructed meso-structures.In this work,the meso-structures of tal...The macro mechanical properties of materials with characteristics of large scale and complicated structural composition can be analyzed through its reconstructed meso-structures.In this work,the meso-structures of talus deposits that widely exist in the hydro-power engineering in the southwest of China were first reconstructed by small particles according to the in-situ photographs based on the self-adaptive PCNN digital image processing,and then numerical direct shear tests were carried out for studying the mechanical properties of talus deposits.Results indicate that the reconstructed meso-structures of talus deposits are more consistent with the actual situation because the self-adaptive PCNN digital image processing has a higher discrimination in the details of soil-rock segmentation.The existence and random distribution of rock blocks make the initial shear stiffness,the peak strength and the residual strength higher than those of the "pure soil" with particle size less than 1.25 cm apparently,but reduce the displacements required for the talus deposits reaching its peak shear strength.The increase of rock proportion causes a significant improvement in the internal friction angle of talus deposit,which to a certain degree leads to the characteristics of shear stress-displacement curves having a changing trend from the plastic strain softening deformation to the nonlinear strain hardening deformation,while an unconspicuous increase in cohesion.The uncertainty and heterogeneity of rock distributions cause the differences of rock proportion within shear zone,leading to a relatively strong fluctuation in peak strengths during the shear process,while movement features of rock blocks,such as translation,rotation and crossing,expand the scope of shear zone,increase the required shear force,and also directly lead to the misjudgment that the lower shear strength is obtained from the samples with high rock proportion.That,however,just explains the reason why the shear strength gained from a small amount of indoor test data is not consistent with engineering practice.展开更多
1 Introduction The Wuzhishan lead-zinc ore-concentrated area in Puding is located in the east of the Sichuan,Guizhou and Yunnan lead-zinc metallogenic domain,with the Youjiang-Nanpan River metallogenic province to the
The inductively coupled plasma chemical vapor deposition(ICP-CVD) deposited silicon nitride(SiN_(x)) thin film was evaluated for its application as the electrical insulating film for a capacitor device.In order to ach...The inductively coupled plasma chemical vapor deposition(ICP-CVD) deposited silicon nitride(SiN_(x)) thin film was evaluated for its application as the electrical insulating film for a capacitor device.In order to achieve highest possible dielectric strength of SiN_(x),the process parameters of ICP-CVD were carefully tuned to control hydrogen in SiN_(x) films by means of tuning N_(2)/SiH_(4) ratio and radio frequency(RF) power.Besides electrical measurements,the hydrogen content in the films was measured by dynamic secondary ion mass spectrometry(D-SIMS).Fourier transform infrared spectroscopy(FTIR) and micro Raman spectroscopy were used to characterize the SiN_(x) films by measuring Si-H and N-H bonds’ intensities.It was found that the more Si-H bonds lead to the higher dielectric strength.展开更多
This study investigated the inductively coupled plasma etching reactor and RF coils developed by North Microelectronic Corporation. Full three dimensional simulations were made at different discharge conditions. The s...This study investigated the inductively coupled plasma etching reactor and RF coils developed by North Microelectronic Corporation. Full three dimensional simulations were made at different discharge conditions. The simulations examined and compared the distribution and non-uniformity of several plasma parameters at a fixed position upon the wafer at different pressures and coil currents. These parameters included electron density, electron temperature and power deposition. The results demonstrate that the electron density, power deposition and uniformity increase with either higher pressure or stronger coil currents, while the electron temperature decreases at this condition. Coil number increase can reduce the non-uniformity of parameters in the spatial distribution. The linear relationship between power deposition and electron density does not always exist. The comparison between simulation results and experiment results is also presented in the paper.展开更多
To improve corrosion inhibition performance of copper foil with a novel two-step electrochemical modification processes,the surface of 35μm copper foils was coated with graphene oxide(GO)via electrochemical method at...To improve corrosion inhibition performance of copper foil with a novel two-step electrochemical modification processes,the surface of 35μm copper foils was coated with graphene oxide(GO)via electrochemical method at first step,then was further coated with 3-aminopropyltrimethoxysilane(APTS)at the second step.For the first step the copper foil acted as anode,and as cathode for the second one(we labeled it as E-GO).Optimum coating parameters for the preparation of E-GO coating are 5 V and 1 min with ratio of APTS/deionized water(DI)1.5/98.5(v/v).The physicochemical properties of modified coating were studied by X-ray diffraction(XRD),scanning electron microscopy(SEM)and hydrophilicity test.Electrochemical behavior of different samples were also investigated.The experimental results indicate that anti-corrosion performance is significantly improved with two-step modified coating.And E-GO coating shows more positive corrosion potential and the highest corrosion resistance rate than others according to the Tafel curve.It is also found that surface hydrophobicity of E-GO coating is significantly improved.展开更多
