The line width(often synonymously used for critical dimension,CD)is a crucial parameter in integrated circuits.To accurately control CD values in manufacturing,a reasonable CD reference material is required to calibra...The line width(often synonymously used for critical dimension,CD)is a crucial parameter in integrated circuits.To accurately control CD values in manufacturing,a reasonable CD reference material is required to calibrate the corresponding instruments.We develop a new reference material with nominal CDs of 160 nm,80 nm,and 40 nm.The line features are investigated based on the metrological scanning electron microscope which is developed by the National Institute of Metrology(NIM)in China.Also,we propose a new characterization method for the precise measurement of CD values.After filtering and leveling the intensity profiles,the line features are characterized by the combination model of the Gaussian and Lorentz functions.The left and right edges of CD are automatically extracted with the profile decomposition and k-means algorithm.Then the width of the two edges at the half intensity position is regarded as the standard CD value.Finally,the measurement results are evaluated in terms of the sample,instrument,algorithm,and repeatability.The experiments indicate efficiency of the proposed method which can be easily applied in practice to accurately characterize CDs.展开更多
目的 研究红细胞分布宽度-白蛋白比值(red cell distribution width-albumin ratio,RAR)与老年危重症患者病死率的相关性。方法 采用回顾性队列研究设计,选择2007年—2020年重症监护室医学信息(Medical Information Mart for Intensive ...目的 研究红细胞分布宽度-白蛋白比值(red cell distribution width-albumin ratio,RAR)与老年危重症患者病死率的相关性。方法 采用回顾性队列研究设计,选择2007年—2020年重症监护室医学信息(Medical Information Mart for Intensive Care,MIMIC)数据库中所有符合纳入标准的患者作为研究对象,根据RAR三分位间距将其分成三组。比较分析三组一般资料,绘制Kaplan-Meier生存曲线评估不同RAR组患者28d病死率。采用Cox比例风险回归模型确定RAR与病死率的校正风险比。绘制限制性立方样条研究RAR作为连续变量对病死率的影响。亚组分析采用层次回归模型。结果 共12 293例患者纳入研究,其中RAR≤4.09组4 114例,4.09 5.31组4 086例。Kaplan-Meier生存曲线显示RAR>5.31组28d病死率最高(34.04%)。单因素Cox回归分析发现RAR与28d病死率相关(HR=1.24,95%CI:1.22~1.26,P<0.001)。Cox回归模型发现,调整潜在混杂因素后高RAR仍然是28d病死率的独立危险因素(HR=1.15,95%CI:1.13~1.18,P<0.001)。亚组分析显示RAR对28d病死率的影响效应在年龄、血小板、性别等亚组高(P<0.05)。限制性立方样条显示RAR与28d病死率基本呈线性正相关。结论 高RAR水平是老年危重症患者病死率的独立危险因素。展开更多
In this study a novel method was presented to parameterize the critical current of Yttrium Barium Copper Oxide(YBCO)tapes based on their width,thickness,magnetothermal operational conditions,and the applied strain.For...In this study a novel method was presented to parameterize the critical current of Yttrium Barium Copper Oxide(YBCO)tapes based on their width,thickness,magnetothermal operational conditions,and the applied strain.For this purpose,a fuzzy‐logic‐based model was developed that take tapes structures and their operational conditions as inputs to calculate their critical current,as output.The results of critical current parame-terization by fuzzy‐logic‐based model showed that the relative error of the proposed model is less than 3%comparing to experimentally acquired data.Then,the results of presented model was compared to results of semi‐analytical fitting‐based models and fully‐analytical fitting based models.The comparisons showed the better performance in terms of accuracy and error of fuzzy logic model over fitting‐based methods.At last,the results were also compared with the Artificial Neural Network(ANN)‐based parameterization model and Adaptive Nero‐Fuzzy Interference System(ANFIS)‐based parameterization model.The proposed method had 6%to 8%higher accuracy and about 47%to 54%lower root mean squared error.展开更多
In this paper, we show that when Minkowski measure of asymmetry of convex body K of constant width is bigger than a（n-1）, K has at least n＋1 critical chords, where a（n）=n＋（2n（n＋1））√1/2/n＋2.
