CrN films have been synthesized on Si（100） wafer by inductively coupled plasma （ICP）-enhanced radio frequency （RF） magnetron sputtering. The effects of ICP power on microstructure, crystal orientation, nanohardn...CrN films have been synthesized on Si（100） wafer by inductively coupled plasma （ICP）-enhanced radio frequency （RF） magnetron sputtering. The effects of ICP power on microstructure, crystal orientation, nanohardness and stress of the CrN films have been investigated. With the increase of ICP power, the current density at substrate increases and the films exhibit denser structure, while the DC self-bias of target and the deposition rate of films decrease. The films change from crystal structure to amorphous structure with the increase of ICP power. The measured nanohardness and the compressive stress of films reach the topmost at ICP power of 150 W and 200 W, respectively. The mechanical properties of films show strong dependence on the crystalline structure and the density influenced by the ICP power.展开更多
Interlayer exchange coupling was first observed in Fe/Cr/Fe(001) sandwiches and Gd/Y multilayer films. In Gd/Y, the interlayer exchange is an oscillatory function of the Y thickness. Now strong interlayer exchange eff...Interlayer exchange coupling was first observed in Fe/Cr/Fe(001) sandwiches and Gd/Y multilayer films. In Gd/Y, the interlayer exchange is an oscillatory function of the Y thickness. Now strong interlayer exchange effects have been found in many multilayered structures based on ferromagnetic transition metals such as Fe/Cu, Ag/Ni and Fe/Au multilayer films. The multilayer films based on Fe-N alloy attracted展开更多
文摘CrN films have been synthesized on Si（100） wafer by inductively coupled plasma （ICP）-enhanced radio frequency （RF） magnetron sputtering. The effects of ICP power on microstructure, crystal orientation, nanohardness and stress of the CrN films have been investigated. With the increase of ICP power, the current density at substrate increases and the films exhibit denser structure, while the DC self-bias of target and the deposition rate of films decrease. The films change from crystal structure to amorphous structure with the increase of ICP power. The measured nanohardness and the compressive stress of films reach the topmost at ICP power of 150 W and 200 W, respectively. The mechanical properties of films show strong dependence on the crystalline structure and the density influenced by the ICP power.
基金Project supported by the National Natural Science Foundation of China.
文摘Interlayer exchange coupling was first observed in Fe/Cr/Fe(001) sandwiches and Gd/Y multilayer films. In Gd/Y, the interlayer exchange is an oscillatory function of the Y thickness. Now strong interlayer exchange effects have been found in many multilayered structures based on ferromagnetic transition metals such as Fe/Cu, Ag/Ni and Fe/Au multilayer films. The multilayer films based on Fe-N alloy attracted