In the context of global warming and intensified human activities,glacier instability in plateau regions has increased,and glacier debris flows have become active,which poses a significant threat to the lives and prop...In the context of global warming and intensified human activities,glacier instability in plateau regions has increased,and glacier debris flows have become active,which poses a significant threat to the lives and property of people and socioeconomic development.The mass movement process of glacier debris flows is extremely complex,so this paper uses the 2018 Sedongpu glacier debris flow event on the Qinghai-Tibet Plateau as an example and applies a numerical simulation method to invert the whole process of mass movement.In view of the interaction between phases in the process of motion,we use the fluid-solid coupling method to describe the mass movement.The granular-flow model and drift-flux model are employed in FLOW3D software to study the mass movement process of glacier debris flows and explore their dynamic characteristics.The results indicate that the glacier debris flow lasted for 700 s,and the movement process was roughly divided into four stages,including initiation,scraping,surging and deposition;the depositional characteristics calculated by the fluid-solid coupling model are consistent with the actual survey results and have good reliability;strong erosion occurs during the mass movement,the clear volume amplification effect,and the first wave climbs 17.8 m across the slope.The fluid-solid coupling method can better simulate glacier debris flows in plateau regions,which is helpful for the study of the mechanism and dynamic characteristics of such disasters.展开更多
Quasi-one-dimensional ZrS_(3)nanoflakes attract intense interest attributed to their superior electrical and optical anisotropy,stemming from the low symmetry in the crystal structure.However,the conventional chemical...Quasi-one-dimensional ZrS_(3)nanoflakes attract intense interest attributed to their superior electrical and optical anisotropy,stemming from the low symmetry in the crystal structure.However,the conventional chemical vapor transport method for synthesizing bulk ZrS_(3)is limited by morphology and size controllability.It is highly desirable to propose a facile way to precisely synthesize ZrS_(3)nanoflakes.In this work,the chemical vapor deposition method is proposed as a feasible way to synthesize ZrS_(3)nanoflakes.The effects of various substrates and temperatures on ZrS_(3)synthesis have been investigated.For the as-grown ZrS_(3),good crystallinity is confirmed with X-ray diffraction and transmission electron microscopy.The structure and interlayer coupling are investigated with Raman scattering spectroscopy.The strong in-plane anisotropy and interlayer coupling of the ZrS_(3)nanoflakes are illustrated with angle-resolved Raman spectroscopy and temperature-dependent Raman characterization,respectively.This study demonstrates a feasible way for the synthesis of transition metal trisulfides,which may shed new light on the research of other two-dimensional anisotropic transition metal materials.展开更多
基金financially supported by National Natural Science Foundation of China(NSFC)(Nos.12275043 and 11935005)the Fundamental Research Funds for the Central Universities(No.DUT21TD104)China Scholarship Council(No.202106060085)。
文摘The effect of a negative DC bias,|V_(dc)|,on the electrical parameters and discharge mode is investigated experimentally in a radiofrequency(RF)capacitively coupled Ar plasma operated at different RF voltage amplitudes and gas pressures.The electron density is measured using a hairpin probe and the spatio-temporal distribution of the electron-impact excitation rate is determined by phase-resolved optical emission spectroscopy.The electrical parameters are obtained based on the waveforms of the electrode voltage and plasma current measured by a voltage probe and a current probe.It was found that at a low|V_(dc)|,i.e.inα-mode,the electron density and RF current decline with increasing|V_(dc)|;meanwhile,the plasma impedance becomes more capacitive due to a widened sheath.Therefore,RF power deposition is suppressed.When|V_(dc)|exceeds a certain value,the plasma changes toα–γhybrid mode(or the discharge becomes dominated by theγ-mode),manifesting a drastically growing electron density and a moderately increasing RF current.Meanwhile,the plasma impedance becomes more resistive,so RF power deposition is enhanced with|V_(dc)|.We also found that the electrical parameters show similar dependence on|V_(dc)|at different RF voltages,andα–γmode transition occurs at a lower|V_(dc)|at a higher RF voltage.By increasing the pressure,plasma impedance becomes more resistive,so RF power deposition and electron density are enhanced.In particular,theα–γmode transition tends to occur at a lower|V_(dc)|with increase in pressure.