基金supported by the National Key Research and Development Program of China(Grant No.2020YFF0218403)the Basic Scientific Research Operating Fund of NIM(Grant No.AKYZD2007-1)。
文摘The line width(often synonymously used for critical dimension,CD)is a crucial parameter in integrated circuits.To accurately control CD values in manufacturing,a reasonable CD reference material is required to calibrate the corresponding instruments.We develop a new reference material with nominal CDs of 160 nm,80 nm,and 40 nm.The line features are investigated based on the metrological scanning electron microscope which is developed by the National Institute of Metrology(NIM)in China.Also,we propose a new characterization method for the precise measurement of CD values.After filtering and leveling the intensity profiles,the line features are characterized by the combination model of the Gaussian and Lorentz functions.The left and right edges of CD are automatically extracted with the profile decomposition and k-means algorithm.Then the width of the two edges at the half intensity position is regarded as the standard CD value.Finally,the measurement results are evaluated in terms of the sample,instrument,algorithm,and repeatability.The experiments indicate efficiency of the proposed method which can be easily applied in practice to accurately characterize CDs.
文摘目的 研究红细胞分布宽度-白蛋白比值(red cell distribution width-albumin ratio,RAR)与老年危重症患者病死率的相关性。方法 采用回顾性队列研究设计,选择2007年—2020年重症监护室医学信息(Medical Information Mart for Intensive Care,MIMIC)数据库中所有符合纳入标准的患者作为研究对象,根据RAR三分位间距将其分成三组。比较分析三组一般资料,绘制Kaplan-Meier生存曲线评估不同RAR组患者28d病死率。采用Cox比例风险回归模型确定RAR与病死率的校正风险比。绘制限制性立方样条研究RAR作为连续变量对病死率的影响。亚组分析采用层次回归模型。结果 共12 293例患者纳入研究,其中RAR≤4.09组4 114例,4.09 5.31组4 086例。Kaplan-Meier生存曲线显示RAR>5.31组28d病死率最高(34.04%)。单因素Cox回归分析发现RAR与28d病死率相关(HR=1.24,95%CI:1.22~1.26,P<0.001)。Cox回归模型发现,调整潜在混杂因素后高RAR仍然是28d病死率的独立危险因素(HR=1.15,95%CI:1.13~1.18,P<0.001)。亚组分析显示RAR对28d病死率的影响效应在年龄、血小板、性别等亚组高(P<0.05)。限制性立方样条显示RAR与28d病死率基本呈线性正相关。结论 高RAR水平是老年危重症患者病死率的独立危险因素。
文摘In this study a novel method was presented to parameterize the critical current of Yttrium Barium Copper Oxide(YBCO)tapes based on their width,thickness,magnetothermal operational conditions,and the applied strain.For this purpose,a fuzzy‐logic‐based model was developed that take tapes structures and their operational conditions as inputs to calculate their critical current,as output.The results of critical current parame-terization by fuzzy‐logic‐based model showed that the relative error of the proposed model is less than 3%comparing to experimentally acquired data.Then,the results of presented model was compared to results of semi‐analytical fitting‐based models and fully‐analytical fitting based models.The comparisons showed the better performance in terms of accuracy and error of fuzzy logic model over fitting‐based methods.At last,the results were also compared with the Artificial Neural Network(ANN)‐based parameterization model and Adaptive Nero‐Fuzzy Interference System(ANFIS)‐based parameterization model.The proposed method had 6%to 8%higher accuracy and about 47%to 54%lower root mean squared error.
基金Supported by the Innovative Project of College Students of Jiangsu Province(201710332019Z)the Natural Science Foundation of Jiangsu Province(BK20171218)the National Natural Science Foundation of China(11671293)
文摘In this paper, we show that when Minkowski measure of asymmetry of convex body K of constant width is bigger than a（n-1）, K has at least n＋1 critical chords, where a（n）=n＋（2n（n＋1））√1/2/n＋2.