基金the National Basic Research Program of China (Grant No. 2008CB425802)
文摘Numerical analyses of earthquake effects on the deformation, stability, and load transfer of a slope covered by deposits are traditionally based on the assumption that the slope is a continuum. It would be problematic, however, to extend these approaches to the simulation of the slide, collapse and disintegration of the deposits under seismic loading. Contrary to this, a discrete element method (DEM) provides a means to consider large displacement and rotation of the non-continuum. To take the advantages of both methods of continuum and non- continuum analyses, seismic responses of a slope covered by deposits are studied by coupling a twodimensional (a-D) finite difference method and a 2-D DEM, with the bedrock being modelled by the finite difference grids and the deposits being represented by disks. A smooth transition across the boundaries of the continuous/discontinuous domains is obtained by imposing the compatibility condition and equilibrium condition along their interfaces. In the course of computation, the same time-step value is chosen for both continuous and discontinuous domains. The free-field boundaries are adopted for lateral grids of bedrock domain to eliminate the radiation damping effect. When the static equilibrium under gravity load is obtained, dynamic calculation begins under excitation of the seismic wave input from the continuum model bottom. In this way, responses to the earthquake of a slope covered by deposits are analyzed dynamically. Combined with field monitoring data, deformation and stability of the slope are discussed. The effects of the relevant parameters of spectrum characteristic, duration, andpeak acceleration of seismic waves are further investigated and explained from the simulations.
基金MGMR Eighth Five- Year Plan Basic Geology Research Foundation Grant 8502216China National Natural Science Foundation Grant 49173169
文摘The skarn and ore bodies of the stratabound skarn copper deposits of Tongling, Anhui Province, are both controlled by definite stratigraphic horizons, and they are concordant with the strata. They occur as layers and layer-like bodies in permeable carbonate rocks of the Middle-Upper Carboniferous Huanglong and Chuanshan Formations which are underlain by impermeable shale or siliceous rocks of the Upper Devonian Wutong Formation. The authors study the dynamics of ore-forming processes of the ore deposits with the dynamic model of coupled transport and reaction, and the following results are obtained: The salinity gradient and flow rate of the ore-forming fluids can both promote the mixing and reaction of juvenile water and formation water, and the permeable strata are favourable sites for the intense transport-reaction of mixing and the formation of deposits. (2) As isothermal transport-reaction took place along the bedding of strata, the moving transport-reaction front formed at the contact between the ore-forming fluids and the rocks advanced slowly along the permeable strata, and then stratiform skarn and ore bodies concordant with the strata were formed. (3) The gradient transport-reaction taking place across the isotherms in the cross-bedding direction caused the mineralogical composition to alter gradually from magnesian skarn to sulphide ore bodies.
文摘Longtoushan Sn-polymetal deposit is a large-scale deposit of high-tenor. The ore-bodies occur in reef limestone of middle Devonian. There is much anthraxolite in reef limestone and ore-bodies. The anthraxolite is the postmature result of oil-gas' thermal metamorphism. The close relationship of anthraxolite and Sn-polymetal deposit reveals the space-time relation between oil-gas evolution and Sn-polymetal mineralization. Sulfur isotope of Longtoushan deposit is close to oil's sulfur in Devonian, which indicates obvious relationship between the sulfur's source of deposit and oil-gas' activity. The forming of Longtoushan deposit relates to exhalative-sedimentary mineralization in Devonian. Because of the favorable hydrocarbon-forming condition of Longtoushan reef and surrounding basin facies' black shale and peat, coupling of ore-formation and hydrocarbon-forming occurs in seabed's hydrothermal convection. The distributing of ore-forming elements indicates the presence of hydrothermal convection system. The thermal fluid containing organic matters conduces to Sn-polymetal elements' activation and transfer, and provides catalyzing condition to the transforming from SO42- to S2-. The erosion action of brine containing organic acid to reef limestone induces the growing of crannies and karst's caverns, which provides advantageous space to Sn-polymetal mineralization. The heat source of mineralization provides thermocatalysis condition to hydrocarbon-forming. When the circulatory fluid containing oil-gas enters the high-temperature region(>150 ℃ ), the oil-gas is decomposed and anthraxolite comes into being.
文摘This paper presents a method of establishing a hydrothermal ore-forming reaction system. On the basis of the study of four typical hydrothermal deposits, the folowing conclusions concerning geochemical dynamic controlling during hydrothermal mineralization have been drawn: (1 ) The regional tectonic activities control the concentration and dispersion of elements in the ore-forming process in terms of their effects on the thermodynamic nature and conditions of the ore-forming reaction system. (2) During hydrothermal mineralization the activities of ore-bearing faults can be divided into two stages: the brittle splitting stage and the brirtle-tough tensing stage, which would create characteristically different geodynamic conditions for the geochemical thermodynamic ore-forming system. (3) The hydrothermal ore-forming reaction system is an open dynamic system. At the brittle splitting stage the system was so strongly supersaturated and unequilibrated as to speed up and enhance the crystallization and differentiation of ore-forming fluids. And at the brittle-tough tensing stage, the ore-forming system was in a weak supersaturated state; with decreasing temperature and pressure the crystallization of oreforming material would slow down, and it can be regarded as an equilibrated state. (4) In the later stages of hydrothermal evolution, gold would be concentrated in the residual ore-forming solution. The pulsating fracture activity in this stage led to the crush of pyrite ore and it was then filled with gold-enriched solution, forming high-grade "fissure" gold ore. This ore-forming process could be called the coupling mechanism of ore formation.
基金Project(2013BAB06B00) supported by the National Key Technology R&D Programof ChinaProject(2011CB013504) supported by the National Basic Research Program of ChinaProject(50911130366) supported by the National Natural Science Foundation of China
文摘The macro mechanical properties of materials with characteristics of large scale and complicated structural composition can be analyzed through its reconstructed meso-structures.In this work,the meso-structures of talus deposits that widely exist in the hydro-power engineering in the southwest of China were first reconstructed by small particles according to the in-situ photographs based on the self-adaptive PCNN digital image processing,and then numerical direct shear tests were carried out for studying the mechanical properties of talus deposits.Results indicate that the reconstructed meso-structures of talus deposits are more consistent with the actual situation because the self-adaptive PCNN digital image processing has a higher discrimination in the details of soil-rock segmentation.The existence and random distribution of rock blocks make the initial shear stiffness,the peak strength and the residual strength higher than those of the "pure soil" with particle size less than 1.25 cm apparently,but reduce the displacements required for the talus deposits reaching its peak shear strength.The increase of rock proportion causes a significant improvement in the internal friction angle of talus deposit,which to a certain degree leads to the characteristics of shear stress-displacement curves having a changing trend from the plastic strain softening deformation to the nonlinear strain hardening deformation,while an unconspicuous increase in cohesion.The uncertainty and heterogeneity of rock distributions cause the differences of rock proportion within shear zone,leading to a relatively strong fluctuation in peak strengths during the shear process,while movement features of rock blocks,such as translation,rotation and crossing,expand the scope of shear zone,increase the required shear force,and also directly lead to the misjudgment that the lower shear strength is obtained from the samples with high rock proportion.That,however,just explains the reason why the shear strength gained from a small amount of indoor test data is not consistent with engineering practice.
基金funded by the national key basic research development program (2014 cb440905)key project of national natural science funds (41430315)
文摘1 Introduction The Wuzhishan lead-zinc ore-concentrated area in Puding is located in the east of the Sichuan,Guizhou and Yunnan lead-zinc metallogenic domain,with the Youjiang-Nanpan River metallogenic province to the
基金Project supported by the Natural Science Foundation of Jiangsu Higher Education Institutions of China(Grant Nos.19KJD140002 and 19KJB140008)the Key Projects of Ministry of Science and Technology of China(Grant No.SQ2020YFF0407077)+3 种基金Postgraduate Research&Practice Innovation Program of Jiangsu Province,China(Grant Nos.2020XKT786 and KYCX202337)the National Foreign Experts Bureau High-end Foreign Experts Project,China(Grant No.G20190114003)the Key Research and Development Program of Jiangsu Province,China(Grant No.BE2018063)the Scientific Research Program for Doctoral Teachers of JSNU(Grant No.9212218113)。
文摘The inductively coupled plasma chemical vapor deposition(ICP-CVD) deposited silicon nitride(SiN_(x)) thin film was evaluated for its application as the electrical insulating film for a capacitor device.In order to achieve highest possible dielectric strength of SiN_(x),the process parameters of ICP-CVD were carefully tuned to control hydrogen in SiN_(x) films by means of tuning N_(2)/SiH_(4) ratio and radio frequency(RF) power.Besides electrical measurements,the hydrogen content in the films was measured by dynamic secondary ion mass spectrometry(D-SIMS).Fourier transform infrared spectroscopy(FTIR) and micro Raman spectroscopy were used to characterize the SiN_(x) films by measuring Si-H and N-H bonds’ intensities.It was found that the more Si-H bonds lead to the higher dielectric strength.
基金supported by North Microelectronic Corporation (NMC).
文摘This study investigated the inductively coupled plasma etching reactor and RF coils developed by North Microelectronic Corporation. Full three dimensional simulations were made at different discharge conditions. The simulations examined and compared the distribution and non-uniformity of several plasma parameters at a fixed position upon the wafer at different pressures and coil currents. These parameters included electron density, electron temperature and power deposition. The results demonstrate that the electron density, power deposition and uniformity increase with either higher pressure or stronger coil currents, while the electron temperature decreases at this condition. Coil number increase can reduce the non-uniformity of parameters in the spatial distribution. The linear relationship between power deposition and electron density does not always exist. The comparison between simulation results and experiment results is also presented in the paper.
基金Funded by the National Natural Science Foundation of China(Nos.21671086 and 21761013)the Ganzhou Key Research&Development Projects(Ganshikefa[2019]60)。
文摘To improve corrosion inhibition performance of copper foil with a novel two-step electrochemical modification processes,the surface of 35μm copper foils was coated with graphene oxide(GO)via electrochemical method at first step,then was further coated with 3-aminopropyltrimethoxysilane(APTS)at the second step.For the first step the copper foil acted as anode,and as cathode for the second one(we labeled it as E-GO).Optimum coating parameters for the preparation of E-GO coating are 5 V and 1 min with ratio of APTS/deionized water(DI)1.5/98.5(v/v).The physicochemical properties of modified coating were studied by X-ray diffraction(XRD),scanning electron microscopy(SEM)and hydrophilicity test.Electrochemical behavior of different samples were also investigated.The experimental results indicate that anti-corrosion performance is significantly improved with two-step modified coating.And E-GO coating shows more positive corrosion potential and the highest corrosion resistance rate than others according to the Tafel curve.It is also found that surface hydrophobicity of E-GO coating is significantly improved.
基金supported by the National Natural Science Foundation of China(Nos.U20A20111,41977229)the Sichuan Youth Science and Technology Innovation Research Team Project(No.2020JDTD0006).
文摘In the context of global warming and intensified human activities,glacier instability in plateau regions has increased,and glacier debris flows have become active,which poses a significant threat to the lives and property of people and socioeconomic development.The mass movement process of glacier debris flows is extremely complex,so this paper uses the 2018 Sedongpu glacier debris flow event on the Qinghai-Tibet Plateau as an example and applies a numerical simulation method to invert the whole process of mass movement.In view of the interaction between phases in the process of motion,we use the fluid-solid coupling method to describe the mass movement.The granular-flow model and drift-flux model are employed in FLOW3D software to study the mass movement process of glacier debris flows and explore their dynamic characteristics.The results indicate that the glacier debris flow lasted for 700 s,and the movement process was roughly divided into four stages,including initiation,scraping,surging and deposition;the depositional characteristics calculated by the fluid-solid coupling model are consistent with the actual survey results and have good reliability;strong erosion occurs during the mass movement,the clear volume amplification effect,and the first wave climbs 17.8 m across the slope.The fluid-solid coupling method can better simulate glacier debris flows in plateau regions,which is helpful for the study of the mechanism and dynamic characteristics of such disasters.
基金S.L.acknowledges the financial support from the National Natural Science Foundation of China(Nos.22175060 and 21975067)the Natural Science Foundation of Hunan Province of China(Nos.2021JJ10014 and 2021JJ30092)。
文摘Quasi-one-dimensional ZrS_(3)nanoflakes attract intense interest attributed to their superior electrical and optical anisotropy,stemming from the low symmetry in the crystal structure.However,the conventional chemical vapor transport method for synthesizing bulk ZrS_(3)is limited by morphology and size controllability.It is highly desirable to propose a facile way to precisely synthesize ZrS_(3)nanoflakes.In this work,the chemical vapor deposition method is proposed as a feasible way to synthesize ZrS_(3)nanoflakes.The effects of various substrates and temperatures on ZrS_(3)synthesis have been investigated.For the as-grown ZrS_(3),good crystallinity is confirmed with X-ray diffraction and transmission electron microscopy.The structure and interlayer coupling are investigated with Raman scattering spectroscopy.The strong in-plane anisotropy and interlayer coupling of the ZrS_(3)nanoflakes are illustrated with angle-resolved Raman spectroscopy and temperature-dependent Raman characterization,respectively.This study demonstrates a feasible way for the synthesis of transition metal trisulfides,which may shed new light on the research of other two-dimensional anisotropic transition metal materials.